JPS5952420A - Thin-film magnetic head - Google Patents

Abstract

PURPOSE:To obtain a highly reliable thin film magnetic head which makes an excellent tape touch and has proper stress in a magnetic layer by using a glass thin film as the adhesive layer between a nonmagnetic substrate and the magnetic layer and adhering the nonmagnetic substrate and magnetic layer together tightly. CONSTITUTION:The thin film magnetic head consists of the laminate of the nonmagnetic substrate 1', magnetic layer 2, and nonmagnetic substrate 1, and a head gap 4 having specific width in the thickness direction of the magnetic layer 2 is formed. The magnetic layer 2 is formed on the nonmagnetic substrate 1 by sputtering and adhered to the nonmagnetic substrate 1' by using the glass thin film 3 with low melting point as an adhesive. The glass thin film 3 has excellent coupling with the nonmagnetic substrate 1' and magnetic layer 3, and causes no trouble to a run of a tape even when contacting the tape; and the film thickness is specified in its manufacture process to generate specific stress in the magnetic layer 3, obtaining specific magnetic characteristics.

Description

[Detailed Description of the Invention] [Field of Application of the Invention] A thin-film magnetic head having a magnetic layer between two non-magnetic substrates and a predetermined head gap formed in the thickness direction of the magnetic layer, particularly a thin-film magnetic head that has a magnetic layer between two non-magnetic substrates, and a predetermined head gap formed in the thickness direction of the magnetic layer. This invention relates to adhesion between a substrate and the magnetic layer.

[Prior art]

Conventionally, thin-film magnetic heads have been developed as magnetic heads used in video tape recorders and the like, and the trunk width can be made sufficiently narrow, thereby making it possible to improve the recording density.

Such a thin film magnetic head consists of a magnetic layer and a non-magnetic substrate that maintains the magnetic property.The magnetic layer is formed on one side of the non-magnetic substrate by sputtering or the like, and the other side of the non-magnetic substrate is formed on the surface of the magnetic layer. The magnetic layer is sandwiched between non-magnetic substrates in the form of a sandwich. The head gap is formed with a predetermined gap length in the thickness direction of the magnetic layer, and the inclination of the head cap can be determined according to the azimuth angle.

By the way, in such a thin film magnetic head, the nonmagnetic substrate and the magnetic layer have conventionally been bonded together using a resin. In this way, using resin as an adhesive is not reliable in terms of adhesive strength, and the resin layer is still exposed on the contact surface of the thin-film magnetic head with the tape. This has a significant negative effect on the so-called tape touch of the magnetic head to the tape, impeding the smooth running of the tape, and causing abrasion of the resin layer due to the running of the tape. In order to reduce this change, it is preferable to make the adhesive layer as thin as possible, but this further reduces the reliability of the adhesive strength. The present invention provides a highly reliable thin film magnetic head in which a nonmagnetic substrate and a magnetic layer are firmly bonded, a tape touch is good, and an appropriate stress is present in the magnetic layer, eliminating the drawbacks of the above-mentioned conventional technology. It is in.

[Summary of the invention, -stop]

In order to achieve this object, the present invention is characterized in that the adhesive layer between the nonmagnetic substrate and the magnetic layer is a glass thin film.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to the drawings.

No. 11 1 is a front view showing an embodiment of the thin film magnetic head according to the present invention, in which 1.1' is a nonmagnetic substrate, 2 is a magnetic layer, 3 is a glass thin film, and 4 is a head gap.

In the figure, the thin film magnetic head is constructed as a laminate of a nonmagnetic substrate 1', a magnetic layer 2, and a nonmagnetic substrate 1, and a head gap 4 of a predetermined width is formed in the thickness direction of the magnetic layer 2. The magnetic layer 2 is formed on the nonmagnetic substrate 1 by sputtering or the like, and is still bonded to the nonmagnetic substrate 1' using a thin glass film 3 having a low melting point as an adhesive.

