JPS5935415A - Method of producing porcelain condenser - Google Patents
Method of producing porcelain condenserInfo
- Publication number
- JPS5935415A JPS5935415A JP14641882A JP14641882A JPS5935415A JP S5935415 A JPS5935415 A JP S5935415A JP 14641882 A JP14641882 A JP 14641882A JP 14641882 A JP14641882 A JP 14641882A JP S5935415 A JPS5935415 A JP S5935415A
- Authority
- JP
- Japan
- Prior art keywords
- metal layer
- ceramic capacitor
- sintered body
- dielectric material
- electrode metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
本発明は、境界層型の磁器コンデンＶの製造方法に関す
るものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a boundary layer type porcelain condenser V.
磁器コンデンサ゛は、焼成磁器を誘電体として利用する
もので、なかでもチタン酸バリウム系の磁器を用いたも
のは非常に誘電率が高いという特徴を有している。Porcelain capacitors use fired porcelain as a dielectric material, and among them, those using barium titanate-based porcelain have an extremely high dielectric constant.
ところで、チタン酸バリウム系のコンデンサの内で、特
に誘電率の大きいものに、境界層磁器コンデンサとよば
れるものがある。この境界層磁器コンデンサは、半導体
化したチタン酸バリウムに１ｙｌｎ ０１！やＣＩＪ
０２等の金ＪｉｌＩｍ化物を泥しよう状にして塗布し高
熱で焼成して両面に電極を塗布し焼付けたものであり、
誘電率が通常のチタン酸バリウム系の２０倍程度になり
、小型、大容量のものが得られる。By the way, among barium titanate-based capacitors, one with a particularly high dielectric constant is called a boundary layer ceramic capacitor. This boundary layer ceramic capacitor is made of semiconducting barium titanate with 1yln 01! and CIJ
It is made by applying a gold compound such as 02 in the form of slurry and firing it at high heat, then applying electrodes on both sides and baking it.
The dielectric constant is about 20 times that of the normal barium titanate type, and a small size and large capacity can be obtained.
しかしながら、チタン酸バリウムは通常粉末を金型プレ
スにより成形されるもので、小型化に限界があり、境界
ｌＩ！磁器コンデンザとしての特徴を生かし難い欠点が
あった。However, barium titanate is usually molded from powder using a mold press, and there is a limit to miniaturization. There was a drawback that it was difficult to take advantage of the characteristics of a porcelain capacitor.
本発明は、以上の欠点を改良し、小型化の容易な磁器コ
ンデンサの製造方法の提供を目的とするものである。The object of the present invention is to improve the above-mentioned drawbacks and provide a method for manufacturing a ceramic capacitor that can be easily miniaturized.
本発明は、上記の目的を達成するために、誘電体の焼結
体をアーク放電型イオンブレーティング法によって蒸発
し、第１電極金ａ層に前記誘電体の薄膜を積層し、その
後、該ｎ膜に第２電極金属層を形成することを特徴とづ
る磁器コンデンサの製造方法を提供づるものである。In order to achieve the above object, the present invention evaporates a dielectric sintered body by arc discharge type ion blating method, laminates the dielectric thin film on the first electrode gold a layer, and then The present invention provides a method for manufacturing a ceramic capacitor characterized by forming a second electrode metal layer on an n-film.
以下、本発明の実施例を図面に基づいて説明する。Embodiments of the present invention will be described below based on the drawings.
先ず、￥導体化したチタン敵バリウムの焼結体にＭｎ
０２やＣＬ１０２ 、’Ｔ’１２０３ 、Ｂｔ２０３な
どの金属酸化物を泥しよう状にして塗布し、１１００〜
１３００℃の高温で熱処理して酸化物を拡散さμる。First, Mn was added to a sintered body of titanium and barium that had been made into a conductor.
Apply metal oxides such as 02, CL102, 'T'1203, Bt203 in the form of slurry,
The oxide is diffused by heat treatment at a high temperature of 1300°C.
次に、この酸化物拡散慢の焼結体１を、図に示す通り、
アーク放電型イオンプレーディング装置２内のルツボ３
に収納し、装置内２をポンプ４により１０’ Ｔｏｒｒ
以上の真空陳に保持し、ＭＯからなる陽極５に電圧を印
加して放電さゼ、焼結体１を蒸発させる。Next, as shown in the figure, this sintered body 1 with slow oxide diffusion is
Crucible 3 in arc discharge type ion plating device 2
The inside of the device 2 is heated to 10' Torr by pump 4.
