JPS5932115A - Manufacture of inductance element - Google Patents
Manufacture of inductance elementInfo
- Publication number
- JPS5932115A JPS5932115A JP14298382A JP14298382A JPS5932115A JP S5932115 A JPS5932115 A JP S5932115A JP 14298382 A JP14298382 A JP 14298382A JP 14298382 A JP14298382 A JP 14298382A JP S5932115 A JPS5932115 A JP S5932115A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- layer
- inductance element
- magnetic material
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 230000035699 permeability Effects 0.000 claims abstract description 21
- 239000000696 magnetic material Substances 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 8
- 239000000203 mixture Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 239000006247 magnetic powder Substances 0.000 claims 7
- 229910000859 α-Fe Inorganic materials 0.000 abstract description 25
- 239000004020 conductor Substances 0.000 abstract description 21
- 229910018605 Ni—Zn Inorganic materials 0.000 abstract description 5
- 229910001252 Pd alloy Inorganic materials 0.000 abstract description 3
- 230000004907 flux Effects 0.000 abstract description 2
- 125000004122 cyclic group Chemical group 0.000 abstract 1
- 239000011230 binding agent Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 239000012212 insulator Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229920000609 methyl cellulose Polymers 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- 235000010981 methylcellulose Nutrition 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/04—Fixed inductances of the signal type with magnetic core
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
- Coils Or Transformers For Communication (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、インダクタンス素子とその製造方法に係るも
ので、特に、磁性体と導体を積層することによって周回
するコイルパターンを具えたインダ・クタ/ス素子とそ
の製造方法に関するものでおる。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an inductance element and a method for manufacturing the same, and in particular, an inductance element having a coil pattern that circulates by laminating a magnetic material and a conductor, and a method for manufacturing the same. It's about.
インダクタンス素子は、導電性線材をコイル状に巻回し
たものが古くから用いられているが、インダクタンスを
上げる念めにフェライトのコアなどの磁芯を併せて用い
ている。しかし、電子回路の小形化に伴って電子部品の
小形化の要求も高まっており、インダクタンス素子もそ
の例外ではない。インダクタンス素子の小形化は他の回
路素子に比較すると遅れているが、大別すると二つの方
向で開発が進められている。一つは、基本的には従来の
インダクタンス素子(コイル)の構造で寸法形状を小さ
くするものであり、もう一つは印刷方式等によって同体
化し巻線を不要とするものである。Inductance elements have long been used as coiled conductive wires, but in order to increase the inductance, magnetic cores such as ferrite cores are also used. However, with the miniaturization of electronic circuits, the demand for miniaturization of electronic components has also increased, and inductance elements are no exception. Although the miniaturization of inductance elements is slower than that of other circuit elements, development is progressing in two broad directions. One is basically the structure of a conventional inductance element (coil), but the size and shape are reduced, and the other is integrated using a printing method or the like, thereby eliminating the need for winding.
印刷方式によるインダクタンス素子にも様々なタイプが
あるが、インダクタンス値を高くシ、シかも機械的な強
度を保つために、絶縁層の上に円弧状のコイル形成用金
属パターンを印刷し、その一端を残してその上に絶R層
を印刷し、次に金属パターンを端部を接続して形成し、
この工程を繰り返して形成されるタイプが注目を浴びて
いる。There are various types of inductance elements made by printing methods, but in order to maintain a high inductance value and mechanical strength, an arc-shaped metal pattern for forming a coil is printed on the insulating layer, and one end of the inductance element is printed on the insulating layer. , and print an absolute R layer on it, then connect the ends and form a metal pattern,
The type that is formed by repeating this process is attracting attention.
これによって、絶縁体中に周回するパターンを形成しコ
イルとするものである。印刷する層の数を適宜選択する
ととによって所望のインダクタンス値を得ることができ
、また、絶縁層を磁性体で形成するととによって、イン
ダクタンス値を上げることも考えられている。This forms a pattern that circulates in the insulator to form a coil. A desired inductance value can be obtained by appropriately selecting the number of printed layers, and it is also considered that the inductance value can be increased by forming the insulating layer from a magnetic material.
本発明は、上記のような、印刷によって周回導電パター
ンが形成されるインダクタンス素子とその製造方法に関
するものである。The present invention relates to an inductance element in which a circulating conductive pattern is formed by printing, as described above, and a method for manufacturing the same.