The glass thin film 3 has good bonding properties with each of the non-magnetic substrates 1 and 1 magnetic layer 3, and even if it comes into contact with a tape (not shown), it does not particularly hinder the running of the tape. Because the film thickness can be controlled arbitrarily in the process,
By setting the film thickness to a predetermined value, a predetermined stress is generated in the magnetic layer 3 to produce predetermined magnetic characteristics.

2(A) to 2(H) are process diagrams showing a specific example of a method for manufacturing the thin 1ixi magnetic head of FIG.
Parts corresponding to the figures are given the same reference numerals. First, for example, a non-magnetic substrate such as Mn0-Ni0 system 1
2(A)), and on its surface, a magnetic layer 2 made of, for example, a Sendust thin film is formed (FIG. 2(B)).
). - As a specific example, a sendust thin film having a thickness of about 10 μm was formed using a DC 4-pole sputtering device.

Next, on the surface of the magnetic layer 2, a thin glass film 3 having a thickness of about 0.3 μm is formed by sputtering.
), and at the same time, similarly on the surface of the other non-magnetic substrate 11.
A glass thin film 3 having a thickness of about 0.3 μm was formed (FIG. 2(D)). Here, the glass thin film 5 is manufactured by Konin Y Co., Ltd.
7) Using ≠1417 glass, which is a P b -based low melting point glass, as a material, the glass was used as a target, and a power of IW/cm 2 was applied using an RF sputtering device.

Both are butted against each other so that the glass thin film 3 overlaps (second
The non-magnetic substrate 1.1' was held at 620 oc for 10 minutes while applying a predetermined pressure to form a sendust core material (Fig. 2 (F)). Then, this sendust core material is cut in the direction crossing the magnetic layer 3, that is, in the thickness direction of the magnetic layer 3, and each cut surface is lapped to a mirror finish to form a winding window (not shown yet). After that, a non-magnetic gap spacer 4' is placed on each cut surface at approximately 0 and 121 mm.
After forming it to a thickness of 1 m (see Figure 2 (G)),
The above-mentioned cut surfaces were butted together to form an adhesive bond bond and a Hered gap 4 to obtain the thin film magnetic head shown in Fig. 1 (
Figure 2 (H)).

As is clear from this manufacturing method, the track width is approximately 1
It is possible to obtain an extremely narrow thin film magnetic head of 0 μm,
The thickness of the glass thin film 3 can be arbitrarily set depending on the sputtering time.

The head gap 4 can be set to have a predetermined azimuth angle by setting the cutting direction of the sendust core material according to the azimuth angle (FIG. 2(G)).

FIG. 3 shows the it! of a thin film magnetic head according to the present invention. 2 is a front view showing Example 2; FIG. ．． 22 is a magnetic thin film, 5 is an interlayer film, and parts corresponding to those in FIG. 1 are given the same reference numerals.

This embodiment is a thin film magnetic disk in which the magnetic layer 2 is multi-centered and the track width of the head gap is widened. The magnetic layer 2 has a multilayer structure including a magnetic thin film 21, an interlayer film 5, and a magnetic diameter thin film 22. The interlayer film 5 serves to remove eddy currents generated in the magnetic layer, and is preferably made of a nonmagnetic insulating material. The track width of the head gap 4 can be made arbitrary by sequentially forming magnetic films via interlayer films.

This embodiment has the same structure as the embodiment shown in FIG. 1 except for the magnetic layer 2, and is also similar in function.

4(A) to 4(N) are process diagrams showing a specific example of a method for manufacturing the thin film magnetic head of FIG. 3, and parts corresponding to those in FIG. 3 are given the same reference numerals.

Here, the case of a thin film magnetic head in which the track width of the head gap is approximately 20 μm will be described.

In the steps of FIGS. 4(A) and 4(B), the magnetic film 21 has a thickness of approximately 1 mm.
The steps are the same as those in FIGS. 2(A) and 2(B) except that the thickness is 0 μm.

