JPS5940105A - パタ−ン測定装置 - Google Patents
パタ−ン測定装置Info
- Publication number
- JPS5940105A JPS5940105A JP14998282A JP14998282A JPS5940105A JP S5940105 A JPS5940105 A JP S5940105A JP 14998282 A JP14998282 A JP 14998282A JP 14998282 A JP14998282 A JP 14998282A JP S5940105 A JPS5940105 A JP S5940105A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- measured
- light
- shadow mask
- value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012545 processing Methods 0.000 claims abstract description 12
- 230000003287 optical effect Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 26
- 230000006870 function Effects 0.000 abstract description 16
- 230000004907 flux Effects 0.000 abstract description 8
- 230000008859 change Effects 0.000 abstract description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 15
- 238000009792 diffusion process Methods 0.000 description 4
- 230000001427 coherent effect Effects 0.000 description 3
- 238000005314 correlation function Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000005337 ground glass Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14998282A JPS5940105A (ja) | 1982-08-31 | 1982-08-31 | パタ−ン測定装置 |
| US06/523,768 US4560280A (en) | 1982-08-31 | 1983-08-17 | Apparatus for optically measuring the distance between two grating-like structures and the size of periodic pattern elements forming one of the grating-like structures |
| DE8383304868T DE3378785D1 (en) | 1982-08-31 | 1983-08-23 | Apparatus for optically measuring the distance between two grating-like structures and the size of periodic pattern elements forming one of the grating-like structures |
| EP83304868A EP0104762B1 (en) | 1982-08-31 | 1983-08-23 | Apparatus for optically measuring the distance between two grating-like structures and the size of periodic pattern elements forming one of the grating-like structures |
| DD83254396A DD212581A5 (de) | 1982-08-31 | 1983-08-31 | Vorrichtung zum messen des abstandes zwischen zwei gitterartigen strukturen sowie der groesse in zyklischer folge auftretender strukturelemente |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14998282A JPS5940105A (ja) | 1982-08-31 | 1982-08-31 | パタ−ン測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5940105A true JPS5940105A (ja) | 1984-03-05 |
| JPS6341483B2 JPS6341483B2 (enrdf_load_stackoverflow) | 1988-08-17 |
Family
ID=15486875
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14998282A Granted JPS5940105A (ja) | 1982-08-31 | 1982-08-31 | パタ−ン測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5940105A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01143334A (ja) * | 1987-11-30 | 1989-06-05 | Toshiba Mach Co Ltd | マスクの欠陥検査方法及び欠陥検査装置 |
| US5837354A (en) * | 1995-06-30 | 1998-11-17 | Toyoda Gosei Co., Ltd. | Flexible metallized products and process for producing the same |
| US9254721B2 (en) | 2012-05-25 | 2016-02-09 | Bridgestone Corporation | Base tire and tire built on base tire |
-
1982
- 1982-08-31 JP JP14998282A patent/JPS5940105A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01143334A (ja) * | 1987-11-30 | 1989-06-05 | Toshiba Mach Co Ltd | マスクの欠陥検査方法及び欠陥検査装置 |
| US5837354A (en) * | 1995-06-30 | 1998-11-17 | Toyoda Gosei Co., Ltd. | Flexible metallized products and process for producing the same |
| US9254721B2 (en) | 2012-05-25 | 2016-02-09 | Bridgestone Corporation | Base tire and tire built on base tire |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6341483B2 (enrdf_load_stackoverflow) | 1988-08-17 |
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