JPS5932987A - 洗浄乾燥装置 - Google Patents
洗浄乾燥装置Info
- Publication number
- JPS5932987A JPS5932987A JP14228582A JP14228582A JPS5932987A JP S5932987 A JPS5932987 A JP S5932987A JP 14228582 A JP14228582 A JP 14228582A JP 14228582 A JP14228582 A JP 14228582A JP S5932987 A JPS5932987 A JP S5932987A
- Authority
- JP
- Japan
- Prior art keywords
- basket
- cleaning
- processed
- drying
- draining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001035 drying Methods 0.000 title claims description 41
- 238000005406 washing Methods 0.000 title claims description 16
- 230000007246 mechanism Effects 0.000 claims description 105
- 238000004140 cleaning Methods 0.000 claims description 52
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 15
- 230000032258 transport Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 description 14
- 210000000078 claw Anatomy 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- 238000005192 partition Methods 0.000 description 7
- 238000007599 discharging Methods 0.000 description 5
- 238000004891 communication Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 230000007723 transport mechanism Effects 0.000 description 3
- 229920002430 Fibre-reinforced plastic Polymers 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000011151 fibre-reinforced plastic Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000012840 feeding operation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000008213 purified water Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000008400 supply water Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14228582A JPS5932987A (ja) | 1982-08-16 | 1982-08-16 | 洗浄乾燥装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14228582A JPS5932987A (ja) | 1982-08-16 | 1982-08-16 | 洗浄乾燥装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5932987A true JPS5932987A (ja) | 1984-02-22 |
| JPH0330432B2 JPH0330432B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-04-30 |
Family
ID=15311810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14228582A Granted JPS5932987A (ja) | 1982-08-16 | 1982-08-16 | 洗浄乾燥装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5932987A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61247034A (ja) * | 1985-04-24 | 1986-11-04 | Nec Corp | 半導体スライスの洗浄方法 |
| KR101271677B1 (ko) * | 2011-02-14 | 2013-06-04 | 주식회사 에이치엠알텍 | 티브이용 프레임베이스 세척기의 건조장치 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4942460A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1972-04-27 | 1974-04-22 | ||
| JPS5232624U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1975-08-29 | 1977-03-08 | ||
| JPS5399669A (en) * | 1977-02-10 | 1978-08-31 | Citizen Watch Co Ltd | Washing apparatus |
-
1982
- 1982-08-16 JP JP14228582A patent/JPS5932987A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4942460A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1972-04-27 | 1974-04-22 | ||
| JPS5232624U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1975-08-29 | 1977-03-08 | ||
| JPS5399669A (en) * | 1977-02-10 | 1978-08-31 | Citizen Watch Co Ltd | Washing apparatus |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61247034A (ja) * | 1985-04-24 | 1986-11-04 | Nec Corp | 半導体スライスの洗浄方法 |
| KR101271677B1 (ko) * | 2011-02-14 | 2013-06-04 | 주식회사 에이치엠알텍 | 티브이용 프레임베이스 세척기의 건조장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0330432B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-04-30 |
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