While maintaining the above vacuum condition, a voltage is applied to the anode 5 made of MO to cause a discharge and evaporate the sintered body 1.
蒸発した焼結体１は基板６に設【ノられた銀や銅等の第
１電極金ＩＦｉｊ１７に付着する。The evaporated sintered body 1 adheres to the first electrode gold IFij 17 made of silver, copper, etc. provided on the substrate 6.
この後、第１電極金属層に付着した焼結体１に第２７！
！極金属層を形成する。After this, the 27th!
! Form a super metal layer.
第２電極金属層の形成後、ヘアピン状のリード線を各金
属層にキロ１付けし、樹脂ディップにより外装を形成す
る。After forming the second electrode metal layer, hairpin-shaped lead wires are attached to each metal layer, and an exterior is formed by resin dipping.
すなわち、本発明によれば、誘電体層をアーク放電型イ
オンブレーティング法により形成するので、薄膜生成が
可能であり、小型化の容易な磁器コンデンサが得られる
。That is, according to the present invention, since the dielectric layer is formed by the arc discharge type ion blating method, a thin film can be formed and a ceramic capacitor that can be easily miniaturized can be obtained.
図は本発明の実施に用いられるアーク放電型イオンブレ
ーティング装置の断面図を示す。
１・・・焼結体、
２・・・アーク放電型イオンブレーティング装置、７・
・・第１ｉ！極金属層。The figure shows a cross-sectional view of an arc discharge type ion brating device used to implement the present invention. 1... Sintered body, 2... Arc discharge type ion brating device, 7.
...1st i! Extreme metal layer.
Claims (1)
する磁器コンデンサの製造方法において、前記誘電体の
焼結体をアーク放電型イオンブレーティング法によつ、
て蒸発し、第１？１ｆｆｉ極金属膚に前記誘電体の薄膜
をＶ１層し、その後、該＃膜に第２電極金属層を形成す
ることを特徴とづる磁器コンデンサの製造方法。(1) In a method for manufacturing a ceramic capacitor having a dielectric material mainly composed of barium titanate, a sintered body of the dielectric material is subjected to an arc discharge ion blating method,
1. A method for manufacturing a ceramic capacitor, characterized in that a thin film of the dielectric material is formed as a V1 layer on a first electrode metal layer, and then a second electrode metal layer is formed on the first electrode metal layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14641882A JPS5935415A (en) | 1982-08-24 | 1982-08-24 | Method of producing porcelain condenser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14641882A JPS5935415A (en) | 1982-08-24 | 1982-08-24 | Method of producing porcelain condenser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5935415A true JPS5935415A (en) | 1984-02-27 |
Family
ID=15407233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14641882A Pending JPS5935415A (en) | 1982-08-24 | 1982-08-24 | Method of producing porcelain condenser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5935415A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61270334A (en) * | 1985-05-23 | 1986-11-29 | Kawasaki Steel Corp | Production of grain oriented silicon steel sheet |
| US5261971A (en) * | 1989-04-14 | 1993-11-16 | Nippon Steel Corporation | Process for preparation of grain-oriented electrical steel sheet having superior magnetic properties |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55127011A (en) * | 1979-03-26 | 1980-10-01 | Tdk Electronics Co Ltd | Capacitor and method of manufacturing same |
-
1982
- 1982-08-24 JP JP14641882A patent/JPS5935415A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55127011A (en) * | 1979-03-26 | 1980-10-01 | Tdk Electronics Co Ltd | Capacitor and method of manufacturing same |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61270334A (en) * | 1985-05-23 | 1986-11-29 | Kawasaki Steel Corp | Production of grain oriented silicon steel sheet |
| JPH0649900B2 (en) * | 1985-05-23 | 1994-06-29 | 川崎製鉄株式会社 | Method for manufacturing unidirectional silicon steel sheet |
| US5261971A (en) * | 1989-04-14 | 1993-11-16 | Nippon Steel Corporation | Process for preparation of grain-oriented electrical steel sheet having superior magnetic properties |
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