JPS55162944U - - Google Patents
Info
- Publication number
- JPS55162944U JPS55162944U JP6179379U JP6179379U JPS55162944U JP S55162944 U JPS55162944 U JP S55162944U JP 6179379 U JP6179379 U JP 6179379U JP 6179379 U JP6179379 U JP 6179379U JP S55162944 U JPS55162944 U JP S55162944U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6179379U JPS5926599Y2 (ja) | 1979-05-11 | 1979-05-11 | フォトマスク検査装置の自動焦点機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6179379U JPS5926599Y2 (ja) | 1979-05-11 | 1979-05-11 | フォトマスク検査装置の自動焦点機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55162944U true JPS55162944U (enExample) | 1980-11-22 |
| JPS5926599Y2 JPS5926599Y2 (ja) | 1984-08-02 |
Family
ID=29295762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6179379U Expired JPS5926599Y2 (ja) | 1979-05-11 | 1979-05-11 | フォトマスク検査装置の自動焦点機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5926599Y2 (enExample) |
-
1979
- 1979-05-11 JP JP6179379U patent/JPS5926599Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5926599Y2 (ja) | 1984-08-02 |