JPS5939014A - Method for manufacturing magnetic recording body with flexibility - Google Patents
Method for manufacturing magnetic recording body with flexibilityInfo
- Publication number
- JPS5939014A JPS5939014A JP57148984A JP14898482A JPS5939014A JP S5939014 A JPS5939014 A JP S5939014A JP 57148984 A JP57148984 A JP 57148984A JP 14898482 A JP14898482 A JP 14898482A JP S5939014 A JPS5939014 A JP S5939014A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- magnetic
- substrate
- magnetic recording
- iron oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 238000000034 method Methods 0.000 title abstract description 8
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 239000010409 thin film Substances 0.000 claims abstract description 29
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims abstract description 28
- SZVJSHCCFOBDDC-UHFFFAOYSA-N ferrosoferric oxide Chemical compound O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 claims abstract description 13
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 6
- 239000000654 additive Substances 0.000 claims abstract description 5
- 229910006297 γ-Fe2O3 Inorganic materials 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 abstract description 12
- 238000007254 oxidation reaction Methods 0.000 abstract description 12
- 230000008602 contraction Effects 0.000 abstract description 4
- 229910052742 iron Inorganic materials 0.000 abstract description 4
- 230000000996 additive effect Effects 0.000 abstract 1
- 230000002411 adverse Effects 0.000 abstract 1
- 239000000470 constituent Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 8
- 239000004642 Polyimide Substances 0.000 description 7
- 229920001721 polyimide Polymers 0.000 description 7
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 235000002505 Centaurea nigra Nutrition 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241001073742 Mylopharodon conocephalus Species 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 229920002433 Vinyl chloride-vinyl acetate copolymer Polymers 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 239000005077 polysulfide Substances 0.000 description 1
- 229920001021 polysulfide Polymers 0.000 description 1
- 150000008117 polysulfides Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/658—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing oxygen, e.g. molecular oxygen or magnetic oxide
Abstract
Description
【発明の詳細な説明】
本発明は可撓性磁気゛記録体の製造方法に関し、特に磁
気テープ及び7レキシプルデイスク等に用いられる、可
撓性基体上に磁性酸化鉄の薄膜を形成した磁性酸化鉄連
続薄膜型磁気記録体の製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a flexible magnetic recording medium, and in particular to a method for manufacturing a flexible magnetic recording medium, in which a thin film of magnetic iron oxide is formed on a flexible substrate, which is used in magnetic tapes, 7-lexiple disks, etc. The present invention relates to a method of manufacturing an iron oxide continuous thin film magnetic recording medium.
磁気記録媒体には、可撓性基体上にγ−Fe2O3等の
針状結晶を塩化ビニル−酢酸ビニル共重合体、ポリウレ
タン等の有機バインダーで接着したいわゆる塗布型の磁
気記録体が従来から一般に使われている。So-called coating-type magnetic recording media, in which needle-shaped crystals such as γ-Fe2O3 are bonded to a flexible substrate with an organic binder such as vinyl chloride-vinyl acetate copolymer or polyurethane, have been commonly used as magnetic recording media. It is being said.
近年、高密度記録化が要望され、金属薄膜型磁気記録体
、とりわけ薄層化、高保磁力化が容易なコバルト系蒸着
テープが注目されている。しかしこのようガ金属薄膜媒
体は、フェライトのような固いヘッドとの接触による膜
表面の損傷、摩耗及び腐食の問題があシ薄層化が進む程
信頼性の確保が困難である。In recent years, there has been a demand for high-density recording, and metal thin film magnetic recording bodies, particularly cobalt-based vapor-deposited tapes that can be easily made thinner and have higher coercive force, have attracted attention. However, such a metal thin film medium has problems such as damage, wear and corrosion of the film surface due to contact with a hard head such as ferrite, and as the layer becomes thinner, it becomes more difficult to ensure reliability.
そこでかかる点を解決しようと可撓性基体上に耐摩耗性
、酬腐食性が良好な酸化鉄磁性薄膜であるr−FegO
sまたはr−Fe20g’とFe3O4ノウ間組成物ま
たはFe3O4を主成分とする磁性酸化鉄連続薄膜を直
接形成した可撓性磁気記録体が提案されている。このよ
うな可撓性磁気記録体の用途としては、磁気テープ、フ
レキシブル磁気ディスクガどがあシ、フレキシブル磁気
ディスクの場合には基体厚50μm(ミクロン)程度の
基体が用いられる。また磁気テープでは通常20μm程
度であるが長時間記録再生且つ小型化を狙ったテープで
は10μm以下の基体が用いられるようになってきてい
る。このよう外薄い基体上に連続薄膜(例えばCO薄膜
)を形成した場合には、CO薄膜の圧縮応力によってC
O薄膜を内側にしたカールが生じ走行性の劣化、ドロッ
プアウトの多発が問題となっている。In order to solve this problem, we applied r-FegO, an iron oxide magnetic thin film with good wear resistance and corrosion resistance, on a flexible substrate.
