JPS5931772B2 - Manufacturing method of magnetic head - Google Patents

Manufacturing method of magnetic head

Info

Publication number
JPS5931772B2
JPS5931772B2 JP627476A JP627476A JPS5931772B2 JP S5931772 B2 JPS5931772 B2 JP S5931772B2 JP 627476 A JP627476 A JP 627476A JP 627476 A JP627476 A JP 627476A JP S5931772 B2 JPS5931772 B2 JP S5931772B2
Authority
JP
Japan
Prior art keywords
groove
glass
wafer
magnetic head
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP627476A
Other languages
Japanese (ja)
Other versions
JPS5288321A (en
Inventor
義章 堀内
輝雄 上野
利夫 大西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP627476A priority Critical patent/JPS5931772B2/en
Publication of JPS5288321A publication Critical patent/JPS5288321A/en
Publication of JPS5931772B2 publication Critical patent/JPS5931772B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Magnetic Heads (AREA)

Description

【発明の詳細な説明】 本発明は、狭トラック幅にもかかわらず耐摩耗性に秀れ
かつカラーフリッカ−の発生を抑制させた磁気ヘッドの
製造方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a magnetic head that has excellent wear resistance and suppresses color flicker despite its narrow track width.

斯る磁気ヘッドは、映像信号などを磁気テープ等の媒体
上に高密度で記録し、及び若しくは前記媒体から前記信
号を再生する装置、たとえばビデオテープレコーダ(以
下VTRという)において嘱望されているので、以下V
TRへの適用を考慮して説明する。VTRの高密度記録
を行なう為の一つの方向として磁気ヘッドの実効トラッ
ク幅を狭くしてゆく傾向にあり、初期の実効トラック幅
200μから統−1型の115μそして3/4″ カセ
ットの85μと狭くなり最近では60μの実効トラック
幅が出現した。
Such magnetic heads are expected to be used in devices that record video signals and the like at high density on a medium such as a magnetic tape, and/or reproduce the signals from the medium, such as video tape recorders (hereinafter referred to as VTRs). , hereafter V
The explanation will be given considering the application to TR. As part of the trend toward high-density recording on VTRs, there is a trend toward narrowing the effective track width of magnetic heads. Recently, effective track widths of 60μ have appeared.

しかし、トラック幅が狭いと磁気ヘッドは高速回転して
いる為に耐摩耗性が悪くなる為に従来は第8図に示す様
に金属の片方若しくは両方からしぼつて実効トラック幅
を金属よりも狭くした磁気ヘッドが一般に考えられてい
るが、第8図のb、dは実効トラック幅が片方に寄つて
いる為に片当り現象を示し、性能、エンベロープが良く
なく、cは両方しぼつたところにガラスが充填されてい
ない為にそこに磁気テープから脱落した磁性粉が落込み
所謂目ずまり現象が生じる。従つて、現在ではaの形状
が主流となつている。そこで、高密度化と、耐摩耗性の
両方を満足せしめるべく、上記aの形状に習つて、金属
を200μ、実効トラック幅を60μにした磁気ヘッド
を使つて、統−1型VTRで採用されているカラービデ
オ信号を記録、再生した場合カラーフリッカ−(クロス
トーク)が認められた。けれども、このカラーフリッカ
−は、金属を小さくしてゆくと第10図に示す様に減小
し、金属が120μ以下になると画面上では殆んど認め
られなくなることが判つた。ところが、このような形状
で金属が100μ前後になると耐摩耗性の関係から実用
に供することができない。そこで、第8図dの形状の磁
気ヘッドを発展させて、第9図に示したように、所望の
へツドギヤツプを有する磁気コア一の両側をガラスで補
強してなる構成の磁気ヘツドも考えられるが、これでは
トラツク幅が60μ程に小さくなつた場合においてその
精度が出し難く、また各コア一を互いに衝合せて必要な
ギャツプ長を形成することも難しい等の欠点がある。尚
、前述したカラーフリツカ一は磁気テープ上のガードバ
ンドの大小と関係し、実質的な全厚W,がガードバンド
Gの4/3倍に、実効トラツク幅Tを加えた値即ち、W
1=二G+T・・・1、に選ばれれば、ワ経験的にカラ
ーフリツカ一が生じないことが知られている。
However, if the track width is narrow, the magnetic head rotates at high speed and wear resistance deteriorates, so conventionally, as shown in Figure 8, one or both of the metal parts are squeezed to make the effective track width smaller than that of the metal. A narrower magnetic head is generally considered, but the effective track widths in b and d in Fig. 8 are biased to one side, which causes the uneven contact phenomenon, and the performance and envelope are not good, and in c, both are reduced. However, since the glass is not filled therein, magnetic powder that has fallen off from the magnetic tape falls there, causing a so-called clogging phenomenon. Therefore, the shape a is currently the mainstream. Therefore, in order to satisfy both high density and abrasion resistance, a magnetic head with a metal material of 200 μm and an effective track width of 60 μm was adopted in the standard-1 VTR, following the shape of a above. Color flicker (crosstalk) was observed when recording and playing back color video signals. However, it has been found that this color flicker decreases as the metal is made smaller, as shown in FIG. 10, and becomes almost unnoticeable on the screen when the metal becomes smaller than 120 .mu.m. However, if the metal has a thickness of around 100 μm in such a shape, it cannot be put to practical use due to wear resistance. Therefore, it is conceivable to develop the magnetic head having the shape shown in Fig. 8(d) to create a magnetic head with a configuration in which both sides of a magnetic core having a desired head gap are reinforced with glass, as shown in Fig. 9. However, this method has drawbacks such as difficulty in achieving accuracy when the track width becomes as small as 60 μm, and difficulty in forming the necessary gap length by aligning the cores with each other. The above-mentioned color flicker is related to the size of the guard band on the magnetic tape, and the actual total thickness W is equal to 4/3 times the guard band G plus the effective track width T, that is, W.
It is known from experience that color flicker does not occur if 1=2G+T...1 is selected.