印刷によって周回導電パターンを形成するインダクタン
ス素子は、導電パターンの周囲は絶縁体でなければなら
ず、また、インダクタンス値を上げる之めには磁性体で
あることが望ましい。そこで、一般には、導電パターン
と絶縁性の磁性体層を交互に印刷するものが多く用いら
れている。このようにして形成されたインダクタンス素
子において、隣り合う導電パターンの間には磁性体層が
介在することになる。また、電流の向きも同じとなるの
で、部分正面断面図である第1図に示したように、それ
ぞれの導体パターン11の周囲に同じ向きに磁力線12
が発生するととK 7る。したがって二つの導電ハタ−
7110間では磁力線の向きが逆となるので、磁気抵抗
が増すことになる。In an inductance element that forms a circular conductive pattern by printing, the area around the conductive pattern must be an insulator, and in order to increase the inductance value, it is preferably a magnetic material. Therefore, in general, many devices are used in which conductive patterns and insulating magnetic layers are alternately printed. In the inductance element formed in this way, a magnetic layer is interposed between adjacent conductive patterns. Furthermore, since the direction of the current is also the same, as shown in FIG.
When K7 occurs. Therefore, two conductive groups
Since the direction of the magnetic lines of force is reversed between 7110 and 7110, the magnetic resistance increases.
これが、インダクタンス素子のQ値の劣化をひき起こす
原因となっている。This causes deterioration of the Q value of the inductance element.
本発明は、上記の問題を解決して、磁気抵抗を減少させ
て高いQ値の得られる□インダクタンス素子を提供する
ことを目的とする。An object of the present invention is to solve the above problems and provide a □ inductance element that can reduce magnetic resistance and obtain a high Q value.
また、単に磁気抵抗を減少させるだけでなく、信頼性が
高く、歩留の良好なインダクタンス素子を得ることを目
的とする。Another objective is not only to simply reduce magnetic resistance, but also to obtain an inductance element with high reliability and good yield.
本発明は、導電パターンの間には透磁率の低い層を介在
させることによって、上記の目的を達成するものである
。また、この透磁率の低い層は周囲の磁性体層と同じ材
料で構成されるが、組成の比率を変えることによって透
磁率を変化さ斗るようにしたものである。The present invention achieves the above object by interposing a layer with low magnetic permeability between conductive patterns. Further, this layer with low magnetic permeability is made of the same material as the surrounding magnetic layer, but the magnetic permeability can be changed by changing the composition ratio.
以下、図面に従って本発明の実施例につき説明する。Embodiments of the present invention will be described below with reference to the drawings.
第2図は、本発明によるインダクタンス素子の一例の正
面断面図を示す。Ni−Zn系フェライトから成る磁性
体13中に、銀−パラジウム合金の導体パターン14が
形成され、この導体パターン14は周回するコイルパタ
ーンを形成している。FIG. 2 shows a front sectional view of an example of an inductance element according to the present invention. A conductor pattern 14 made of a silver-palladium alloy is formed in a magnetic body 13 made of Ni-Zn ferrite, and this conductor pattern 14 forms a rotating coil pattern.
導体パターン140間には低透磁率の磁性体層15を具
えている。この磁性体層15は磁性体13と同じ材料か
ら成るNi−Zn系フェライトで構成されるが、Niの
含有量が少なくなっており、磁性体13に比較すると透
磁率が低くなっている。A magnetic layer 15 with low magnetic permeability is provided between the conductor patterns 140 . The magnetic layer 15 is made of Ni--Zn ferrite made of the same material as the magnetic material 13, but has a lower Ni content and has lower magnetic permeability than the magnetic material 13.
第3図は、本発明によるインダクタンス素子の製造方法
の一例を示す正面断面図である。基体16上にNi−Z
n系フェライト粉末をメチルセルロース、ブチラール゛
樹脂等のバインダー及び溶剤で線ってペースト状にした
フェライト17全印刷する(蜀。このとき、後に導電パ
ターンを形成する部分を除いた他の部分にフェライト1
7を印刷する。FIG. 3 is a front sectional view showing an example of the method for manufacturing an inductance element according to the present invention. Ni-Z on the substrate 16
N-type ferrite powder is mixed with a binder such as methyl cellulose or butyral resin and a solvent to form a paste, and the entire ferrite 17 is printed.
Print 7.
したがって、導電パターンを形成する(印刷する)領域
は、フェライト17によって形成された溝の部分となる
。Therefore, the region where the conductive pattern is formed (printed) is the groove portion formed by the ferrite 17.
