JPS5925973A - Multiply coated material and its manufacture - Google Patents

Abstract

PURPOSE:To manufacture a multiply coated material for a coated tool, etc. with superior wear and chipping resistances, by alternately coating the surface of a sintered hard WC alloy, TiC-base cermet or TiN-base cermet with many thin coating layers of SiC and TiN. CONSTITUTION:The surface of a sintered hard WC alloy, TiC-base cermet or TiN-base cermet is alternately coated with eight or more coating layers of SiC and TiN each having <=1mum thickness so as to make the total thickness 2- 15mum. The coating layers can be formed simply and effectively by alternately introducing a gaseous mixture contg. Ti and N and a gaseous mixture contg. Si and C in an intermittent manner in a chemical vapor deposition method.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a material coated with a hard substance, particularly to a shrine H having multiple coatings effective for wear resistance and chipping resistance, and a method for manufacturing the same.

Conventionally, WCC cemented carbide TIC-based cermets and TiN-based cermets have been coated with carbides or nitrides to improve their wear resistance. However, although it is said to be wear resistant, there are three kinds of wear: abrasive wear seen on the flank, wear caused by chemical reaction with the work material seen in parts of the crater, and mainly oxidation wear seen as boundary wear. It is known that carbides are effective for abrasive wear, while nitrides are effective for crater wear and boundary wear.

For this reason, conventionally, instead of coating with a single layer of carbide, nitride, etc., methods such as (1) coating with two layers of carbide on the inner layer and nitride on the outer layer, and (2) coating with solid solution carbonitride have been adopted. I've been exposed to it.

However, in the case of (■) above, wear progresses quickly on the flank, and the life expectancy is not extended as much as expected, and (■)
In this case, the defects in the properties of both carbides and nitrides tended to be exacerbated, and neither of them could be said to be an effective method for improving them.

It is an object of the present invention to improve the drawbacks of the above-mentioned prior art and to provide a novel coated tool with excellent wear resistance and chipping resistance.

The present invention provides a coating layer consisting of SiC and TiN on the surface of a WCC cemented carbide TiC base cermet or a TIN base cermet with a single layer thickness of 1 μm or less, preferably 0.
．． Si C, T to a total thickness of less than 5 μm and 2 to 15 μm
It is characterized in that iN is alternately coated in at least 6 layers, preferably in 20 or more layers.

The advantage of the present invention is that the thickness of the single layer is 1 μm or less, preferably less than 0.5 μm, so it covers the disadvantage of distortion caused by the difference in thermal expansion coefficient caused by coating with different materials. As a result, the strain between the layers of the coating material is evenly distributed, the stress concentration is reduced by IJ1, and the thermal shock resistance can be improved.

Furthermore, since each layer has a thickness of 1 μm or less and is coated in multiple layers, the characteristics of carbides and nitrides are always utilized, resulting in markedly improved crater wear resistance and flank wear resistance. Furthermore, since each layer is made of a single layer of SiC and TtN, the drawbacks of carbonitride can be avoided.

In addition, in the present invention, the order in which the coating layers are stacked in J3 is IJJ material, Si C, Ti N, Si IC, Ti N, -♂・
...but the base material, TiN, SiC, TiN
, Si C, etc. may be used in any order.

In the present invention, SiC film is used as a coating.
The reason for choosing it is that SiC has high thermal conductivity and high hardness, but
Cover 1')! Scientific reactions with l4 are particularly likely to occur in Fc bases. On the other hand, TiN has slightly poor thermal conductivity <r
This is because although the IllI is somewhat low, the imitological stability is high, and therefore both src and T+N work to complement the properties of phase 71.

The manufacturing method according to the present invention, particularly the method for forming a coating layer, uses an i compound gas containing T1 and N, which is conventionally used for CV I) coating of SiC, and S
By alternately and intermittently introducing gases containing l and C, it becomes possible to form multiple N films simply and effectively.

