JPS5940105A - パタ−ン測定装置 - Google Patents

パタ−ン測定装置

Info

Publication number
JPS5940105A
JPS5940105A JP14998282A JP14998282A JPS5940105A JP S5940105 A JPS5940105 A JP S5940105A JP 14998282 A JP14998282 A JP 14998282A JP 14998282 A JP14998282 A JP 14998282A JP S5940105 A JPS5940105 A JP S5940105A
Authority
JP
Japan
Prior art keywords
pattern
light
shadow mask
measured
face plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14998282A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6341483B2 (enrdf_load_stackoverflow
Inventor
Hidekazu Sekizawa
秀和 関沢
Akito Iwamoto
岩本　明人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14998282A priority Critical patent/JPS5940105A/ja
Priority to US06/523,768 priority patent/US4560280A/en
Priority to EP83304868A priority patent/EP0104762B1/en
Priority to DE8383304868T priority patent/DE3378785D1/de
Priority to DD83254396A priority patent/DD212581A5/de
Publication of JPS5940105A publication Critical patent/JPS5940105A/ja
Publication of JPS6341483B2 publication Critical patent/JPS6341483B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP14998282A 1982-08-31 1982-08-31 パタ−ン測定装置 Granted JPS5940105A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP14998282A JPS5940105A (ja) 1982-08-31 1982-08-31 パタ−ン測定装置
US06/523,768 US4560280A (en) 1982-08-31 1983-08-17 Apparatus for optically measuring the distance between two grating-like structures and the size of periodic pattern elements forming one of the grating-like structures
EP83304868A EP0104762B1 (en) 1982-08-31 1983-08-23 Apparatus for optically measuring the distance between two grating-like structures and the size of periodic pattern elements forming one of the grating-like structures
DE8383304868T DE3378785D1 (en) 1982-08-31 1983-08-23 Apparatus for optically measuring the distance between two grating-like structures and the size of periodic pattern elements forming one of the grating-like structures
DD83254396A DD212581A5 (de) 1982-08-31 1983-08-31 Vorrichtung zum messen des abstandes zwischen zwei gitterartigen strukturen sowie der groesse in zyklischer folge auftretender strukturelemente

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14998282A JPS5940105A (ja) 1982-08-31 1982-08-31 パタ−ン測定装置

Publications (2)

Publication Number Publication Date
JPS5940105A true JPS5940105A (ja) 1984-03-05
JPS6341483B2 JPS6341483B2 (enrdf_load_stackoverflow) 1988-08-17

Family

ID=15486875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14998282A Granted JPS5940105A (ja) 1982-08-31 1982-08-31 パタ−ン測定装置

Country Status (1)

Country Link
JP (1) JPS5940105A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01143334A (ja) * 1987-11-30 1989-06-05 Toshiba Mach Co Ltd マスクの欠陥検査方法及び欠陥検査装置
US5837354A (en) * 1995-06-30 1998-11-17 Toyoda Gosei Co., Ltd. Flexible metallized products and process for producing the same
US9254721B2 (en) 2012-05-25 2016-02-09 Bridgestone Corporation Base tire and tire built on base tire

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01143334A (ja) * 1987-11-30 1989-06-05 Toshiba Mach Co Ltd マスクの欠陥検査方法及び欠陥検査装置
US5837354A (en) * 1995-06-30 1998-11-17 Toyoda Gosei Co., Ltd. Flexible metallized products and process for producing the same
US9254721B2 (en) 2012-05-25 2016-02-09 Bridgestone Corporation Base tire and tire built on base tire

Also Published As

Publication number Publication date
JPS6341483B2 (enrdf_load_stackoverflow) 1988-08-17

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