JPS5946052A - Resin seal insulated type semiconductor device - Google Patents

Resin seal insulated type semiconductor device

Info

Publication number
JPS5946052A
JPS5946052A JP15642082A JP15642082A JPS5946052A JP S5946052 A JPS5946052 A JP S5946052A JP 15642082 A JP15642082 A JP 15642082A JP 15642082 A JP15642082 A JP 15642082A JP S5946052 A JPS5946052 A JP S5946052A
Authority
JP
Japan
Prior art keywords
resin
radiating plate
heat sink
thin
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15642082A
Other languages
Japanese (ja)
Inventor
Toshihiko Aimi
相見 俊彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15642082A priority Critical patent/JPS5946052A/en
Publication of JPS5946052A publication Critical patent/JPS5946052A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • H01L2924/1815Shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

PURPOSE:To form a resin thin layer on a radiating plate, which is bent at a specific angle in the predetermined direction, without defective filling by holding the radiating plate to a die, downwardly correcting the radiating plate by a pin from the thick resin section side and injecting a resin from the lead central section of a thin resin section. CONSTITUTION:The radiating plate 2 is held by the cope 10 and drag 11 of the sealing die, and brought to the state in which it is bent upward at approximately 1 deg.-10 deg.. The radiating plate is corrected downward by the pin 3 from an upper section, and fixed. Consequently, a clearance between the radiating plate 2 and the drag 11 functions as an insulating layer 7, and the thickness of the layer 7 is determined by the accuracy of finishing of the dies 10 and 11. The defective filling of the resin is removed by forming a resin injection port 9 at the central section of an external lead on the thin insulating layer 7 side. According to said constitution, a sealing device is obtained with high accuracy and yield.

Description

【発明の詳細な説明】 この発明はトランジスク、ダイオード、ザーrリスタ、
トライアック等の半導体素子のケース及びリードフレー
ムの構造に関するものである。
DETAILED DESCRIPTION OF THE INVENTION This invention relates to transistors, diodes, ZARristors,
The present invention relates to the structure of a case and a lead frame of a semiconductor device such as a triac.

半導体素子は電流を流すことにより内部より発熱しその
熱を外部へ逃がす心安から放熱板と呼ばれる熱放散の良
い材料を用いて直接ラジェターへネジで取付けて使用し
ている。この際ラジェターは素子放熱板は電気的にvf
−電位になるのでラジェターを絶縁させて使用必要のあ
る場合にはラジェターを直接回路を絶縁するか、素子と
ラジェターをマイカ等で絶縁する必要があった。この為
に素子の取付時に時間と材料が余分に必要であり素子自
体で絶縁された構造のものが要求されてきた。
Semiconductor elements generate heat from inside when current is passed through them, and for the safety of dissipating that heat to the outside, a material with good heat dissipation called a heat sink is used, and it is attached directly to the radiator with screws. At this time, the radiator element heat sink is electrically VF
- potential, so if it was necessary to insulate the radiator and use it, it was necessary to insulate the radiator directly from the circuit, or to insulate the element and the radiator with mica or the like. For this reason, extra time and materials are required when mounting the element, and a structure in which the element itself is insulated has been required.

素子自体絶縁+1り造とする方法は半導体チップと放熱
板の間を絶縁する方法と放熱板を外部と絶縁する方法の
2種類があるが前者においては部品1組立の為の時間等
がかかp後者の方が望ましい、 1〜かし、製法として
は薄い絶縁層を均一に放熱板に設けなければならずかな
り歩留、精度等円4°・I「を伴う。
There are two ways to insulate the element itself + 1 structure: one is to insulate between the semiconductor chip and the heat sink, and the other is to insulate the heat sink from the outside, but the former takes time to assemble one part, and the latter It is more desirable to use 1 to 1. However, the manufacturing method requires that a thin insulating layer be uniformly provided on the heat sink, which results in a considerable yield and accuracy of 4°·I.

この発明では素子自体を放熱板と外部との間で絶縁する
為に要易な製法を得る為の構造を提供するものである。
The present invention provides a structure that allows an easy manufacturing method to insulate the element itself between the heat sink and the outside.