次に、銀−パラジウム合金とバインダー及び溶剤を練っ
たペースト状の導体18を印刷する。この印刷は二段階
に分けて行なうと良く、先ず、フェライト17によって
形成された溝の部分を埋めるように印刷し、更忙、それ
と同じパターンで同程度の厚さを印刷して、フェライト
17の二倍程度となるようにする(功。こうすれば、焼
結によって導体18が収縮しても、十分な厚みを有する
周回導電パターンを形成できる。Next, a paste-like conductor 18 made of a silver-palladium alloy, a binder, and a solvent is printed. It is best to carry out this printing in two stages. First, print to fill the grooves formed by the ferrite 17, and then print the same pattern and the same thickness to fill the grooves formed by the ferrite 17. The thickness should be approximately twice as large (advantageous).In this way, even if the conductor 18 shrinks due to sintering, a circular conductive pattern with sufficient thickness can be formed.
導体18を印刷した後に、再びフェライト19全印刷す
るが、この場合にも二回重ねて印刷して厚みを大きくし
ておく(Qoこれによって、再びフェライト19によっ
て導体18上に溝が形成されたことになる。このフェラ
イト19は先に形成するフェライト1/と同じ位置に形
成されるとともに、同じペーストが用いられる。すなわ
ち、この場合であれば、Ni−Zn系フェライトのペー
ストを両方のフエライ)17.19の印刷に共用すれば
良い。導体18上にフェライト19によって囲まれて形
成された溝に、Ni−Zn系フェライトの仮焼粉末をバ
インター−と溶剤で練ったペースト状のフェライト20
を印刷する(10但し、このフェライトは、前記のフェ
ライト17.19よりも透磁率が低くなるようにしてお
く。すなわち、N1−Znの含有量゛を変化させ、Ni
の含有量を減少させることによって透磁率を低くするこ
とができる。このように、基本的には同じ材料から成る
フェライトを用いるが、組成の比率を変えるようにして
透磁率に変化をつけるようにし、電極となる導体の間の
部分を低い透磁率とする。After printing the conductor 18, print the entire ferrite 19 again, but in this case, print twice to increase the thickness (Qo) By doing this, grooves are formed on the conductor 18 by the ferrite 19 again. This ferrite 19 is formed at the same position as the previously formed ferrite 1/, and the same paste is used.In other words, in this case, Ni-Zn ferrite paste is used for both ferrites. It should be shared for printing on 17.19. A paste-like ferrite 20 made by kneading calcined powder of Ni-Zn ferrite with binder and a solvent is placed in a groove formed on the conductor 18 surrounded by ferrite 19.
(10 However, this ferrite is made to have a lower magnetic permeability than the ferrite 17.19 described above. In other words, by changing the content of N1-Zn,
Magnetic permeability can be lowered by reducing the content of . In this way, ferrites made of basically the same material are used, but the magnetic permeability is varied by changing the composition ratio, so that the part between the conductors that will become the electrodes has a low magnetic permeability.
上記のようなエイエを繰り返し7て、導体パターンを接
続しながら層を重ねて周回各電パターンを形影する。導
体間は透磁率の低い磁性体で、中心部と周囲は透磁率の
高い磁性体でそれぞれ構成されたコ・イルが得ら八る。The above-described process is repeated 7 to form each circulating conductor pattern by stacking layers while connecting the conductor patterns. A coil/coil is obtained in which the space between the conductors is made of a magnetic material with low magnetic permeability, and the center and the periphery are made of a magnetic material with high magnetic permeability.
本発明によれば、積層ネれた導体の間が低い透磁率の磁
性体で形成場れているので、磁気回路は中心と周囲の高
透磁率のフェライト内に形成されるようになる。したが
って、導体間に形成される磁気回路の磁束密度も小さく
なり、導体の磁気抵抗を減少させ、Q値を向上ちぜるこ
とかで8る。According to the present invention, since a magnetic material with low magnetic permeability is formed between the laminated twisted conductors, a magnetic circuit is formed in the center and surrounding ferrites with high magnetic permeability. Therefore, the magnetic flux density of the magnetic circuit formed between the conductors is also reduced, reducing the magnetic resistance of the conductors and improving the Q value.
廿た、同じ磁性体利料で組成比ホを変えただけのフェラ
イトを用いるので、印刷、焼結の工程において収縮率を
均一にしたり剥離を防止できるといった利点もある。Furthermore, since ferrite is used that has the same magnetic material but only a different composition ratio, it has the advantage of making the shrinkage rate uniform and preventing peeling during the printing and sintering processes.
