JPS5943540A - ウエハ収納カセツトの搬送装置 - Google Patents

ウエハ収納カセツトの搬送装置

Info

Publication number
JPS5943540A
JPS5943540A JP15365282A JP15365282A JPS5943540A JP S5943540 A JPS5943540 A JP S5943540A JP 15365282 A JP15365282 A JP 15365282A JP 15365282 A JP15365282 A JP 15365282A JP S5943540 A JPS5943540 A JP S5943540A
Authority
JP
Japan
Prior art keywords
cassette
wafer
slanting
held
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15365282A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6243339B2 (enrdf_load_stackoverflow
Inventor
Nobutoshi Ogami
大神　信敏
Mikio Shoda
庄田　幹夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP15365282A priority Critical patent/JPS5943540A/ja
Publication of JPS5943540A publication Critical patent/JPS5943540A/ja
Publication of JPS6243339B2 publication Critical patent/JPS6243339B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
JP15365282A 1982-09-02 1982-09-02 ウエハ収納カセツトの搬送装置 Granted JPS5943540A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15365282A JPS5943540A (ja) 1982-09-02 1982-09-02 ウエハ収納カセツトの搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15365282A JPS5943540A (ja) 1982-09-02 1982-09-02 ウエハ収納カセツトの搬送装置

Publications (2)

Publication Number Publication Date
JPS5943540A true JPS5943540A (ja) 1984-03-10
JPS6243339B2 JPS6243339B2 (enrdf_load_stackoverflow) 1987-09-12

Family

ID=15567217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15365282A Granted JPS5943540A (ja) 1982-09-02 1982-09-02 ウエハ収納カセツトの搬送装置

Country Status (1)

Country Link
JP (1) JPS5943540A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59100549A (ja) * 1982-11-30 1984-06-09 Nichiden Mach Ltd ウエハ−移し替え装置
JPS61216442A (ja) * 1985-03-22 1986-09-26 Nippon Kogaku Kk <Nikon> キヤリアの搬送装置
JPS6387427A (ja) * 1986-09-29 1988-04-18 Nikon Corp 収納ケ−スの昇降装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59100549A (ja) * 1982-11-30 1984-06-09 Nichiden Mach Ltd ウエハ−移し替え装置
JPS61216442A (ja) * 1985-03-22 1986-09-26 Nippon Kogaku Kk <Nikon> キヤリアの搬送装置
JPS6387427A (ja) * 1986-09-29 1988-04-18 Nikon Corp 収納ケ−スの昇降装置

Also Published As

Publication number Publication date
JPS6243339B2 (enrdf_load_stackoverflow) 1987-09-12

Similar Documents

Publication Publication Date Title
TWI851779B (zh) 盒蓋打開裝置、用於無塵室設備的組件、以及用於打開和淨化晶圓盒的方法
JP7153773B2 (ja) 接合装置、接合システム、接合方法及びコンピュータ記憶媒体
JP6382769B2 (ja) 接合装置、接合システム、接合方法、プログラム及びコンピュータ記憶媒体
JP5355451B2 (ja) 接合装置
JP4283926B2 (ja) ウエハカセットのウエハ保持システム
JP2020194865A (ja) 接合装置及び接合方法
JPS5943540A (ja) ウエハ収納カセツトの搬送装置
JP2009218622A (ja) 基板処理装置及び基板処理装置における基板位置ずれ補正方法
WO2020174846A1 (ja) 移載装置及び天井搬送車
KR102428369B1 (ko) 기판 이송 시스템
US20110035897A1 (en) Stocker
JP2003257945A5 (enrdf_load_stackoverflow)
CN103069558B (zh) 晶片收纳装置和晶片盒收纳箱
TWD112955S1 (zh) 半導體晶圓輸送裝置之平台臂
JP2020061436A (ja) ロードポート及びロードポートのｆｏｕｐ蓋異常検知方法
KR101539239B1 (ko) 글래스 전용 포장 툴
JP2004082229A (ja) 吸着ハンド
TWM532314U (zh) 晶圓盒清洗裝置
CN106628529B (zh) 装载机后视镜堆放架
JPH04172454A (ja) 防塵ケース固定レチクルまたはフォトマスク
JP3334822B2 (ja) ウエハキャリア歪み測定方法
JP2011181632A (ja) 接合方法、プログラム及びコンピュータ記憶媒体
CN109837503A (zh) 一种镜片镀膜工作台
KR100698825B1 (ko) 기판반송장치 및 그를 이용한 방법
JP2005173356A (ja) ペリクル収納ケース