JPS6146436B2 - - Google Patents
Info
- Publication number
- JPS6146436B2 JPS6146436B2 JP57098280A JP9828082A JPS6146436B2 JP S6146436 B2 JPS6146436 B2 JP S6146436B2 JP 57098280 A JP57098280 A JP 57098280A JP 9828082 A JP9828082 A JP 9828082A JP S6146436 B2 JPS6146436 B2 JP S6146436B2
- Authority
- JP
- Japan
- Prior art keywords
- tic
- coating
- layers
- tib
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 24
- 239000010410 layer Substances 0.000 claims description 21
- 238000000576 coating method Methods 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 14
- 239000011195 cermet Substances 0.000 claims description 7
- 239000011247 coating layer Substances 0.000 claims description 6
- 239000002356 single layer Substances 0.000 claims description 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 4
- 238000005229 chemical vapour deposition Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 claims 2
- 229910033181 TiB2 Inorganic materials 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 1
- 238000005520 cutting process Methods 0.000 description 9
- 239000010408 film Substances 0.000 description 9
- 239000007789 gas Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 5
- 238000005299 abrasion Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 208000027390 severe congenital neutropenia 3 Diseases 0.000 description 2
- 239000006104 solid solution Substances 0.000 description 2
- 101100008046 Caenorhabditis elegans cut-2 gene Proteins 0.000 description 1
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- -1 and Conventionally Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
- Chemical Vapour Deposition (AREA)
Description
【発明の詳細な説明】
本発明は硬質物質を被覆した材料、特に耐摩耗
性、耐欠損性に有効な多重被覆の施された材料お
よびその製造法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a material coated with a hard substance, particularly a multi-coated material effective in wear resistance and chipping resistance, and a method for producing the same.
WC基超硬合金、TiC基サーメツト、および
TiN基サーメツトに硬質物質を被覆して耐摩耗性
を向上させることが従来より行なわれてきた。 WC-based cemented carbide, TiC-based cermet, and
Conventionally, TiN-based cermets have been coated with hard substances to improve their wear resistance.
しかし耐摩耗性といつても、摩耗は、フランク
部にみられるアブレツシブ摩耗、クレーター部に
みられる被削材との化学反応に基づく摩耗、およ
び境界摩耗でみられる主として酸化摩耗の３つの
摩耗に大別され、アブレツシブな摩耗には硬さの
高いもの、クレーター摩耗には化学的安定性が大
きいもの、境界摩耗には熱伝導性の高いものなど
が有効であることが知られている。 However, when talking about wear resistance, wear is divided into three types: abrasive wear seen in the flank part, wear caused by chemical reaction with the work material seen in the crater part, and oxidation wear seen mainly in boundary wear. It is known that materials with high hardness are effective for abrasive wear, materials with high chemical stability are effective for crater wear, and materials with high thermal conductivity are effective for boundary wear.
このため従来から、炭化物、窒化物等の単一層
を被覆するかわりに、
内層と外層の２層、あるいは内層、中間層、
外層の３層にそれぞれ異なる性質をもつた硬質
物質を被覆する方法。 For this reason, conventionally, instead of coating with a single layer of carbide, nitride, etc., two layers, an inner layer and an outer layer, or an inner layer, an intermediate layer,
A method in which the three outer layers are coated with hard materials each having different properties.
異なつた性質を有する２〜３種の硬質物質の
固溶物質、例えば炭窒化物を被覆する方法。 A method of coating solid solution substances of two or three hard substances having different properties, such as carbonitrides.
等が耐摩耗性の改善方法として取られてきた。etc. have been taken as methods to improve wear resistance.
しかし、上記の場合には当然のことながら、
例えば、外層はフランク部での耐摩耗性は良好だ
がクレーター部の耐摩耗性が劣化する、等の現象
が生じるため、飛躍的な耐摩耗性向上は望めな
い。また、熱膨張率の異なる異種物質をかなりの
厚みに被覆するために、熱の変動に弱く切削時に
欠損しやすい、という欠点はまぬがれない。 However, in the above case, of course,
For example, the outer layer has good abrasion resistance in the flank portion, but deteriorates in abrasion resistance in the crater portion, so a dramatic improvement in abrasion resistance cannot be expected. In addition, since it is coated with a considerable thickness of different materials with different coefficients of thermal expansion, it is unavoidable that it is susceptible to thermal fluctuations and is prone to breakage during cutting.
