JPS5945543U

JPS5945543U - Differential pressure or pressure transducer

Info

Publication number: JPS5945543U
Application number: JP14067482U
Authority: JP
Inventors: 河内　淳旨; 健西; 阿波　俊一郎
Original assignee: 株式会社山武
Priority date: 1982-09-17
Filing date: 1982-09-17
Publication date: 1984-03-26

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

一第１図は本考案に係る差圧または圧力変換器の一実施
例を示す縦断面図、第２図は本考案の他の実施例を示ず
要部断面図である。１・・・・・・ボディ本体、３Ａ、　　３Ｂ・・・・・
・バリアダイヤフラム、４Ａ、　　４Ｂ・・・・・・裏
側室、５・・・・・・内封液、６・・・・・・ボディ内
室、７・・・・・・センターダイヤフラム、９．１０・
・・・・・連通路、９Ａ、　　９Ｂ、　　Ｉ　ＯＡ、　
　１０Ｂ・・・・・・外側圧力伝達路、９Ｃ，ＩＯＣ・
・・・・・衝撃波吸収路、９Ｄ、ＩＯＣ・・・・・・内
側圧力伝達路、１１・・・・・・センサ室、１２．１３
・・・・・・封入回路、１６・・・・・・半導体センサ
。1 is a longitudinal cross-sectional view showing one embodiment of a differential pressure or pressure transducer according to the present invention, and FIG. 2 is a cross-sectional view of a main part of another embodiment of the present invention. 1...Body body, 3A, 3B...
- Barrier diaphragm, 4A, 4B... Back chamber, 5... Inner sealing liquid, 6... Inner body chamber, 7... Center diaphragm, 9. 10・
...Communication path, 9A, 9B, I OA,
10B...Outside pressure transmission path, 9C, IOC・
... Shock wave absorption path, 9D, IOC ... Inner pressure transmission path, 11 ... Sensor chamber, 12.13
...Enclosed circuit, 16...Semiconductor sensor.

Claims

[Scope of utility model registration request]

A differential pressure or pressure transducer that applies each measurement pressure to two barrier diaphragms and extracts the movement of the sealed liquid within the body as an electrical output using a semiconductor sensor installed by partitioning the sealed circuit. , communication passages that communicate the back chambers of the barrier diaphragms with the body interior chambers have one end communicating with the back chamber and the other end extending toward the body interior chamber. a shock wave absorption path whose other ends meet and communicate with each other and which extend in a direction substantially perpendicular to the outside pressure transmission path; A differential pressure or pressure transducer characterized by comprising an inner sleeve pressure transmission path that is provided at a position shifted in the direction and communicates the shock wave absorption path with the interior chamber of the body.