JPS5946429B2 - Method for manufacturing a light emitting display device - Google Patents
Method for manufacturing a light emitting display deviceInfo
- Publication number
- JPS5946429B2 JPS5946429B2 JP53157623A JP15762378A JPS5946429B2 JP S5946429 B2 JPS5946429 B2 JP S5946429B2 JP 53157623 A JP53157623 A JP 53157623A JP 15762378 A JP15762378 A JP 15762378A JP S5946429 B2 JPS5946429 B2 JP S5946429B2
- Authority
- JP
- Japan
- Prior art keywords
- light emitting
- pellets
- display device
- manufacturing
- emitting display
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Description
【発明の詳細な説明】
この発明は発光表示装置の製造方法にかゝり、特に数字
表示、マトリックス表示等をなす発光表示装置における
発光素子ペレットの改良された組み付け方法を備えた発
光表示装置の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a light emitting display device, and particularly to a light emitting display device having an improved method for assembling light emitting element pellets in a light emitting display device forming a numerical display, a matrix display, etc. Regarding the manufacturing method.
従来一例の数字表示を行なう発光表示装置の製造は、ま
ず発光素子ウェハを展延性接着シートに接着し、ブレー
ドダイサー等によりダイシングを施し第1図に上面図示
する如くなる。In manufacturing a conventional light-emitting display device that displays numbers, a light-emitting element wafer is first adhered to a spreadable adhesive sheet and diced using a blade dicer or the like, as shown in the top view in FIG.
すなわち、図における1は発光素子ウェハ、2は接着シ
ート、3は前記ウェハに設けられたダイシングラインで
ある。次にブレーキングを施し個々のペレットに分割し
たのち、このダイシングによる被砕層を除去し外部量子
効率を向上せしめるため、および表面電極を清浄化し、
良好なワイヤボンディングが行なえるようにすること等
の目的にてペレットをばらばらの状態にし第2図に示す
如く、エッチング液4内にペレット1a、Ia’・・・
を浸漬してエッチング処理が施される。上述の如くして
得られた発光素子ペレットはウェハ内の各部位によつて
輝度の異なるものが混合してなるため、一例の第3図に
一部を正面図示する数字表示において「日」の字型を構
成する7個のセグメントの明るさがまちまちである。That is, in the figure, 1 is a light emitting element wafer, 2 is an adhesive sheet, and 3 is a dicing line provided on the wafer. Next, after applying breaking and dividing into individual pellets, the crushed layer caused by this dicing was removed to improve the external quantum efficiency, and the surface electrode was cleaned.
For the purpose of performing good wire bonding, the pellets were broken up into pieces and the pellets 1a, Ia', . . . were placed in the etching solution 4 as shown in FIG.
The etching process is performed by immersing the The light-emitting element pellets obtained as described above are a mixture of luminances that differ depending on each part within the wafer, so the numerical display of a part of the light-emitting element pellets shown in the front view in FIG. The seven segments that make up the character shape vary in brightness.
すなわち、セグメントの明るさをセグメントに施した斜
線の疎密によつて示す(斜線なしが最も明るく、斜線の
密なるほど暗い)ものにおいて、最も明るい一例のセグ
メント5a、5fと最も暗いセグメント5bとが隣接す
る場合も生じ、製品品質を著るしく低下する。そこで輝
度むらと認められるペレットをセグメントから取外し、
同ランクの明るさのペレットと交換する手段がとられる
が、非常な手間を要するとともにセグメント、配線体等
を損傷するなどの事故を併発するなどの欠点がある。ま
たペレットの取り付け工程が自動化できない重大な障害
がある。この発明は上記従来の欠点に対し、これを改良
する発光表示装置の製造方法を提供するものである。That is, in the case where the brightness of a segment is indicated by the density of diagonal lines applied to the segment (no diagonal lines are the brightest, and the denser the diagonal lines are, the darker), the brightest segments 5a and 5f are adjacent to the darkest segment 5b. This may occur in some cases, resulting in a significant deterioration of product quality. Therefore, the pellets found to have uneven brightness were removed from the segments.
One method is to replace the pellets with pellets of the same brightness level, but this requires a great deal of effort and has the disadvantage of causing accidents such as damage to segments, wiring bodies, etc. There is also a significant impediment to the automation of the pellet loading process. The present invention provides a method for manufacturing a light emitting display device that overcomes the above-mentioned conventional drawbacks.
この発明にかゝる発光表示装置の製造方法は発光素子ウ
ェハを展延性接着シートに接着したまゝの状態にて分割
、エッチング処理を施したのち、分割された個々の発光
素子ペレットを行および列方向に隣り合う順に前記展延
性シートから直接表示部に組み付けることを特徴とする
。The method for manufacturing a light emitting display device according to the present invention involves dividing and etching a light emitting element wafer while it is adhered to a spreadable adhesive sheet, and then dividing the divided individual light emitting element pellets into rows and It is characterized in that the extensible sheets are assembled directly to the display section in the order of adjoining columns.