Next, on the surface of the magnetic film 21, a non-magnetic insulating film having a thickness of 80 OA is formed by sputtering 5 iOz using an RF sputtering device, and this is used as the interlayer film 5 (FIG. 4(C)). On the surface of the interlayer film 50, as in the case of the magnetic film 21, sendust is sputtered to form a magnetic film 22 with a thickness of about 1 μm (FIG. 4(D)), and on top of that,
Similarly to the process in FIG.
A thin film 3 of low melting point b glass is formed to a thickness of about 0.25 μm (FIG. 4(E)).

Next, the glass thin film 3 formed on the non-magnetic substrate 1' and the glass thin film 3 on the magnetic film 22 are formed in the same process as shown in FIG. 2(D).
By butting them together (Fig. 4 (F)), applying pressure and heating, sendust core material (Fig. 4 (G)) is obtained.
). The subsequent steps are the same as those shown in FIGS.
The track width of head gap 4 is approximately 2071 m.
A thin film magnetic head shown in FIG. 3 is obtained.

As is clear from this manufacturing method, FIG.

A Helad gap of an arbitrary track width can be formed by changing the thickness of the magnetic film in the steps (B) and (D) and the number of layers of magnetic films by repeating the steps in FIG. 42 (C) and (D). I can do it.

In the above examples, PB-based low melting point glass was used as the adhesive, but it is clear that any suitable low melting point glass can be used without being limited to this, and the above manufacturing method can also be used. a magnetic layer to be bonded;
Although the glass thin film was formed on both nonmagnetic substrates, the same effect can be obtained even if the glass thin film is formed on only one of the substrates.

〔Effect of the invention〕

As explained above, according to the present invention, the non-magnetic substrate and the magnetic layer are bonded together using a glass thin film, so that the adhesion between the two is improved and tape touch is achieved. Furthermore, since the thickness of the glass thin film can be set arbitrarily, the stress of the magnetic layer can be set appropriately and good magnetic properties can be obtained, eliminating the drawbacks of the above-mentioned conventional technology. A thin film magnetic head with excellent functionality can be provided.

[Brief explanation of the drawing]

FIG. 1 is a front view showing an embodiment of a thin film magnetic head according to the present invention, and FIGS. 2(A) to 2(H) are views. FIG. 1 is a process diagram showing a specific example of a method for manufacturing a thin film magnetic head, FIG. 3 is a front view showing another embodiment of a thin film IB magnetic head according to the present invention, and FIG. ) is a process diagram showing a specific example of a method for manufacturing the thin film magnetic head shown in FIG. 3. 1.1'...Nonmagnetic substrate, 2...Magnetic layer, 2.22...Magnetic film, 3...Glass thin film, 4... ...head cap, 5...interlayer membrane, agent patent attorney Usui 1) Li Office 1. Continued from page 1 of J-O2 Figure 4 Figure 1 0 Inventor: Hitachi, Ltd. Home Appliance Research Laboratory, 292 Yoshida-cho, Totsuka-ku, Yokohama, Onogama

Claims (1)

[Scope of Claims] (1) A thin film magnetic head comprising a magnetic layer between first and second non-magnetic substrates and a predetermined head gap formed in the thickness direction of the magnetic layer, wherein the magnetic layer is the first
1. A thin film magnetic head formed on a non-magnetic substrate, wherein the magnetic layer and the second non-magnetic substrate are bonded together using a glass thin film as an adhesive. (2) In claim (1), the magnetic layer is a thin film magnetic head that is a single-layer magnetic thin film. (3) In claim (1), the magnetic layer is a single-layer magnetic thin film. , a thin film magnetic head characterized in that the magnetic layer has a multilayer structure in which magnetic thin films and layer 1141 films are alternately laminated, and the interlayer film is interposed between the magnetic thin films.