本発明は、以上の諸点に鑑みて、耐摩耗性及び高密度化
に適応した磁気へツドの製造方法を提供するもので、以
下その一実施例につき図面とともに説明する。
In view of the above points, the present invention provides a method for manufacturing a magnetic head that is suitable for wear resistance and high density, and one embodiment thereof will be described below with reference to the drawings.

フエライトウエハ一1上に、4条の第1条溝1a,Ib
,lc,Idを、隣接した各条溝の幅が実効トラツク幅
よりも大なる所定の間隔(上記1式を満たす値)、にな
るように研削する(第1図)。
Four first grooves 1a, Ib are formed on the ferrite wafer 11.
, lc, and Id are ground so that the width of each adjacent groove becomes a predetermined interval (a value that satisfies Equation 1 above) that is larger than the effective track width (FIG. 1).

この凹溝の各々に、後述するギヤツプ溶着用ガラスの軟
化点よりも高いガラス2を充填し、このガラスを充填し
たウエ・・一表面を鏡面研摩する(第2図)。この鏡面
研摩されたウエハ一(研摩済ウエ一・一という)を一組
準備する。一つの研摩済ウエハ一IA上であつてその隣
接した第1条溝の各肩部に、該第1条溝に沿つてかつこ
のウエハー上に前記実効トラツク幅Tに相当する間隔を
残して第2条溝Ie,If,Ig,Ih,Ii,Ijを
形成し、更に、前記両条溝に直交する方向に4条の薄膜
3a,3b,3c,3dを蒸着又はスパツター等で形成
する(第3図)。尚、この薄膜は、その厚さが所要のギ
ヤツプ長の1/2に規定され、かつ、将来ギャツプを形
成する面には付着しないようにされている。他方の研摩
済ウエハ一IBには、上記第1条溝に直交する方向に、
巻線溝Ik,ll及びガラス挿入溝Im,In,lOを
形成し、更に、同方向に将来へツドギヤツプを形成する
面を除く4条の表面上に、その厚さが所要のギャツプ長
の1/2に規定された薄膜3e,3f,3g,3hを蒸
着又はスパツター等で形成する(第4図)。斯様に処理
した一組のウエハ一を、前記ガラス挿入溝に軟化点が上
記した充填ガラス2の軟化点よりも低いガラス棒4を挿
入して、それぞれ衝合させる。
Each of these grooves is filled with glass 2 whose softening point is higher than that of the glass for gap welding described later, and one surface of the wafer filled with this glass is mirror-polished (FIG. 2). A set of mirror-polished wafers (referred to as polished wafers 1 and 1) is prepared. At each shoulder of adjacent first grooves on one polished wafer IA, a first groove is formed along the first groove leaving a gap corresponding to the effective track width T on the wafer. Two grooves Ie, If, Ig, Ih, Ii, Ij are formed, and four thin films 3a, 3b, 3c, 3d are formed by vapor deposition or sputtering in a direction perpendicular to the two grooves. Figure 3). The thickness of this thin film is specified to be 1/2 of the required gap length, and the film is designed not to adhere to the surface where a gap will be formed in the future. On the other polished wafer IB, in a direction perpendicular to the first groove,
Winding grooves Ik, ll and glass insertion grooves Im, In, IO are formed, and further, on the surfaces of the four strips excluding the surface on which a gap will be formed in the future in the same direction, the thickness is 1 of the required gap length. Thin films 3e, 3f, 3g, and 3h having a thickness of 1/2 are formed by vapor deposition, sputtering, etc. (FIG. 4). A pair of wafers 1 treated in this manner are brought into contact with each other by inserting a glass rod 4 whose softening point is lower than that of the filling glass 2 into the glass insertion groove.

