JPS5947857U - Gas introduction sample device for sample analysis devices, etc. - Google Patents
Gas introduction sample device for sample analysis devices, etc.Info
- Publication number
- JPS5947857U JPS5947857U JP14359082U JP14359082U JPS5947857U JP S5947857 U JPS5947857 U JP S5947857U JP 14359082 U JP14359082 U JP 14359082U JP 14359082 U JP14359082 U JP 14359082U JP S5947857 U JPS5947857 U JP S5947857U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- shield
- gas
- space
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例を示す断面図、第２図は他の
実施例を示す試料ホルダ一部の断面図である。
１：試料室、２：試料ステージ、３：逆台形状突起、４
：あり溝、５：試料ホルダー、７：第１の遮蔽体、７ａ
：微小開口、８：空間、９：パイプ、１０：ベローズ、
１１：ガス導入管、１２：第２の遮蔽体、１２ａ：微小
開口、１３：排気空間、１４：パイプ、１５：ベローズ
、１６：排気管、１７：電子線、１８：キャピラリー。FIG. 1 is a sectional view showing one embodiment of the present invention, and FIG. 2 is a sectional view of a part of a sample holder showing another embodiment. 1: Sample chamber, 2: Sample stage, 3: Inverted trapezoidal projection, 4
: Dovetail groove, 5: Sample holder, 7: First shield, 7a
: Micro opening, 8: Space, 9: Pipe, 10: Bellows,
11: gas introduction pipe, 12: second shield, 12a: minute opening, 13: exhaust space, 14: pipe, 15: bellows, 16: exhaust pipe, 17: electron beam, 18: capillary.
Claims (1)
ダーを着脱可能に設置し、このホルダー上に保持した試
料に荷電粒子線や放射線を照射して該試料を分析する装
置において、前記試料の上面を覆うように微小開口を有
する遮蔽体を設け、前記試料の表面に任意なガスを供給
する手段を設けると共に、前記遮蔽体と試料ホルダーと
の間の空間部を通して該供給されたガスを前記試料室外
に排気する手段を備えてなる試料分析装置等用のガス導
入試料装置。 ２ 前記ガス供給手段は試料面に向けて配置されたキャ
ピラリーである実用新案登録請求の範囲第１項記載の試
料分析装置等用のガス導入試料装置。 ３ 前記遮蔽体と試料ホルダーとの間にもう一枚の遮蔽
体を設け、両遮蔽体間の空間を排気空間となし、試料ホ
ルダーとそれに近接する遮蔽体との空間をガス供給空間
にした実用新案登録請求の範囲第１項記載の試料分析装
置等用のガス導入試料装置。[Claims for Utility Model Registration] 1. A sample holder is removably installed on a sample stage placed in a high vacuum sample, and the sample held on the holder is irradiated with a charged particle beam or radiation. In the analysis apparatus, a shield having a minute opening is provided to cover the upper surface of the sample, a means for supplying an arbitrary gas to the surface of the sample is provided, and a space between the shield and the sample holder is provided. A gas introduction sample device for a sample analyzer, etc., comprising means for exhausting the supplied gas to the outside of the sample chamber through the gas. 2. The gas introduction sample device for a sample analyzer or the like according to claim 1, wherein the gas supply means is a capillary arranged toward the sample surface. 3 Practical use in which another shield is provided between the shield and the sample holder, the space between both shields is used as an exhaust space, and the space between the sample holder and the shield adjacent to it is used as a gas supply space. A gas introduction sample device for a sample analysis device, etc. as claimed in claim 1 of the patent registration claim.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14359082U JPS5947857U (en) | 1982-09-22 | 1982-09-22 | Gas introduction sample device for sample analysis devices, etc. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14359082U JPS5947857U (en) | 1982-09-22 | 1982-09-22 | Gas introduction sample device for sample analysis devices, etc. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5947857U true JPS5947857U (en) | 1984-03-30 |
Family
ID=30320470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14359082U Pending JPS5947857U (en) | 1982-09-22 | 1982-09-22 | Gas introduction sample device for sample analysis devices, etc. |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5947857U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5056283A (en) * | 1973-09-14 | 1975-05-16 |
-
1982
- 1982-09-22 JP JP14359082U patent/JPS5947857U/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5056283A (en) * | 1973-09-14 | 1975-05-16 |
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