A flexible magnetic recording material has been proposed in which a magnetic iron oxide continuous thin film containing a composition between s- or r-Fe20g' and Fe3O4 or Fe3O4 as a main component is directly formed. Such flexible magnetic recording bodies are used for magnetic tapes, flexible magnetic disks, and in the case of flexible magnetic disks, substrates having a substrate thickness of about 50 μm (microns) are used. In addition, magnetic tapes are usually about 20 .mu.m in diameter, but tapes designed for long-term recording/reproduction and miniaturization are increasingly using substrates of 10 .mu.m or less. When a continuous thin film (for example, a CO thin film) is formed on such an outer thin substrate, the compressive stress of the CO thin film
Curling occurs with the O thin film inside, resulting in poor running performance and frequent dropouts.
この為磁性薄膜媒体と反対側の具体面に同種または異種
の薄膜を形成しカールを除去する方法(特開昭56−1
6939)、金属薄膜の熱膨張に打ち勝って熱収縮する
ことのできる基体を用いる方法(特開昭56−1693
8)などが提案されている。For this purpose, a method of forming a thin film of the same type or a different type on the concrete surface opposite to the magnetic thin film medium and removing the curl (Japanese Unexamined Patent Publication No. 56-1
6939), a method using a substrate that can overcome the thermal expansion of a thin metal film and undergo thermal contraction (Japanese Patent Laid-Open No. 56-1693)
8) etc. have been proposed.
一方、磁性酸化鉄連続薄膜もそのような薄い基体に形成
したときは程度の差があるものの一般に同薄膜を内側に
したカールが発生し、またこれを温度を上げて酸化した
場合には金属薄膜とは異なシ磁性膜の組成の変化にとも
なう結晶格子定数の減少による磁性膜の収縮が起シ磁性
膜にクラックやカールが生じる。とくにクラックについ
ては酸化鉄薄膜のみならず金属薄膜を含めた連続薄膜に
特有な問題で、カールと共に記録再生時のドロップアウ
ト及びテープの不安定走行の原因と々シ、磁気テープと
しての使用上問題であった。On the other hand, when a magnetic iron oxide continuous thin film is formed on such a thin substrate, curling occurs with the same thin film on the inside, although there are differences in degree, and when it is oxidized at elevated temperatures, the metal thin film The shrinkage of the magnetic film due to a decrease in the crystal lattice constant due to a change in the composition of the magnetic film causes cracks and curls in the magnetic film. In particular, cracks are a problem specific to continuous thin films, including not only iron oxide thin films but also metal thin films, and along with curling, they cause dropouts during recording and playback and unstable tape running, making them problematic when used as magnetic tapes. Met.
本発明はかかる問題点を解決せんとするものであシ、走
行性、ドロップアウトの点ですぐれたカール、クラック
の々い磁性酸化鉄連続薄膜を記録媒体とする可撓性磁気
記録体の製造方法を桿供することを目的とするものであ
る。The present invention aims to solve these problems, and is to produce a flexible magnetic recording medium using a magnetic iron oxide continuous thin film as a recording medium, which has excellent runnability and dropout, and is free from curls and cracks. The purpose is to provide a method.
すなわち本発明によれは可撓性基体上にF630<また
はFe3O4とγ−Fe2esの中間組成物を主成分と
する、またはこれらにその他の添加物を含む磁性酸化鉄
連続薄膜を形成した後、これを酸化して、r−Fe20
3またはr−Fe20gとFe504ノ中間組成物を主
成分とするまたはこれらにその他の添加物を含む磁性酸
化鉄連続薄膜を形成する可撓性磁気記録体の製造方法に
おいて、可撓性基体の熱収縮率が0.3チ〜0.7チと
なる温度範囲において酸化することを特徴とする可撓性
磁気記録体の製造方法が得られる。That is, according to the present invention, after forming a magnetic iron oxide continuous thin film mainly composed of F630< or an intermediate composition of Fe3O4 and γ-Fe2es, or containing other additives to these, on a flexible substrate, by oxidizing r-Fe20
3 or r-Fe20g and Fe504 as main components or containing other additives therein, A method for producing a flexible magnetic recording material is obtained, which is characterized in that oxidation occurs in a temperature range where the shrinkage rate is 0.3 inches to 0.7 inches.