その後、前記充填ガラスの軟化点より低い温度で前記ガ
ラス棒を溶融させる(第5図)。この溶融ガラスは、上
記第1条溝、前記薄膜が形成されていない各ウエハ一の
対向面間にそれぞれ浸透して、前記両ウエハ一を一体化
させる。次に、このプロツクをA − A’,B −
B’,C − C’.の面で切断し、切断したプロツク
の作動ギャツプ側の面を、第6図に示すように、ギャツ
プ深さdが所望の深さになるよう研摩する。更に、各第
1条溝の中心に沿つて、即ち第6図のD−D’,E−E
’,F−F’.及びG−G’に沿つて、スライシングし
て第T図に示した磁気ヘツドナツプを作成する。この磁
気へツドチツプは、耐摩耗性については全厚W2が作用
し、カラーフリツカ一に関与する高密度化については厚
さW1 が作用するので、耐摩耗性を向上させ、かつ、
カラーフリツカ一を抑制できるものである。尚、実効ト
ラツク幅は、第1条溝にガラスを充填した後で、この第
1条溝よりは遥かに浅い第2条溝を溝入れすることによ
つて形成されるので、その精度にたとえば第9図の形状
の磁気ヘツドに比して格段に出やすい方法と言える。
Thereafter, the glass rod is melted at a temperature lower than the softening point of the filled glass (FIG. 5). This molten glass permeates between the first groove and the opposing surfaces of each wafer on which the thin film is not formed, thereby integrating both of the wafers. Next, change this block to A - A', B -
B', C-C'. The surface of the cut block on the operating gap side is polished so that the gap depth d becomes the desired depth, as shown in FIG. Further, along the center of each first groove, that is, along the lines D-D' and E-E in FIG.
', F-F'. , and GG' to create a magnetic headnap as shown in FIG. In this magnetic hedock chip, the total thickness W2 acts on wear resistance, and the thickness W1 acts on densification that is involved in color flickering, so it improves wear resistance and
It is possible to suppress color flicker. The effective track width is determined by filling the first groove with glass and then grooving the second groove, which is much shallower than the first groove. This method can be said to be much easier to produce than the magnetic head having the shape shown in FIG.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、第1条溝を備えたフエライトウエ・・一で、
同図イは平面図、同図口は正面図である。 第2図は、前記第1条溝にガラスを充填したもので、同
図イは平面図、同図口は正面図である。第3図及び第4
図は、それぞれ衝合前の一組の研摩済ウエ・・一で、各
図イは平面図、各図口は正面図、各図ハは側面図である
。第5図は、一組のウエハ一を衝合したプロツクの斜視
図、第6図は、このプロックを切断したプロツクの斜視
図、第?図は、磁気へツドチツプを示し同図イはその平
面図、同図口はその斜視図、第8図A,b,c,d及び
第9図は、それぞれ従来の磁気へツドチツプの正面図、
第10図は、磁気コア一の全厚対クロストークレベルの
特性図である。主な図番の説明、1A,IB・・・・・
・フエライトウエ・・一、1a〜Id・・・・・・第1
条溝、2・・・・・・軟化点の高いガラス、Ie〜Ij
・・・・・・第2条溝、1k,11・・・・・−巻線溝
、Im,In,IO・−・・・・ガラス挿入溝、3a〜
3h・・・・・−薄膜、4・・・・・・軟化点の低いガ
ラス棒。
Figure 1 shows a ferrite wafer with a first groove.
Figure A is a plan view, and Figure A is a front view. FIG. 2 shows the first groove filled with glass, in which A is a plan view and the opening in the figure is a front view. Figures 3 and 4
Each figure shows a set of polished wafers before abutting. Each figure A is a plan view, each figure opening is a front view, and each figure C is a side view. FIG. 5 is a perspective view of a block in which a set of wafers are butted, and FIG. 6 is a perspective view of a block in which this block is cut. The figure shows a magnetic head chip; Figure A is a plan view thereof, Figure 8 is a perspective view thereof, and Figures 8A, b, c, d and 9 are front views of conventional magnetic head chips, respectively.
FIG. 10 is a characteristic diagram of the total thickness of the magnetic core versus the crosstalk level. Explanation of main drawing numbers, 1A, IB...
・Fueritowe...1, 1a~Id...1st
Groove, 2...Glass with high softening point, Ie~Ij
......Second groove, 1k, 11...-Winding groove, Im, In, IO...Glass insertion groove, 3a~
3h...-Thin film, 4...Glass rod with low softening point.

