JPS5946169A - 処理室のシ−ル装置 - Google Patents

処理室のシ−ル装置

Info

Publication number
JPS5946169A
JPS5946169A JP15417882A JP15417882A JPS5946169A JP S5946169 A JPS5946169 A JP S5946169A JP 15417882 A JP15417882 A JP 15417882A JP 15417882 A JP15417882 A JP 15417882A JP S5946169 A JPS5946169 A JP S5946169A
Authority
JP
Japan
Prior art keywords
processing chamber
inlet
outlet
sealing
plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15417882A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0327275B2 (enExample
Inventor
Fujio Soshi
曽雌 富士雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taikisha Ltd
Original Assignee
Taikisha Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taikisha Ltd filed Critical Taikisha Ltd
Priority to JP15417882A priority Critical patent/JPS5946169A/ja
Publication of JPS5946169A publication Critical patent/JPS5946169A/ja
Publication of JPH0327275B2 publication Critical patent/JPH0327275B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP15417882A 1982-09-04 1982-09-04 処理室のシ−ル装置 Granted JPS5946169A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15417882A JPS5946169A (ja) 1982-09-04 1982-09-04 処理室のシ−ル装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15417882A JPS5946169A (ja) 1982-09-04 1982-09-04 処理室のシ−ル装置

Publications (2)

Publication Number Publication Date
JPS5946169A true JPS5946169A (ja) 1984-03-15
JPH0327275B2 JPH0327275B2 (enExample) 1991-04-15

Family

ID=15578533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15417882A Granted JPS5946169A (ja) 1982-09-04 1982-09-04 処理室のシ−ル装置

Country Status (1)

Country Link
JP (1) JPS5946169A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6412771U (enExample) * 1987-07-15 1989-01-23
JP2012152693A (ja) * 2011-01-26 2012-08-16 Seiren Co Ltd インクジェット記録装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6412771U (enExample) * 1987-07-15 1989-01-23
JP2012152693A (ja) * 2011-01-26 2012-08-16 Seiren Co Ltd インクジェット記録装置

Also Published As

Publication number Publication date
JPH0327275B2 (enExample) 1991-04-15

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