本発明は酸化による磁性膜の組成変化による収縮を基体
の熱収縮で吸収しクラック発生の防止及びカールの制御
を可能にしたものである。可撓性基体としてはポリアミ
ドイミド、ポリイミド、ポリサルファイド、ポリスルホ
ン、ポリエステルなどが挙げられる。またFe3O4t
たはFe3O4とγ−F@203の中間組成物を主成分
とする強磁性酸化鉄薄膜への添加物としては、Co、
Cu + Zn、 Mn+ Tiなどが挙げられる。The present invention makes it possible to prevent the occurrence of cracks and control curling by absorbing shrinkage due to changes in the composition of the magnetic film due to oxidation by thermal shrinkage of the substrate. Examples of the flexible substrate include polyamideimide, polyimide, polysulfide, polysulfone, and polyester. Also Fe3O4t
Co, Co,
Examples include Cu + Zn and Mn + Ti.
以下、本発明の一実施例について詳細に説明する。Hereinafter, one embodiment of the present invention will be described in detail.
実施例
コバルト及び銅を含むマグネタイトCF@5Oa)を主
成分とするターゲットを用い、ポリイミド、ポリエステ
ル基体上にアルゴンガス雰囲気中スパッタパワー2.2
5調、スパッタ圧8 X 10−’ Torrで連続的
にスパッタすることによシ厚さ3800ÅのFe、O,
を主成分とする磁性酸化鉄連続薄膜を形成したサンプル
を作成した。これらを種々の温度で1時間酸化したとき
の基体の熱収縮率及びクラック発生、カール状態、テー
プの走行性を表に示した。Example Using a target mainly composed of magnetite containing cobalt and copper (CF@5Oa), sputtering power was 2.2 on polyimide and polyester substrates in an argon gas atmosphere.
Fe, O,
We created a sample with a continuous magnetic iron oxide thin film whose main component is . When these were oxidized for 1 hour at various temperatures, the heat shrinkage rate of the substrate, crack occurrence, curl state, and tape running properties are shown in the table.
ここで言う基体の熱収縮率は熱処理前の基体の長さをL
とし、熱処理後の長さをL′とすると(L−L’)/L
X100チで示される。The heat shrinkage rate of the substrate referred to here is the length of the substrate before heat treatment L
If the length after heat treatment is L', then (L-L')/L
It is indicated by X100chi.
(表)
表において、カールはテープ巾方向の状態を示し、磁性
膜を内側にしてカールした場合は+(プラス)とし、磁
性膜を外側にしてカールした場合は−(マイナス)とし
て表示した。また、これらのサンプルの磁性薄膜は、γ
−Fe、O,とFe、0.の中間組成物を主成分とする
酸化鉄連続薄膜を用いた。(Table) In the table, curl indicates the state in the tape width direction, and when the curl was made with the magnetic film on the inside, it was shown as + (plus), and when the curl was made with the magnetic film on the outside, it was shown as - (minus). Moreover, the magnetic thin films of these samples have γ
-Fe, O, and Fe, 0. A continuous iron oxide thin film containing an intermediate composition as the main component was used.
表から明らかなように本実施例で示すサンプルAは基体
種別としてポリイミド、基体厚さ12.5μmにおいて
、酸化温度250℃、酸化温度における熱収縮率03%
の場合にクラックおよびカールが無く、走行性を良くし
た。As is clear from the table, sample A shown in this example is made of polyimide as the base type, has a base thickness of 12.5 μm, has an oxidation temperature of 250°C, and has a heat shrinkage rate of 03% at the oxidation temperature.
In this case, there were no cracks or curls, and the running performance was improved.
また本実施例のサンプルDは、基体種別としてポリイミ
ド、基体厚さ12.5μmにおいて、酸化温度280℃
、酸化温度における熱収縮率04チの場合にクラックお
よびカールが無く、前述と同様に走行性を良くした。In addition, sample D of this example had a polyimide substrate type, a substrate thickness of 12.5 μm, and an oxidation temperature of 280° C.
When the heat shrinkage rate at the oxidation temperature was 0.4 cm, there were no cracks or curls, and the running properties were improved as described above.
更に本実施例のサンプルEは基体種別としてポリイミド
、基体厚さ12.5μmにおいて、酸化温度320℃、
酸化温度における熱収縮率0.7チの場合にクラ、りお
よびカールが無く、走行性を良くした。Furthermore, sample E of this example had a polyimide substrate type, a substrate thickness of 12.5 μm, an oxidation temperature of 320°C,
When the heat shrinkage rate at the oxidation temperature was 0.7 inches, there was no cracking, cracking or curling, and the running properties were improved.
