JPS5926599Y2 - フォトマスク検査装置の自動焦点機構 - Google Patents

フォトマスク検査装置の自動焦点機構

Info

Publication number
JPS5926599Y2
JPS5926599Y2 JP6179379U JP6179379U JPS5926599Y2 JP S5926599 Y2 JPS5926599 Y2 JP S5926599Y2 JP 6179379 U JP6179379 U JP 6179379U JP 6179379 U JP6179379 U JP 6179379U JP S5926599 Y2 JPS5926599 Y2 JP S5926599Y2
Authority
JP
Japan
Prior art keywords
objective lens
photomask
inspected
air
air flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6179379U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55162944U (enExample
Inventor
賢一 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6179379U priority Critical patent/JPS5926599Y2/ja
Publication of JPS55162944U publication Critical patent/JPS55162944U/ja
Application granted granted Critical
Publication of JPS5926599Y2 publication Critical patent/JPS5926599Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP6179379U 1979-05-11 1979-05-11 フォトマスク検査装置の自動焦点機構 Expired JPS5926599Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6179379U JPS5926599Y2 (ja) 1979-05-11 1979-05-11 フォトマスク検査装置の自動焦点機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6179379U JPS5926599Y2 (ja) 1979-05-11 1979-05-11 フォトマスク検査装置の自動焦点機構

Publications (2)

Publication Number Publication Date
JPS55162944U JPS55162944U (enExample) 1980-11-22
JPS5926599Y2 true JPS5926599Y2 (ja) 1984-08-02

Family

ID=29295762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6179379U Expired JPS5926599Y2 (ja) 1979-05-11 1979-05-11 フォトマスク検査装置の自動焦点機構

Country Status (1)

Country Link
JP (1) JPS5926599Y2 (enExample)

Also Published As

Publication number Publication date
JPS55162944U (enExample) 1980-11-22

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