JPS5943540A - ウエハ収納カセツトの搬送装置 - Google Patents

ウエハ収納カセツトの搬送装置

Info

Publication number
JPS5943540A
JPS5943540A JP57153652A JP15365282A JPS5943540A JP S5943540 A JPS5943540 A JP S5943540A JP 57153652 A JP57153652 A JP 57153652A JP 15365282 A JP15365282 A JP 15365282A JP S5943540 A JPS5943540 A JP S5943540A
Authority
JP
Japan
Prior art keywords
cassette
wafer
slanting
held
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57153652A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6243339B2 (online.php
Inventor
Nobutoshi Ogami
大神　信敏
Mikio Shoda
庄田　幹夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP57153652A priority Critical patent/JPS5943540A/ja
Publication of JPS5943540A publication Critical patent/JPS5943540A/ja
Publication of JPS6243339B2 publication Critical patent/JPS6243339B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP57153652A 1982-09-02 1982-09-02 ウエハ収納カセツトの搬送装置 Granted JPS5943540A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57153652A JPS5943540A (ja) 1982-09-02 1982-09-02 ウエハ収納カセツトの搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57153652A JPS5943540A (ja) 1982-09-02 1982-09-02 ウエハ収納カセツトの搬送装置

Publications (2)

Publication Number Publication Date
JPS5943540A true JPS5943540A (ja) 1984-03-10
JPS6243339B2 JPS6243339B2 (online.php) 1987-09-12

Family

ID=15567217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57153652A Granted JPS5943540A (ja) 1982-09-02 1982-09-02 ウエハ収納カセツトの搬送装置

Country Status (1)

Country Link
JP (1) JPS5943540A (online.php)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59100549A (ja) * 1982-11-30 1984-06-09 Nichiden Mach Ltd ウエハ−移し替え装置
JPS61216442A (ja) * 1985-03-22 1986-09-26 Nippon Kogaku Kk <Nikon> キヤリアの搬送装置
JPS6387427A (ja) * 1986-09-29 1988-04-18 Nikon Corp 収納ケ−スの昇降装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59100549A (ja) * 1982-11-30 1984-06-09 Nichiden Mach Ltd ウエハ−移し替え装置
JPS61216442A (ja) * 1985-03-22 1986-09-26 Nippon Kogaku Kk <Nikon> キヤリアの搬送装置
JPS6387427A (ja) * 1986-09-29 1988-04-18 Nikon Corp 収納ケ−スの昇降装置

Also Published As

Publication number Publication date
JPS6243339B2 (online.php) 1987-09-12

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