サンプルAは基体種別としてポリイミド、基体厚さ12
.5μmにおいて、酸化温度200℃、酸化温度におけ
る熱収縮率0.2%の場合にクラックおよびカールが(
南側に有り、走行性は不良であった。Sample A has a polyimide substrate type and a substrate thickness of 12
.. At 5 μm, cracks and curls (
It was located on the south side and had poor drivability.
サンプルCは基体種別としてポリイミド、基体厚さ12
.5μmにおいて、酸化温度350℃、酸化温度におけ
る熱収縮率0.8チの場合にクラックが少し有シかつカ
ールが(@側に有るので、走行性は不良であった。Sample C has a polyimide substrate type and a substrate thickness of 12
.. When the thickness was 5 μm, the oxidation temperature was 350° C., and the thermal shrinkage rate at the oxidation temperature was 0.8 cm, there were some cracks and curls (on the @ side), so the runnability was poor.
同様にサンプルFについても表に示すとおシフラックお
よびカールが有り、走行性は不良であった。Similarly, as shown in the table, sample F also had sagging and curling, and its running properties were poor.
以上のとおり、本実施例のサンプルB、D、Eにおいて
は酸化温度における可撓性基体の熱収縮率範囲が0.3
%〜0.7g6の場合で、走行性悪化やドロップアウト
の発生に係るクラックおよびカールが防止されているこ
とがわかる。As described above, in Samples B, D, and E of this example, the thermal contraction rate range of the flexible substrate at the oxidation temperature is 0.3.
% to 0.7g6, it can be seen that cracks and curls associated with deterioration of running performance and occurrence of dropouts are prevented.
本発明は以上説明したように本実施例に係わる可撓性磁
気記録体の製造方法において、クラック及びカールのな
い、従って良好な走行性を示し、ドロ、プアウトの少な
い磁性酸化鉄連続薄膜を記録媒体とする可撓性磁気記録
体の製造が可能になる。As explained above, the present invention uses a method for manufacturing a flexible magnetic recording medium according to the present embodiment to record a magnetic iron oxide continuous thin film that is free from cracks and curls, exhibits good runnability, and has little drop-out or drop-out. It becomes possible to manufacture a flexible magnetic recording medium as a medium.
Claims (1)
zOsの中間組成物を主成分とするまたはこれらにその
他の添加物を含む磁性酸化鉄連続薄膜を形成した後、こ
れを酸化して、γ−Fez0・3まだはγ−Fe2O3
とF6a04の中間組成物を主成分とするまたはその他
の添加物を含む磁性酸化鉄連続薄膜を形成する可撓性磁
気記録体の製造方法において、可撓性基体の熱収縮率が
0.3%〜0.7チとなる温度範囲において磁性酸化鉄
連続薄膜を酸化させることを特徴とする可撓性磁気記録
体の製造方法。Fe3O4 or Feas4 and r-Fe on a flexible substrate
After forming a magnetic iron oxide continuous thin film based on an intermediate composition of zOs or containing other additives thereto, it is oxidized to form γ-Fez0.3 or γ-Fe2O3.
and F6a04 as main components or containing other additives, in which the heat shrinkage rate of the flexible substrate is 0.3%. 1. A method for producing a flexible magnetic recording material, comprising oxidizing a continuous magnetic iron oxide thin film in a temperature range of 0.7 to 0.7 cm.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57148984A JPS5939014A (en) | 1982-08-27 | 1982-08-27 | Method for manufacturing magnetic recording body with flexibility |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57148984A JPS5939014A (en) | 1982-08-27 | 1982-08-27 | Method for manufacturing magnetic recording body with flexibility |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5939014A true JPS5939014A (en) | 1984-03-03 |
Family
ID=15465086
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57148984A Pending JPS5939014A (en) | 1982-08-27 | 1982-08-27 | Method for manufacturing magnetic recording body with flexibility |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5939014A (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5423506A (en) * | 1977-07-22 | 1979-02-22 | Matsushita Electric Ind Co Ltd | Production of magnetic recording media |
JPS55167139A (en) * | 1979-06-12 | 1980-12-26 | Nec Corp | Manufacture of oxide magnetic thin film |
JPS58199510A (en) * | 1982-05-15 | 1983-11-19 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of magnetic recording medium |
-
1982
- 1982-08-27 JP JP57148984A patent/JPS5939014A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5423506A (en) * | 1977-07-22 | 1979-02-22 | Matsushita Electric Ind Co Ltd | Production of magnetic recording media |
JPS55167139A (en) * | 1979-06-12 | 1980-12-26 | Nec Corp | Manufacture of oxide magnetic thin film |
JPS58199510A (en) * | 1982-05-15 | 1983-11-19 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of magnetic recording medium |
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