本発明においては以上述べた欠点を解決する為樹脂封止
絶縁型半導体装置の封入金型、に入る部分の放熱板をあ
らかじめ放熱板と外部ラジェターの絶縁層を形成する曹
い樹脂部と反対方向に10〜100曲げた放熱板を用い
封入金型に挿入し7だ後絶縁層を形成する部分と反対側
の厚い樹脂部の方向より放熱板を修正するピン穴を設け
、かつ絶縁層を形成する薄い樹脂部の外部リードの中央
部より(IJ脂油注入口設けた素子構造とする、。
In the present invention, in order to solve the above-mentioned drawbacks, the heat dissipation plate of the part that enters the encapsulation mold of the resin-sealed insulated semiconductor device is placed in the opposite direction to the carbon resin part that forms the insulating layer of the heat dissipation plate and the external radiator. A heat sink bent 10 to 100 degrees is inserted into the encapsulating mold, and after 7 days, a pin hole is made to modify the heat sink from the direction of the thick resin part on the opposite side to the part where the insulating layer is to be formed, and an insulating layer is formed. From the center of the external lead of the thin resin part (device structure with an IJ oil inlet).

この様にした素子は封入金柑lの中でn(熱板が下方へ
曲げらり、て絶縁層を形成する薄いイp7脂部の厚さを
正確)てコントロールすることができる。又4/jt脂
注入口を外部リードの中央部に置くことによりこの位置
より絶縁層を形成する薄い樹脂部にすきまを作ることな
く完全に樹脂を充填することができる。
The device constructed in this way can accurately control the thickness of the thin layer forming the insulating layer by bending the hot plate downwards inside the encapsulated kumquat. Also, by placing the 4/jt fat inlet in the center of the external lead, the thin resin part forming the insulating layer can be completely filled with resin from this position without creating any gaps.

次に図面を用いて本発明の一実施例につき謄、明する。Next, one embodiment of the present invention will be described with reference to the drawings.

第1図、′π2図には従来の絶縁型でない半導体装置を
示しているが17F熱板2け外部ラジェター((取りつ
けらJする際には別の部品としてマイカ板等を必要とし
た。第3図、g+ra図は本発明の一例であるが樹脂1
が放熱板2の裏側の部分7に寸で入り込む構造となって
いる。この場合絶縁胛7の厚さは放熱板の形状、加工精
度等により変わり熱抵抗、絶縁耐圧性にバラつきを生じ
させる原因となる。又4#脂1を充填する場合に注入口
10をとの位置以外の場所に設けた場合は絶縁層7に均
一に充填されず樹脂のピンホール等を生じ、絶縁耐圧の
劣化につながる。そこで本発明では第5図(で示す様に
ji(r ?板2を封入金型の−1−:型10と下型1
1の間にV、を込み込んだ状ウリでは上方に3°稈攻曲
げてあり上型10と下型11を完全に締めつけて、上方
より11<’、 熱板固定用のピン8によ−、て下方へ
修正する、。
Figures 1 and 2 show a conventional non-insulated semiconductor device, including a 17F two-piece external radiator (which required an additional component such as a mica plate to install). Figures 3 and g+ra are examples of the present invention, but resin 1
The structure is such that the heat dissipation plate 2 enters the back side portion 7 of the heat dissipation plate 2 by a short distance. In this case, the thickness of the insulator 7 varies depending on the shape of the heat sink, processing precision, etc., and causes variations in thermal resistance and dielectric strength. Further, when filling the 4# resin 1, if the injection port 10 is provided at a location other than the above position, the insulating layer 7 will not be filled uniformly, resulting in resin pinholes and the like, leading to deterioration of the dielectric strength. Therefore, in the present invention, as shown in FIG.
In the case of a shape with a V inserted between 1 and 1, it is bent upward by 3 degrees, and the upper mold 10 and lower mold 11 are completely tightened, and the pin 8 for fixing the hot plate is inserted from above by 11 −, to correct downward.