また上記の場合には、一般に異種硬質物質の
固溶体は、硬質物質のそれぞれの特長が助長され
るよりはむしろ欠点が助長される傾向がある、と
いう問題点がある。 Furthermore, in the above case, there is a problem in that solid solutions of different types of hard materials generally tend to enhance the disadvantages of the hard materials rather than promoting their respective characteristics.
従つて上記またはの方法は、共に有効な改
善方法であるとはいえなかつた。 Therefore, neither of the above methods can be said to be an effective improvement method.
本発明は上記従来技術の欠点を改良し、耐摩
耗、耐欠損性に優れた新規なコーテイング工具を
提供することを目的とする。 It is an object of the present invention to improve the drawbacks of the above-mentioned prior art and to provide a novel coated tool with excellent wear resistance and chipping resistance.
本発明はWC基超硬合金、TiC基サーメツト、
またはTiN基サーメツトの表面に、TiCおよび
TiBよりなる被覆層が、単層の厚さ１μｍ以下、
好ましくは0.5μｍ未満で合計２〜15μｍの厚さ
にTiCTiB2を交互に少くとも６層以上、望ましく
は20層以上多重被覆したことを特徴とするもので
ある。 The present invention relates to WC-based cemented carbide, TiC-based cermet,
Or TiC and TiC on the surface of TiN based cermet.
The coating layer made of TiB has a single layer thickness of 1 μm or less,
It is characterized in that TiCTiB 2 is alternately coated in multiple layers of at least 6 layers, preferably 20 layers or more, preferably less than 0.5 μm, with a total thickness of 2 to 15 μm.
本発明による材料は、単層の厚さが１μｍ以
下、好ましくは0.5μｍ未満であるので、熱膨張
係数の大きいTiCの欠点をカバーすることが可能
となり、究極的に被覆材料層間の歪が均一に分散
して応力集中を排除し、耐熱衝撃性を高めること
ができる。また、TiB2は硬さが高くかつ熱伝導
性に優れるため、、耐フランク摩耗性のみならず
耐境界摩耗性をも著しく改善するが、一方TiB2
は鉄系合金との親和性が大きいため、鋼，鋳鉄等
を切削した場合クレーター摩耗の進行が早い傾向
にある。しかし本発明においては、薄層を多重被
覆しているので、この欠点は回避できる。 Since the material according to the present invention has a single layer thickness of 1 μm or less, preferably less than 0.5 μm, it is possible to overcome the drawback of TiC, which has a large coefficient of thermal expansion, and ultimately the strain between the coating material layers is uniform. This can eliminate stress concentration and improve thermal shock resistance. In addition, TiB 2 has high hardness and excellent thermal conductivity, so it significantly improves not only flank wear resistance but also notch wear resistance.
Because it has a high affinity with iron-based alloys, crater wear tends to progress quickly when cutting steel, cast iron, etc. However, in the present invention, this drawback can be avoided since multiple thin layers are applied.
また、本発明において被覆層を重ねる順序は母
材，TiC，TiB2，TiC，TiB2，……でもよく、母
材，TiB2，TiC，TiB2，TiC……の順序の何れで
も良い。 Further, in the present invention, the order in which the coating layers are stacked may be base material, TiC, TiB 2 , TiC, TiB 2 , . . . , or base material, TiB 2 , TiC, TiB 2 , TiC .
本発明による製造方法、特に被覆層の形成方法
は、化学気相蒸着法において従来からTiCのCVD
被覆に用いられているTi，ＨおよびＣを含んだ
ガス、例えばTiCI4，ＨおよびCHの混合ガスと
Ti，ＨおよびＢを含んだガス、例えばTiCI4，Ｈ
およびBCI3の混合ガスを交互に間欠的に導入す
ることで簡潔かつ有効に多重被覆膜形成が可能と
なる。 The manufacturing method according to the present invention, particularly the method for forming a coating layer, is based on TiC CVD, which has been conventionally used in chemical vapor deposition.
A gas containing Ti, H and C used for coating, such as a mixed gas of TiCI 4 , H and CH.
Gases containing Ti, H and B, such as TiCI 4 , H
By alternately and intermittently introducing a mixed gas of BCI 3 and BCI 3 , it becomes possible to form multiple coatings simply and effectively.
さらに従来より知られているように、化学蒸着
法を用いる場合、TiC被膜形成温度は約1025℃、
TiB2被膜形成温度は920℃と低い。したがつて
TiC被覆からTiB2被覆へ、あるいは逆にTiB2被覆
からTiC被覆へと切替えるときに被覆温度を変更
する必要があり、このときに被覆粒子の異状成長
が生じることが避けられず、被膜の性質が劣化す
る原因となつている。 Furthermore, as is conventionally known, when using chemical vapor deposition, the TiC film formation temperature is approximately 1025℃,
The TiB 2 film formation temperature is as low as 920℃. Therefore
When switching from TiC coating to TiB 2 coating, or conversely from TiB 2 coating to TiC coating, it is necessary to change the coating temperature, and at this time, it is inevitable that abnormal growth of coating particles will occur, which may affect the properties of the coating. is the cause of deterioration.
