JPS5937417A - 半導体圧力センサのオフセツト電圧温度補償回路 - Google Patents

半導体圧力センサのオフセツト電圧温度補償回路

Info

Publication number
JPS5937417A
JPS5937417A JP14871582A JP14871582A JPS5937417A JP S5937417 A JPS5937417 A JP S5937417A JP 14871582 A JP14871582 A JP 14871582A JP 14871582 A JP14871582 A JP 14871582A JP S5937417 A JPS5937417 A JP S5937417A
Authority
JP
Japan
Prior art keywords
pressure sensor
temperature
semiconductor pressure
voltage
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14871582A
Other languages
English (en)
Japanese (ja)
Other versions
JPH057653B2 (enrdf_load_stackoverflow
Inventor
Mikio Bessho
別所　三樹生
Hajime Horiike
堀池　肇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14871582A priority Critical patent/JPS5937417A/ja
Publication of JPS5937417A publication Critical patent/JPS5937417A/ja
Publication of JPH057653B2 publication Critical patent/JPH057653B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
    • G01D3/036—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP14871582A 1982-08-25 1982-08-25 半導体圧力センサのオフセツト電圧温度補償回路 Granted JPS5937417A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14871582A JPS5937417A (ja) 1982-08-25 1982-08-25 半導体圧力センサのオフセツト電圧温度補償回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14871582A JPS5937417A (ja) 1982-08-25 1982-08-25 半導体圧力センサのオフセツト電圧温度補償回路

Publications (2)

Publication Number Publication Date
JPS5937417A true JPS5937417A (ja) 1984-02-29
JPH057653B2 JPH057653B2 (enrdf_load_stackoverflow) 1993-01-29

Family

ID=15458970

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14871582A Granted JPS5937417A (ja) 1982-08-25 1982-08-25 半導体圧力センサのオフセツト電圧温度補償回路

Country Status (1)

Country Link
JP (1) JPS5937417A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4911016A (en) * 1986-03-26 1990-03-27 Hitachi, Ltd. Semiconductor strain gauge bridge circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4911016A (en) * 1986-03-26 1990-03-27 Hitachi, Ltd. Semiconductor strain gauge bridge circuit

Also Published As

Publication number Publication date
JPH057653B2 (enrdf_load_stackoverflow) 1993-01-29

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