Claims (1)

【特許請求の範囲】[Claims] 1 フェライトウェハー上に実効トラック幅より大なる
所定の間隔を置いて複数の第1条溝を形成し、該第1溝
中に軟化点の高いガラスを溶融充填し、このガラスを充
填したウェハー表面を鏡面研摩し、一つの研摩済ウェハ
ー上であつてその隣接した第1条溝の各肩部に、該第1
条溝に沿つてかつこのウェハー上に前記実効トラック幅
に相当する間隔を残して第2条溝を形成し、他の一つの
研摩済ウェハー上に前記第1条溝に直交する方向に巻線
溝及びガラス挿入溝をそれぞれ形成し、これら一組のウ
ェハーの一方若しくは双方の表面にギャップ長規制用薄
膜を形成し、その後一組のウェハーを衝合せかつ前記挿
入溝に挿入した上記軟化点より低い軟化点のガラスを溶
融して前記両ウェハーを一体化する工程を備えた磁気ヘ
ッドの製造方法。
1 A plurality of first grooves are formed on a ferrite wafer at predetermined intervals larger than the effective track width, glass with a high softening point is melted and filled into the first grooves, and the wafer surface filled with this glass is is mirror-polished, and on each shoulder of the adjacent first groove on one polished wafer, the first groove is
A second groove is formed along the groove and on this wafer with a gap corresponding to the effective track width, and a wire is wound on another polished wafer in a direction perpendicular to the first groove. A groove and a glass insertion groove are respectively formed, a thin film for regulating the gap length is formed on one or both surfaces of a pair of wafers, and then the pair of wafers are abutted and inserted into the insertion groove. A method for manufacturing a magnetic head, comprising the step of melting glass having a low softening point to integrate the two wafers.
JP627476A 1976-01-19 1976-01-19 Manufacturing method of magnetic head Expired JPS5931772B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP627476A JPS5931772B2 (en) 1976-01-19 1976-01-19 Manufacturing method of magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP627476A JPS5931772B2 (en) 1976-01-19 1976-01-19 Manufacturing method of magnetic head

Publications (2)

Publication Number Publication Date
JPS5288321A JPS5288321A (en) 1977-07-23
JPS5931772B2 true JPS5931772B2 (en) 1984-08-04

Family

ID=11633821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP627476A Expired JPS5931772B2 (en) 1976-01-19 1976-01-19 Manufacturing method of magnetic head

Country Status (1)

Country Link
JP (1) JPS5931772B2 (en)

Also Published As

Publication number Publication date
JPS5288321A (en) 1977-07-23

Similar Documents

Publication Publication Date Title
JPS58175122A (en) Compound magnetic head and its production
US4899241A (en) Method of manufacturing a magnetic head having a thin film in a portion of its core
JPS63146202A (en) Magnetic head and its production
JPS6331851B2 (en)
JPS5931772B2 (en) Manufacturing method of magnetic head
JPS6089807A (en) Magnetic head
JPS6329325B2 (en)
JP2954784B2 (en) Magnetic head and method of manufacturing the same
JPS60202506A (en) Production of vtr magnetic head
JPH0833980B2 (en) Method of manufacturing magnetic head
JPH09219006A (en) Magnetic head, two channels magnetic head, and magnetic storage device using these heads
JP2525767B2 (en) Double azimuth head core chip manufacturing method
JPH0312805A (en) Magnetic head and its manufacture
JPS6238514A (en) Magnetic head
JPS62139110A (en) Manufacture of magnetic head
JPS61280009A (en) Magnetic head
JPH0580724B2 (en)
JPH0778851B2 (en) Method of manufacturing magnetic head
JPH07114707A (en) Multi-magnetic head
JPH0542727B2 (en)
JPS5971125A (en) Manufacture of magnetic head
JPS6222214A (en) Manufacture of composite magnetic head
JPS62236113A (en) Manufacture of magnetic head
JPS62192909A (en) Production of magnetic head
JPH0516083B2 (en)