この様にするとli!l %、板2と下型11との間(
・でできるすき寸が絶縁層7となりその)ワさは上型1
0と下型11との加工精度で維持できる。又樹脂注入口
9を絶縁R7を形成する薄い(′7I脂?’t15の〃
[γりl51)−ドの中央部より樹脂注入口を設(つる
ことによりピンホール等の樹晰充填不良を缶くすことが
できる。
If you do it like this, li! l %, between plate 2 and lower mold 11 (
・The gap created by is the insulating layer 7, and its width is the upper die 1
0 and the lower die 11 can be maintained with the machining accuracy. Also, the resin injection port 9 is insulated with a thin film ('7I resin?'t15) that forms the insulation R7.
By installing a resin injection port from the center of the [γri l51)-domain, defects in tree filling such as pinholes can be eliminated.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の半y、19体の平面図、第2図はその横
断面図、第3図は本発明の半導体の平面図、第4図はそ
の横断面図、第5図は封入金型に挿入した際の断面図、
を示す。 なお図において、1・・・・・・樹脂部、2・・・・・
・放熱板、3・・・・・・ネジ市め用穴、4・・・・・
放熱板固定用ピン穴、5・・・・・・外部ベース用す−
 ド、6・・・・・°外部エミッター用リード、7・・
・・・・絶縁用樹脂部、8・・・・・・放熱板修正用ピ
ン、9・・・・・・樹脂注入口、10・・・・・・封入
金型上型、11・・・・・封入金型下型、である。 代理人 弁理士  内 原   晋1□ ゛″パ手続補
正書(方式)6゛ 7゜ 特許庁長官 殿 1、事件の表示   昭和57年特  許願第1564
20号2、発明の名称  +jtt脂封止絶f≠型半導
体装置3、補正をする音 事件との関係       出 願 人東京都港区芝/
i、 I’ Ll 33番]、 、7;。 (423)   日本電気株式会社 代表h 関本忠弘 4、代理人 ”−’−’      (連絡先 )14<71しし株
式会ン1. tY:i’1部)5、 1ili正命令の
日付 昭和57年11月:S O+」(発フカ「」)補正の対
象 図面(第5図) 補正の内容 別紙のとおり
Fig. 1 is a plan view of a conventional half Y, 19 body, Fig. 2 is a cross-sectional view thereof, Fig. 3 is a plan view of the semiconductor of the present invention, Fig. 4 is a cross-sectional view thereof, and Fig. 5 is an enclosure. Cross-sectional view when inserted into the mold,
shows. In the figure, 1...resin part, 2...
・Radiation plate, 3... Holes for screw insertion, 4...
Pin hole for fixing heat sink, 5...For external base.
Lead, 6...°Lead for external emitter, 7...
...Insulating resin part, 8...Pin for fixing the heat sink, 9...Resin injection port, 10...Upper mold of the sealing mold, 11... ...This is the lower mold of the encapsulation mold. Agent Patent Attorney Susumu Uchihara 1□ ゛''Paper Procedural Amendment (Method) 6゛7゜ Commissioner of the Japan Patent Office 1, Indication of Case 1982 Patent Application No. 1564
No. 20 No. 2, Title of the invention +jtt fat-sealed absolute f≠ type semiconductor device 3, Relationship with the sound incident to be corrected Applicant: Shiba, Minato-ku, Tokyo /
i, I' Ll No. 33], , 7;. (423) NEC Co., Ltd. Representative h Tadahiro Sekimoto 4, Agent "-'-" (Contact information) 14 < 71 Shishi Co., Ltd. 1. tY: i' 1 part) 5, 1ili Date of formal order 1982 November 2017: Drawings subject to amendments to S O+ (Figure 5) Contents of amendments are as shown in the attached sheet.

Claims (1)

【特許請求の範囲】[Claims] 樹脂封止絶縁型半導体装置の封入装置金型に入る部分の
放熱板をあらかじめ放熱板と外部ラジェターの絶縁層を
形成する薄い樹脂部と反対方向に1°〜100曲げだ放
熱板を用い封入金型に挿入した後絶縁層を形成する部分
と反対側の厚いf3v脂部の方向より放熱板を修正する
ビン穴を設け、かつ絶縁層を形成する薄い樹脂部の外部
リードの中央部より樹脂注入口を設けた構造を特徴とす
るζ1′d脂封止絶縁型半導体装置。
Encapsulation equipment for resin-sealed insulated semiconductor devices. Bend the heat sink of the part that will enter the mold in advance by 1° to 100 degrees in the opposite direction to the thin resin part that forms the insulation layer of the heat sink and the external radiator. Using the heat sink, encapsulate the metal. After inserting it into the mold, make a bottle hole to modify the heat sink from the direction of the thick F3V resin part on the opposite side to the part where the insulation layer will be formed, and pour the resin from the center of the external lead of the thin resin part that will form the insulation layer. A ζ1'd fat-sealed insulated semiconductor device characterized by a structure with an inlet.
JP15642082A 1982-09-08 1982-09-08 Resin seal insulated type semiconductor device Pending JPS5946052A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15642082A JPS5946052A (en) 1982-09-08 1982-09-08 Resin seal insulated type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15642082A JPS5946052A (en) 1982-09-08 1982-09-08 Resin seal insulated type semiconductor device

Publications (1)

Publication Number Publication Date
JPS5946052A true JPS5946052A (en) 1984-03-15

Family

ID=15627358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15642082A Pending JPS5946052A (en) 1982-09-08 1982-09-08 Resin seal insulated type semiconductor device

Country Status (1)

Country Link
JP (1) JPS5946052A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6474746A (en) * 1987-09-17 1989-03-20 Toshiba Corp Resin-insulated semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6474746A (en) * 1987-09-17 1989-03-20 Toshiba Corp Resin-insulated semiconductor device

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