更に、導体、二種類のフェライトを十分な厚みを保たせ
て印刷できるとともに、位置合わせも容易であるという
利点がある。Furthermore, there are advantages in that the conductor and two types of ferrite can be printed while maintaining sufficient thickness, and alignment is also easy.
図、第2図は本発明rCよるインダクタンス素子の一例
の正面断面図を示す。第3図は本発明によるインダクタ
ンス素子の製造方法を示す正面断面図である。
15.17.19・・・・・・高透磁率磁性体14.1
8・・・・・・導体。
15.20・・・・・・低透磁率磁性体特許出願人
東光株式会社FIG. 2 shows a front sectional view of an example of an inductance element according to the rC of the present invention. FIG. 3 is a front sectional view showing a method of manufacturing an inductance element according to the present invention. 15.17.19... High permeability magnetic material 14.1
8... Conductor. 15.20・・・Low permeability magnetic material patent applicant Toko Co., Ltd.
Claims (2)
、絶縁層間を周回してコイルパターンが形成されたイン
ダクタンス素子において、周回する導電層間に介在する
絶縁層がその他の絶縁層と同じ材料を混合して形成され
、かつ、該その他の絶縁層よ抄も低い透磁率を有する磁
性体であ・ることを特徴とするインダクタンス素子。(1) In an inductance element in which a conductive layer and an insulating layer are sequentially formed by a printing method and a coil pattern is formed by circulating between the insulating layers, the insulating layer interposed between the circulating conductive layers is made of the same material as the other insulating layers. 1. An inductance element characterized in that the inductance element is formed by a mixture of the above insulating layers, and is also made of a magnetic material having a lower magnetic permeability than the other insulating layers.
性体粉末のペーストを印刷して第一の磁性体層を形成し
、該第−の磁性体層によって形成される溝に導電層を印
刷して更に同じパターンで導電層を形成し、該導電層に
よって形成される溝に、該第−の磁性体粉末のペースト
を印刷して更に同じパターンで該第−の磁性体粉末のペ
ーストを印刷[7て第二の磁性体層を形成し、該第二の
磁性体層によって形成される溝に該第−の磁性体粉末と
同じ材料を混合して形成され、かつ、該第−の磁性体粉
末より透磁率の低い第二の磁性体粉末のペーストを印刷
して第三の磁性体層を形成し、この工程を反復すること
によって稈回すZ2コイルパターンを得ることを特徴と
する特許請求の前)囲第1項記載のインダクタンス素子
の製造方法。(2) Form a first magnetic layer by printing a paste of the first magnetic powder on the substrate excluding the printed pattern of the conductive layer, and conductive in the grooves formed by the second magnetic layer. A conductive layer is further formed in the same pattern by printing a layer, a paste of the first magnetic powder is printed in the grooves formed by the conductive layer, and a paste of the second magnetic powder is further printed in the same pattern. Print the paste [7] to form a second magnetic layer, which is formed by mixing the same material as the first magnetic powder in the groove formed by the second magnetic layer, and which is formed by mixing the same material as the first magnetic powder; - A third magnetic layer is formed by printing a paste of a second magnetic powder having a lower magnetic permeability than that of the magnetic powder, and this process is repeated to obtain a Z2 coil pattern that rotates the culm. 2. A method for manufacturing an inductance element according to claim 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14298382A JPS5932115A (en) | 1982-08-18 | 1982-08-18 | Manufacture of inductance element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14298382A JPS5932115A (en) | 1982-08-18 | 1982-08-18 | Manufacture of inductance element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5932115A true JPS5932115A (en) | 1984-02-21 |
Family
ID=15328197
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14298382A Pending JPS5932115A (en) | 1982-08-18 | 1982-08-18 | Manufacture of inductance element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5932115A (en) |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6382910U (en) * | 1986-11-19 | 1988-05-31 | ||
JPH01173611A (en) * | 1987-12-26 | 1989-07-10 | Toko Inc | Manufacture of laminated inductor |
JPH02207515A (en) * | 1989-02-07 | 1990-08-17 | Toko Inc | Manufacture of laminated inductor |
JPH0424911A (en) * | 1990-05-15 | 1992-01-28 | Murata Mfg Co Ltd | Laminated composite electronic component |
JPH06310333A (en) * | 1993-04-26 | 1994-11-04 | Tdk Corp | Laminated inductor |
WO2004093105A1 (en) * | 2003-04-15 | 2004-10-28 | Tdk Corporation | Method of forming sheet having foreign material portions used for forming multilayer wiring board and sheet having foreign portions |