Furthermore, as is conventionally known, when chemical vapor deposition is used, the StC film formation temperature is approximately 1300'C, T.
The iN film formation temperature is as low as 970°0. shi1=katteS
When switching from IC coating to TiN coating, or conversely from TiN coating to SiC coating, it is necessary to change the coating temperature, and at this time, it is inevitable that abnormal growth of coating particles will occur, resulting in deterioration of the properties of the coating. What's the reason for it being covered?

On the contrary, the inventors of the present invention have found that when the gas is intermittently switched and introduced, the number of nucleation types 1-1 of precipitated particles from the gas phase increases, but the growth of 3-a degrees is slowed down, and based on this, This completes the present invention. Therefore, in the present invention, it is desirable to mix the gas intermittently,
As a result, even if the coating temperature of -r-iN is raised to the same temperature as that of StC, an excellent effect can be obtained in that fine particles can be obtained. In this case, it is of course possible to perform activated deposition by changing the electromagnetic field to ()℃ plasma state.
It is 11 shi.

In addition, in the present invention, the multiple coating layer is preferably at least 8 layers, preferably 20 layers or more; less than 8 layers cannot sufficiently exhibit the effect of the multiple coating described above. Further, the thickness of each single layer is preferably 1 μm or less, preferably 0.5 μm or less, in order to uniformly disperse strain between the covering layers. This is because if it exceeds 1 μn1, the fracture resistance deteriorates.

Example 1 A WC-6%CO cemented carbide was coated with sic, T;N films alternately each layer having a thickness of 0.1 μm+n and a film having a thickness of 6 μm on the gold side. This chip will be referred to as Assay A.

At the same time, as a comparative material, SiC" was added as a lower layer on the above cemented carbide.
The upper layer was coated with a film having a thickness of 46 μm by adding 3 μm of TiN to each layer. This chitsuzo is 81 (former B Dozuru. These two types of samples are cut with the following cutting thread 1'1, pounding 15, workpiece 30M3, cutting speed 200.../mouth 111] 1ffl ri 0.3nv/
rev cut 2m01 I did the nickel cutting process 1~.

Does the flank part of the comparative B chip wear out after 40 minutes? J
In contrast, the A depth according to the present invention (
J, showed good cutting performance even after cutting for 80 minutes.

Example 2 WC-43%-11 (>8%-1-aC-6%Co cemented carbide with l-1N, SiC coating, each layer 0.05 μm thick)
1871 m of coating was applied. Take sample C from this depth. At the same time, a comparative amount was added to the lower layer on the same cemented carbide.
iN, upper layer SiC 3μm, 5μm respectively 1 go 8
A coating having a film thickness of 18 μn1 was applied.

This depth is called Trial 11D.

Next, this 1-2f sample was cut under the following interrupted cutting conditions: cutting speed 220 m/+++in feed rate 0.4 mm/rev
Cutting test 1- was carried out at )b1a;Je with depth of cut of 1.5mm and workpiece depth of 30M3, 101111111m.

The D-depth of the trial month was damaged by 15 impacts, but the present invention will work! l! The il C chip did not break even after 270 1Φi shots.

As detailed above, the present invention includes J:, S; C.

A thin coating of 1iN (multiple waves) is applied alternately to a coating with high impact resistance.
-The second effect is that people (') can do so.

Claims (1)

[Claims] 1. WCC cemented carbide TiC-based cermet or Ti
On the surface of the N cloudy cermet, there is a coating layer made of SiC and TiN with a single layer thickness of 1 μm or less, and a total of 31
1. A multi-coated material, characterized in that it is formed by alternately coating at least 8 or more layers to a thickness of 2 to 15 μm. 2. The multi-coated material according to claim 1, wherein the thickness of the single layer is 0.5 μm or less. 3. Multiplexed wave %'j1 according to claim 1 or 2, characterized in that the coating layer is 20 or more layers.
material. 4. A mixed gas containing 1-i and N and 3i and C
A method for producing a multi-wave m+A M'31, which is characterized by alternately and intermittently introducing a mixed gas containing .