JPS5939032Y2 - 真空吸着装置 - Google Patents

真空吸着装置

Info

Publication number
JPS5939032Y2
JPS5939032Y2 JP1980177426U JP17742680U JPS5939032Y2 JP S5939032 Y2 JPS5939032 Y2 JP S5939032Y2 JP 1980177426 U JP1980177426 U JP 1980177426U JP 17742680 U JP17742680 U JP 17742680U JP S5939032 Y2 JPS5939032 Y2 JP S5939032Y2
Authority
JP
Japan
Prior art keywords
suction
vacuum
holes
lead frame
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980177426U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5799847U (enrdf_load_stackoverflow
Inventor
好文 伊熊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamada Manufacturing Co Ltd
Original Assignee
Yamada Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamada Manufacturing Co Ltd filed Critical Yamada Manufacturing Co Ltd
Priority to JP1980177426U priority Critical patent/JPS5939032Y2/ja
Publication of JPS5799847U publication Critical patent/JPS5799847U/ja
Application granted granted Critical
Publication of JPS5939032Y2 publication Critical patent/JPS5939032Y2/ja
Expired legal-status Critical Current

Links

JP1980177426U 1980-12-10 1980-12-10 真空吸着装置 Expired JPS5939032Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980177426U JPS5939032Y2 (ja) 1980-12-10 1980-12-10 真空吸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980177426U JPS5939032Y2 (ja) 1980-12-10 1980-12-10 真空吸着装置

Publications (2)

Publication Number Publication Date
JPS5799847U JPS5799847U (enrdf_load_stackoverflow) 1982-06-19
JPS5939032Y2 true JPS5939032Y2 (ja) 1984-10-30

Family

ID=29971296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980177426U Expired JPS5939032Y2 (ja) 1980-12-10 1980-12-10 真空吸着装置

Country Status (1)

Country Link
JP (1) JPS5939032Y2 (enrdf_load_stackoverflow)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4316175Y1 (enrdf_load_stackoverflow) * 1965-07-21 1968-07-05
JPS5547471B2 (enrdf_load_stackoverflow) * 1972-02-10 1980-11-29
JPS51101474U (enrdf_load_stackoverflow) * 1975-02-10 1976-08-14
JPS5651338Y2 (enrdf_load_stackoverflow) * 1978-11-14 1981-12-01

Also Published As

Publication number Publication date
JPS5799847U (enrdf_load_stackoverflow) 1982-06-19

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