JP2007067427A (en) * | 2006-10-13 | 2007-03-15 | Tdk Corp | Sheet used for constituting electronic component |
JP2010067758A (en) * | 2008-09-10 | 2010-03-25 | Murata Mfg Co Ltd | Electronic part |
JP2011018752A (en) * | 2009-07-08 | 2011-01-27 | Murata Mfg Co Ltd | Electronic component, and method of manufacturing the same |
JP2015106709A (en) * | 2013-11-29 | 2015-06-08 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | Laminate type electronic component, method for manufacturing the same and mounting substrate therefor |
JP2016051835A (en) * | 2014-09-01 | 2016-04-11 | Fdk株式会社 | Laminated chip and method of manufacturing laminated chip |
JP2018006411A (en) * | 2016-06-28 | 2018-01-11 | Tdk株式会社 | Laminated coil component |
CN110391081A (en) * | 2018-04-16 | 2019-10-29 | 弘邺科技有限公司 | The coil printing process of magnetic induction part |
WO2022070962A1 (en) * | 2020-09-30 | 2022-04-07 | 富士フイルム株式会社 | Method for manufacturing inductor and method for manufacturing electronic component |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57173918A (en) * | 1981-04-21 | 1982-10-26 | Tdk Corp | Laminated inductor |
-
1982
- 1982-08-18 JP JP14298382A patent/JPS5932115A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57173918A (en) * | 1981-04-21 | 1982-10-26 | Tdk Corp | Laminated inductor |
Cited By (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6382910U (en) * | 1986-11-19 | 1988-05-31 | ||
JPH0541531Y2 (en) * | 1986-11-19 | 1993-10-20 | ||
JPH01173611A (en) * | 1987-12-26 | 1989-07-10 | Toko Inc | Manufacture of laminated inductor |
JPH02207515A (en) * | 1989-02-07 | 1990-08-17 | Toko Inc | Manufacture of laminated inductor |
JPH0424911A (en) * | 1990-05-15 | 1992-01-28 | Murata Mfg Co Ltd | Laminated composite electronic component |
JPH06310333A (en) * | 1993-04-26 | 1994-11-04 | Tdk Corp | Laminated inductor |
US7611982B2 (en) | 2003-04-15 | 2009-11-03 | Tdk Corporation | Method of forming sheet having foreign material portions used for forming multi-layer wiring board and sheet having foreign portions |
JP4577479B2 (en) * | 2003-04-15 | 2010-11-10 | Tdk株式会社 | Sheet forming method having different material parts and sheet having different material parts used for multilayer wiring board formation |
JP2004319691A (en) * | 2003-04-15 | 2004-11-11 | Tdk Corp | Method for forming sheet having different materials used for multilayer wiring board formation, and sheet having the same |
KR100749362B1 (en) | 2003-04-15 | 2007-08-16 | 티디케이가부시기가이샤 | Method of forming sheet having foreign material portions used for forming multi-layer wiring board and sheet having foreign portions |
WO2004093105A1 (en) * | 2003-04-15 | 2004-10-28 | Tdk Corporation | Method of forming sheet having foreign material portions used for forming multilayer wiring board and sheet having foreign portions |
JP4618442B2 (en) * | 2006-10-13 | 2011-01-26 | Tdk株式会社 | Manufacturing method of sheet used for configuration of electronic component |
JP2007067427A (en) * | 2006-10-13 | 2007-03-15 | Tdk Corp | Sheet used for constituting electronic component |
JP2010067758A (en) * | 2008-09-10 | 2010-03-25 | Murata Mfg Co Ltd | Electronic part |
JP2011018752A (en) * | 2009-07-08 | 2011-01-27 | Murata Mfg Co Ltd | Electronic component, and method of manufacturing the same |
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JP2015106709A (en) * | 2013-11-29 | 2015-06-08 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | Laminate type electronic component, method for manufacturing the same and mounting substrate therefor |
JP2016051835A (en) * | 2014-09-01 | 2016-04-11 | Fdk株式会社 | Laminated chip and method of manufacturing laminated chip |
JP2018006411A (en) * | 2016-06-28 | 2018-01-11 | Tdk株式会社 | Laminated coil component |
CN110391081A (en) * | 2018-04-16 | 2019-10-29 | 弘邺科技有限公司 | The coil printing process of magnetic induction part |
WO2022070962A1 (en) * | 2020-09-30 | 2022-04-07 | 富士フイルム株式会社 | Method for manufacturing inductor and method for manufacturing electronic component |
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