次にこの発明を一実施例につき図面を参照して詳細に説
明する。Next, one embodiment of the present invention will be explained in detail with reference to the drawings.
第4図は発光素子ウェハ1(以降素子ウェハと略称する
)を展延性の接着シート2に接着したのちダイシング(
ダイシングラインが3にて示される)を施した状態を斜
視図示する。次にブレーキングを施したのち、シートを
加熱展延せしめて第5図に断面図示する如く各素子ペレ
ツト1a,1a/・・・間を離隔せしめる。シートは力
セツトリング6にて支持されたま\の状態にて素子ペレ
ツトに対しエツチングが施される。前記素子ペレツトの
表示部に組み込むには第6図ないし第11図にて動作と
併せて機構の一部が示される製造装置にて達成される。FIG. 4 shows a light emitting device wafer 1 (hereinafter referred to as device wafer) bonded to a malleable adhesive sheet 2 and then diced (
A perspective view shows a state in which a dicing line (indicated by 3) has been applied. Next, after applying braking, the sheet is heated and expanded to separate the element pellets 1a, 1a/... as shown in cross section in FIG. While the sheet is supported by the force setting ring 6, the element pellets are etched. Incorporation into the display section of the element pellet is accomplished using a manufacturing apparatus whose operation and part of the mechanism are shown in FIGS. 6 to 11.
以下に図によつて説明する。まず、光学系装置(図示省
略)により力セツトリング6の素子ペレツト1aを位置
合わせする(第6図)。なお、図における7は表示部、
7aは導電性接着剤、8はプツシユニードル、9はバツ
クアツプリングである。次にバツクアツプリング9が図
中破線矢印の下降をなし第7図に示す如くなる。第7図
はバツクアツプリングが接着シートを押し下げ素子ペレ
ツト1aを導電性接着剤7aに至近ないし接触せしめた
状態を示している。ついで第8図に示す如くプツシユニ
ードル8が下降し、接着シートを介して素子ペレツト1
aを表示部7の導電性接着剤7aに押圧し接着せしめる
。第9図にはバツクアツプリングが上昇し、ついでプツ
シユニードルも上昇に移る。バツクアツプリングが上昇
すればシートはバツクアツプリングの押圧分だけ復位す
る。図における1a5は異なる行の素子ペレツトである
。ついで第10図の如くプツシユニードル8、バツクア
ツプリング9も上昇復位し、力セツトリング6と表示部
7が移動する。そして第11図に示す如く接着シート上
の上記素子ペレツトに隣接の素子ペレツト1a′が位置
合わせされる。また7′は素子ペレツトが未だ組みつけ
されてない表示部、または前記表示部に隣接の表示部な
いしセグメントである。そして、第6図以降に示される
工程順序により素子ペレツトの取りつけが繰返される。
上記は光学系装置を備えるコンピユータ(図示省略)の
指令により位置合わせ、各部の変位、動作等が行なわれ
る。次に前記接着シート上の素子ペレツトを表示部に組
み付けするための該ペレツトの選択方法を第12図ない
し第14図に例示する。This will be explained below using figures. First, the element pellets 1a of the force setting ring 6 are aligned using an optical system (not shown) (FIG. 6). In addition, 7 in the figure is a display part,
7a is a conductive adhesive, 8 is a push needle, and 9 is a back spring. Next, the backup spring 9 moves downward as shown by the broken line arrow in the figure, as shown in FIG. FIG. 7 shows a state in which the back-up spring pushes down the adhesive sheet and brings the element pellet 1a close to or in contact with the conductive adhesive 7a. Then, as shown in FIG. 8, the push unit needle 8 descends and releases the element pellet 1 through the adhesive sheet.
A is pressed onto the conductive adhesive 7a of the display section 7 to adhere it. In Figure 9, the back up spring goes up, and then the push unit needle goes up as well. When the back up spring rises, the seat returns to its original position by the amount of pressure from the back up spring. 1a5 in the figure are element pellets in different rows. Then, as shown in FIG. 10, the push unit needle 8 and back-up spring 9 are also raised and returned to their positions, and the force setting ring 6 and display section 7 are moved. Then, as shown in FIG. 11, the element pellet 1a' adjacent to the element pellet on the adhesive sheet is aligned. Reference numeral 7' denotes a display section on which the element pellet has not yet been assembled, or a display section or segment adjacent to the display section. Then, the mounting of the element pellets is repeated in accordance with the process sequence shown in FIGS. 6 and subsequent figures.
