JPS593551U - 半導体用ステム - Google Patents

半導体用ステム

Info

Publication number
JPS593551U
JPS593551U JP9908082U JP9908082U JPS593551U JP S593551 U JPS593551 U JP S593551U JP 9908082 U JP9908082 U JP 9908082U JP 9908082 U JP9908082 U JP 9908082U JP S593551 U JPS593551 U JP S593551U
Authority
JP
Japan
Prior art keywords
stem
cylindrical body
hole
substrate
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9908082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6246267Y2 (enrdf_load_stackoverflow
Inventor
薄永　行泰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP9908082U priority Critical patent/JPS593551U/ja
Publication of JPS593551U publication Critical patent/JPS593551U/ja
Application granted granted Critical
Publication of JPS6246267Y2 publication Critical patent/JPS6246267Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Treatment Of Glass (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP9908082U 1982-06-30 1982-06-30 半導体用ステム Granted JPS593551U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9908082U JPS593551U (ja) 1982-06-30 1982-06-30 半導体用ステム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9908082U JPS593551U (ja) 1982-06-30 1982-06-30 半導体用ステム

Publications (2)

Publication Number Publication Date
JPS593551U true JPS593551U (ja) 1984-01-11
JPS6246267Y2 JPS6246267Y2 (enrdf_load_stackoverflow) 1987-12-12

Family

ID=30234957

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9908082U Granted JPS593551U (ja) 1982-06-30 1982-06-30 半導体用ステム

Country Status (1)

Country Link
JP (1) JPS593551U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6365211U (enrdf_load_stackoverflow) * 1986-10-17 1988-04-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6365211U (enrdf_load_stackoverflow) * 1986-10-17 1988-04-30

Also Published As

Publication number Publication date
JPS6246267Y2 (enrdf_load_stackoverflow) 1987-12-12

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