JPS5929038U - Semiconductor substrate alignment equipment - Google Patents
Semiconductor substrate alignment equipmentInfo
- Publication number
- JPS5929038U JPS5929038U JP1982123770U JP12377082U JPS5929038U JP S5929038 U JPS5929038 U JP S5929038U JP 1982123770 U JP1982123770 U JP 1982123770U JP 12377082 U JP12377082 U JP 12377082U JP S5929038 U JPS5929038 U JP S5929038U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- base
- roller
- substrate alignment
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図は本考案に係る半導体基板の整列装置の一実施例を示
し、第１図は正面図、第２図は側面図、第３図は第１図
の■−■線断面図、第４図は要部の断面図である。
１・・・・・・基台、４・・・・・・検知スイッチ、７
・・・・・・蓋体、９・・・・・・モータ、１０・・・
・・・ローラ、１１・・・・・・受台。The figures show an embodiment of the semiconductor substrate alignment device according to the present invention, in which Fig. 1 is a front view, Fig. 2 is a side view, Fig. 3 is a cross-sectional view taken along the line ■-■ in Fig. 1, and Fig. 4. is a sectional view of the main part. 1...Base, 4...Detection switch, 7
...Lid, 9...Motor, 10...
...roller, 11...cradle.
Claims (1)
該蓋体に取付けられた回転ローラと、該ローラと対向す
る上記基台に移動可能に取付けられ上面が半導体基板の
円周と同形状に形成された滑面を有する受台と、上記ロ
ーラによって回転される全ての半導体基板の切欠部が該
ローラと対応した時に操作されローラの駆動源を遮断す
る検知スイッチとより構成して成る半導体基板の整列装
置。a base; a lid attached to the base so as to be openable and closable;
A rotary roller attached to the lid body, a pedestal movably attached to the base facing the roller and having a smooth surface whose upper surface is formed in the same shape as the circumference of the semiconductor substrate, and the roller A device for aligning semiconductor substrates comprising a detection switch that is operated to cut off a drive source for the rollers when the notches of all the semiconductor substrates being rotated correspond to the rollers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982123770U JPS5929038U (en) | 1982-08-17 | 1982-08-17 | Semiconductor substrate alignment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982123770U JPS5929038U (en) | 1982-08-17 | 1982-08-17 | Semiconductor substrate alignment equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5929038U true JPS5929038U (en) | 1984-02-23 |
| JPS629725Y2 JPS629725Y2 (en) | 1987-03-06 |
Family
ID=30282404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1982123770U Granted JPS5929038U (en) | 1982-08-17 | 1982-08-17 | Semiconductor substrate alignment equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5929038U (en) |
-
1982
- 1982-08-17 JP JP1982123770U patent/JPS5929038U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS629725Y2 (en) | 1987-03-06 |
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