In the above, positioning, displacement, operation, etc. of each part are performed in accordance with commands from a computer (not shown) provided with an optical system device. Next, a method for selecting element pellets on the adhesive sheet for assembling the element pellets into a display section is illustrated in FIGS. 12 to 14.
第12図に示す例は行に沿うて採取し組み付けて行き、
行末にて隣接の行に移り上記の行と逆方向に採取を進め
て行くもので線近傍マツチングと称せられるものである
。図中の矢印および破線は採取の進行方向を示す。次に
第13図に示す例は第12図に示すところと似るも、行
末をウエハのほマ直径上の素子ペレツトに定め、こ\で
隣接の行に移り上記の行と逆方向に採取を進め、以降繰
りかえされる(プロツクマツチング)。さらに第14図
に示す例はイニシヤルの素子ペレツトを一例のウエハの
センタに定め、これから始まりこの素子ペレットを囲繞
する素子ペレツトを巡回し採取を進め、逐次外方にらせ
ん状に採取を進めて行くもので、前記第13図に示した
方法とともに面近傍マツチングと称せられる。なお選択
内容、順序等については装置のマイクロコンピ具一タに
予めメモリされたところにより発する指令により実施さ
れる。上述の各図について、ウエハの分割は素子ペレツ
トの採取を説明するためのもので実際とは著るしく相異
する。すなわち、素子ペレツトは1個が0.3m7!t
角の立方体であり、発光表示装置に30〜40個の素子
ペレツトを用いてもウエハ上の9〜12mmにわたる間
のペレツトである。ウエハ内の輝度特性は部分的にばら
つきが存するも、107nm.程度の範囲では全く認め
られない。まして前記1つの単位の「日」の字型は7個
の素子ペレットで形成されるので、ウエハの約2m7n
の範囲にあるものですべてのセグメントが均一の輝度に
認められる。この発明によれば、発光素子ペレツトを行
または列方向に隣り合う順に展延性シートから直接表示
部に組みつけるために、各表示部に輝度のばらつきなく
、品質の良好な発光表示装置が高い歩留で得られるとい
う顕著な利点がある。In the example shown in Figure 12, samples are taken and assembled along the rows,
At the end of a line, the process moves to an adjacent line and the sampling proceeds in the opposite direction to the above line, which is called near-line matching. Arrows and dashed lines in the figure indicate the direction of progress of collection. Next, the example shown in Fig. 13 is similar to the one shown in Fig. 12, but the end of the row is set at the element pellet approximately on the diameter of the wafer, and the sample is then moved to the adjacent row and sampled in the opposite direction to the above row. Advances and is repeated thereafter (prots matching). Furthermore, in the example shown in FIG. 14, the initial element pellet is set at the center of the wafer, and starting from this element pellet, the element pellets surrounding this element pellet are visited and collected, and the collection is successively progressed outward in a spiral shape. This method, together with the method shown in FIG. 13, is called near-plane matching. Note that the selection contents, order, etc. are executed by commands issued from a part stored in advance in the microcomputer of the apparatus. In each of the above-mentioned figures, the division of the wafer is for explaining the collection of element pellets, and is significantly different from the actual division. In other words, one element pellet is 0.3m7! t
It is a cube with corners, and even if 30 to 40 element pellets are used in a light emitting display device, the pellets will span 9 to 12 mm on the wafer. Although there are some variations in the brightness characteristics within the wafer, the brightness characteristics within the wafer are 107 nm. It is completely unacceptable to any extent. Furthermore, since one unit of the ``h'' shape is formed by seven element pellets, the wafer's length is about 2m7n.
In the range of , all segments are recognized to have uniform brightness. According to this invention, since the light emitting element pellets are assembled directly from the extensible sheet to the display part in the order of adjacent rows or columns, the light emitting display device with good quality can be manufactured at high speed without any variation in brightness in each display part. There are significant advantages that can be obtained at
また、素子ペレツトの処理から組みつけまで能率よく、
かつ均一に処理、取扱いできる。この発明によるものは
輝度特性効率が20〜30%向上する利点もある。In addition, we can efficiently handle everything from processing element pellets to assembly.
And can be processed and handled uniformly. The device according to the present invention also has the advantage of improving luminance characteristic efficiency by 20 to 30%.