ところが本願発明者らは、ガスを間欠的に混入
した場合には、気相からの析出粒子の核生成頻度
は多くなるが成長速度は遅くなることを見出し、
これに基づいて本発明を完成した。従つて、本発
明においては、ガスを間欠的に混入させることが
望ましく、これによりTiB2を被覆する温度をTiC
と同一の温度に選んでも、微細な粒子を得ること
ができるという優れた効果が得られる。この場合
電磁場をかけてプラズマ状態として活性化蒸着を
行なうことももちろん可能である。 However, the inventors of the present invention found that when gas is intermittently mixed, the frequency of nucleation of precipitated particles from the gas phase increases, but the growth rate slows down.
Based on this, the present invention was completed. Therefore, in the present invention, it is desirable to mix the gas intermittently, so that the temperature at which the TiB 2 is coated can be lowered to the TiC
Even if the same temperature is selected, the excellent effect of obtaining fine particles can be obtained. In this case, it is of course possible to perform activated deposition in a plasma state by applying an electromagnetic field.
また、本発明において、多重被覆層は少なくと
も８層以上、望ましくは20層以上が良い。８層未
満では前述した多重被覆の効果が十分発揮できな
い。また各単層の厚みは、被覆材料層間の歪を均
一に分散させるために、１μｍ以下少くとも0.5
μｍ以下が良い。これは、１μｍを越えると耐欠
損性が劣化するためである。 Further, in the present invention, the number of multiple coating layers is at least 8 layers, preferably 20 layers or more. If there are less than 8 layers, the effect of the multiple coating described above cannot be sufficiently exhibited. In addition, the thickness of each single layer should be at least 0.5 μm or less in order to uniformly distribute the strain between the coating material layers.
Less than μm is better. This is because if the thickness exceeds 1 μm, the fracture resistance deteriorates.
実施例 １
WC−６％Co超硬合金上にTiC，TiB2被膜を交
互に各層0.1μｍ，合計６μｍの被膜を被覆し
た。このチツプを試料Λとする。Example 1 WC-6%Co cemented carbide was coated with TiC and TiB 2 films alternately, each layer having a thickness of 0.1 μm, and a total film thickness of 6 μm. Let this chip be the sample Λ.
同時に比較材として、上記超硬合金上に下層に
TiC，上層にTiB2をそれぞれ３μｍずつ合計６μ
ｍの膜厚を有する被膜を被覆した。このチツプを
試料Ｂとする。これら２種の試料を以下の切削条
件、即ち、
被削材 SCN3
切削速度 200ｍ／min
送 り 0.3mm／rev
切り込み ２mm
にて切削テストを行なつた。比較品のＢチツプは
10分で境界部の摩耗が進行し寿命に至つたのに対
し、本発明によるＡチツプは35分間の切削でも良
好な切削性能を示した。 At the same time, as a comparison material, a lower layer was added on top of the above cemented carbide.
TiC, TiB 2 on top layer, 3μm each, total 6μ
A film having a film thickness of m was applied. This chip is designated as sample B. Cutting tests were conducted on these two types of samples under the following cutting conditions: work material SCN3, cutting speed 200 m/min, feed 0.3 mm/rev, and depth of cut 2 mm. The comparison product B chip is
In contrast, the A chip according to the present invention showed good cutting performance even after 35 minutes of cutting, whereas the wear of the boundary progressed and reached the end of its life in 10 minutes.
実施例 ２
WC−８％TiC−８％TaC−６％Co超硬合金上
にTiB2，TiC被膜を各層0.05μｍ，合計８μｍの
被膜を被覆した。このチツプを試料Ｃとする。同
時に比較材として同じ超硬合金上に下層に
TiB2，上層にTiCをそれぞれ３μｍ５μｍ，合計
８μｍの膜厚を有する被膜を被覆した。このチツ
プを試料Ｄとする。Example 2 WC-8%TiC-8%TaC-6%Co cemented carbide was coated with TiB 2 and TiC films each having a thickness of 0.05 μm and a total thickness of 8 μm. This chip is designated as sample C. At the same time, the lower layer was placed on the same cemented carbide as a comparative material.