第1図は発光表示装置用ウエハの加工工程における正面
図、第2図は従来の発光素子ペレツトのエツチングを説
明するための断面図、第3図は従来の発光表示装置の正
面図、第4図以降はこの発明の一実施例の発光表示装置
の製造方法を示し、第4図はウエハにダイシングを施し
た状態を示す正面図、第5図はブレーキング後の断面図
、第6図ないし第11図は素子ペレツトの採取、組みつ
けの工程を説明するいずれも断面図、第12図ないし第
14図はいずれも夫々がこの発明の素子ペレツトの採取
方法を示す正面図である。
なお、図中同一符号は同一または相当部分を夫夫示すも
のとする。
1・・・・・・発光素子ウエハ1a,1a′・・・・・
・発光素子ペレツト、2・・・・・・接着シート、5a
・・・5f・・・・・・セグメント、6・・・・・・力
セツトリング、7・・・・・・表示部、7a・・・・・
・導電性接着剤、8・・・・・・プツシユニードル、9
・・・・・・バツクアツプリング。FIG. 1 is a front view of a wafer for a light emitting display device during the processing process, FIG. 2 is a sectional view for explaining the etching of a conventional light emitting element pellet, FIG. 3 is a front view of a conventional light emitting display device, and FIG. The figures and subsequent figures show a method for manufacturing a light emitting display device according to an embodiment of the present invention, with FIG. 4 being a front view showing a state where a wafer has been diced, FIG. 5 being a cross-sectional view after braking, and FIGS. FIG. 11 is a sectional view illustrating the steps of collecting and assembling element pellets, and each of FIGS. 12 to 14 is a front view showing the method of collecting element pellets of the present invention. Note that the same reference numerals in the drawings indicate the same or corresponding parts. 1...Light emitting element wafers 1a, 1a'...
・Light emitting element pellet, 2...Adhesive sheet, 5a
...5f...Segment, 6...Force settling, 7...Display section, 7a...
・Conductive adhesive, 8... Push unit needle, 9
・・・・・・Backlash Spring.
Claims (1)
マトリックス表示等をなす発光表示装置の製造において
、発光素子ウェハを展延性シートに接着したまゝの状態
で分割、エッチング処理を施したのち、前記分割された
個々の発光素子ペレットを行または列方向に隣り合う順
に展延性シートから直接表示部に組み付けることを特徴
とする発光表示装置の製造方法。1 Assemble multiple light-emitting element pellets on a board to display numbers,
In the manufacture of light emitting display devices such as matrix displays, the light emitting element wafer is divided and etched while it is adhered to a spreadable sheet, and then the individual light emitting element pellets are separated in the row or column direction. 1. A method for manufacturing a light emitting display device, which comprises assembling the extensible sheets directly onto the display part in the order in which they are adjacent to each other.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53157623A JPS5946429B2 (en) | 1978-12-22 | 1978-12-22 | Method for manufacturing a light emitting display device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53157623A JPS5946429B2 (en) | 1978-12-22 | 1978-12-22 | Method for manufacturing a light emitting display device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5586173A JPS5586173A (en) | 1980-06-28 |
JPS5946429B2 true JPS5946429B2 (en) | 1984-11-12 |
Family
ID=15653768
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53157623A Expired JPS5946429B2 (en) | 1978-12-22 | 1978-12-22 | Method for manufacturing a light emitting display device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5946429B2 (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0810709B2 (en) * | 1985-06-20 | 1996-01-31 | ロ−ム株式会社 | Pellet pickup method and apparatus |
US4965223A (en) * | 1987-11-18 | 1990-10-23 | Hewlett-Packard Company | Method of manufacturing a partially opaque substrate red led |
US5389182A (en) * | 1993-08-02 | 1995-02-14 | Texas Instruments Incorporated | Use of a saw frame with tape as a substrate carrier for wafer level backend processing |
JPH09186181A (en) * | 1997-01-27 | 1997-07-15 | Rohm Co Ltd | Method and device for picking up pellet |
WO2011149009A1 (en) * | 2010-05-28 | 2011-12-01 | オリンパス株式会社 | Cell sorter, cell sorting system, and cell sorting method |
CN103221800B (en) | 2010-11-19 | 2015-07-15 | 奥林巴斯株式会社 | Method for preparing biological sample |
JP5737953B2 (en) * | 2011-01-07 | 2015-06-17 | 富士機械製造株式会社 | Component mounting equipment |
WO2012161069A1 (en) | 2011-05-20 | 2012-11-29 | オリンパス株式会社 | Method of manufacturing base sheet |
WO2013077297A1 (en) | 2011-11-24 | 2013-05-30 | オリンパス株式会社 | Cell sorting device and cell sorting method |
WO2013077337A1 (en) * | 2011-11-25 | 2013-05-30 | オリンパス株式会社 | Tissue segmentation apparatus, cell sorting apparatus, cell sorting system, tissue display system, substrate, extendible member, tissue segmentation method, and cell sorting method |
-
1978
- 1978-12-22 JP JP53157623A patent/JPS5946429B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5586173A (en) | 1980-06-28 |
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