TiB 2 and TiC were coated on the upper layer with a film having a thickness of 3 μm and 5 μm, respectively, and a total film thickness of 8 μm. This chip is designated as sample D.
次にこれら２種の試料を以下の断続切削条件、
即ち
切削速度 200ｍ／min
送 り 0.4mm／rev
切り込み 1.5mm
被削材 SCN3
10mm幅の溝付き
にて切削テストを行なつた。比較材のＤチツプは
25回の衝撃で欠損したが、本発明のＣは400回の
衝撃でも欠損に至らなかつた。 Next, these two types of samples were cut under the following interrupted cutting conditions.
That is, cutting speed: 200 m/min Feed: 0.4 mm/rev Depth of cut: 1.5 mm Work material: SCN3 A cutting test was conducted with a groove of 10 mm width. The comparison material D chip is
Although it broke after 25 impacts, C of the present invention did not break even after 400 impacts.
以上詳述した如く、本発明によれば、TiC，
TiB2の薄い被膜を交互に多重被覆することによ
り、耐摩耗性、耐衝撃性に富む被覆超硬合金を得
ることができるのでその工業上の効果は大であ
る。 As detailed above, according to the present invention, TiC,
By alternately applying multiple thin films of TiB 2 , a coated cemented carbide with high wear resistance and impact resistance can be obtained, which has great industrial effects.
Claims (1)
TiN基サーメツトの表面に、TiCおよびTiB2より
なる被覆層が、単層の厚さ１μｍ以下であつて、
合計２〜15μｍの厚さに交互に少くとも８層以上
多重被覆されてなることを特徴とする多重被覆材
料。 ２ 上記単層の厚さが0.5μｍ以下であることを
特徴とする特許請求の範囲第１項記載の多重被覆
材料。 ３ 上記被覆層が20層以上であることを特徴とす
る特許請求の範囲第１項または第２項記載の多重
被覆材料。 ４ WC基超硬合金、TiC基サーメツト、または
TiN基サーメツトを基体として装入してある炉内
に、Ti，ＨおよびＣを含んだガスとTi，Ｈおよ
びＢを含んだガスを、交互に間欠的に導入し、化
学蒸着法にてTiCとTiB2を交互にかつ多層被覆す
ることを特徴とする多重被覆材料の製造法。[Claims] 1 WC-based cemented carbide, TiC-based cermet, or
A coating layer made of TiC and TiB 2 is provided on the surface of the TiN-based cermet with a single layer thickness of 1 μm or less,
A multi-coated material comprising at least eight or more layers alternately coated to a total thickness of 2 to 15 μm. 2. The multi-coated material according to claim 1, wherein the thickness of the single layer is 0.5 μm or less. 3. The multi-coated material according to claim 1 or 2, characterized in that the number of coating layers is 20 or more. 4 WC-based cemented carbide, TiC-based cermet, or
A gas containing Ti, H, and C and a gas containing Ti, H, and B are alternately and intermittently introduced into a furnace containing TiN-based cermet as a substrate, and TiC is produced by chemical vapor deposition. 1. A method for producing a multi-coated material, characterized by alternately coating TiB2 and TiB2 in multiple layers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9828082A JPS58217479A (en) | 1982-06-08 | 1982-06-08 | Multiple coating material and manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9828082A JPS58217479A (en) | 1982-06-08 | 1982-06-08 | Multiple coating material and manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58217479A JPS58217479A (en) | 1983-12-17 |
| JPS6146436B2 true JPS6146436B2 (en) | 1986-10-14 |
Family
ID=14215515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9828082A Granted JPS58217479A (en) | 1982-06-08 | 1982-06-08 | Multiple coating material and manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58217479A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2308133B (en) * | 1995-12-13 | 2000-06-21 | Kennametal Inc | Cutting tool for machining titanium and titanium alloys |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52105396A (en) * | 1976-02-28 | 1977-09-03 | Toshiba Tungaloy Co Ltd | Wear proof damage proof multiilayer coating material |
| JPS558485A (en) * | 1978-07-05 | 1980-01-22 | Sumitomo Electric Ind Ltd | Production of coated super hard metal member |
-
1982
- 1982-06-08 JP JP9828082A patent/JPS58217479A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52105396A (en) * | 1976-02-28 | 1977-09-03 | Toshiba Tungaloy Co Ltd | Wear proof damage proof multiilayer coating material |
| JPS558485A (en) * | 1978-07-05 | 1980-01-22 | Sumitomo Electric Ind Ltd | Production of coated super hard metal member |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58217479A (en) | 1983-12-17 |
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