JPS5925883Y2 - Dry plating equipment - Google Patents

Description

[Detailed explanation of the idea] The present invention relates to an improvement of a dry plating apparatus.

The most common dry plating apparatus using the conventional vacuum evaporation method is explained with reference to Fig. 1, where a is a bell-shaped vacuum tube made of glass or metal, b is a pedestal, and C is the above-mentioned vacuum tube. a seal gasket interposed between a pedestal attachment part a1 provided at the edge of the vacuum cylinder a and the pedestal; e
is a filament whose middle part is bent into a packet shape and both ends are attached to each of the electrode rods d, and f is the same filament e.
g is the sample stand placed on the pedestal, h is the material to be plated placed on the sample stand g,
i is a power supply, j is a pipe that passes through the pedestal and communicates the inside of the vacuum tube a with a vacuum source (not shown), and the air in the vacuum tube a is discharged through the pipe j to connect the vacuum tube to the vacuum tube. After creating a vacuum of about 10-4 to 10" mmHg in the interior of a, which is sufficient to evaporate the evaporation metal f, the filament e is heated via the electrode rods d and d of the power source i, and the evaporation metal f is evaporated. Te(f
1), by attaching it to the material to be plated,
A plating film f2 is formed.

In the dry plating apparatus, the material to be plated is put into the vacuum tube a and the plating film f2 is formed on its surface. When forming film f2, it was necessary to cut out a part of the large material to be plated to a size that would fit into the vacuum tube a, and to form the vacuum tube a to a size that could accommodate the large material to be plated. However, when forming a plating film on the convex part 10a of a large product (10: material to be plated) as shown in Fig. 2, the convex part 10a of the material to be plated may be too close to the vapor deposition source, causing plating vapor deposition. There was a problem that the particles became coarse and the plating performance deteriorated.

Furthermore, when a plating film is formed in the recess 10b of the material to be plated as shown in FIG. 3, the recess 10 of the material to be plated is too far from the proper deposition position, resulting in a longer deposition time. .

This proposal deals with the above-mentioned problems by attaching the first vacuum cylinder to the second vacuum cylinder so that it can move up and down, and interposing a sealing device between each vacuum cylinder, so that the first vacuum cylinder can move up and down. Relating to a dry plating apparatus characterized in that a pedestal is attached to the other end of the tube via a sealing device, and a sealing device is attached to the other end of the second vacuum tube to close the gap with the material to be plated. The purpose of this is to remove large products that have been considered defective due to part of the plating film on the plated material peeling off, and to remove parts that need to be cut out or to make the vacuum tube larger. An object of the present invention is to provide an improved dry plating apparatus that can be repaired under deposition conditions.

In the dry plating apparatus of the present invention, the first vacuum tube is attached to the second vacuum tube so as to be movable up and down, and a sealing device is interposed between each of the vacuum tubes, so that the first vacuum tube A pedestal is attached to the other end of the second vacuum cylinder via a sealing device, and a sealing device is attached to the other end of the second vacuum tube to close the gap between the plated material and the plated material. When repairing a peeled plating film, the first vacuum tube is moved up and down to adjust the deposition metal to the optimum deposition position relative to the convex portion or concave portion.

Next, after the space between the second vacuum cylinder and the material to be plated is closed airtight, a plating film is formed on the peeled part to repair the peeled part.

Therefore, a large product that is considered defective due to part of the plating film peeling off can be repaired at the optimal deposition position without the need to cut out part of the product or enlarge the vacuum tube.

Furthermore, the dry plating apparatus of the present invention is configured as described above, and the vacuum tube can be made portable, so that it can be applied to production sites.

Furthermore, the conventional bell-shaped vacuum tube can be made into a cylindrical shape, which is easy to manufacture, and from this point of view as well, manufacturing costs can be significantly reduced.

Next, the dry plating apparatus of the present invention will be explained with reference to an embodiment shown in FIG.
2. A second vacuum tube having a similar structure, 1a is a pedestal attachment part provided at one end edge of the first vacuum tube 1, and 1b is a pedestal attachment part provided on one side of the first vacuum tube 1 other than the pedestal attachment part 1a. Opening provided, 1
C is the first vacuum tube part around the opening 1b, and 2a is a second vacuum that is screwed into the threaded part 1d of the first vacuum tube 1 and supports the first vacuum tube 1 so as to be movable up and down. The pedestal part of the cylinder 2, 2b is an opening provided at one end of the second vacuum cylinder 2, 2C is a second vacuum cylinder part around the opening 2b, 3 is a pedestal, and 4a is the pedestal 3 and the pedestal. A seal gasket 4b is installed between the mounting portion 1a and the first vacuum cylinder portion 1C, and a seal gasket 5°5 penetrates the pedestal 3 and connects the vacuum cylinder 1.
An electrode rod 6 protruding from the inside is bent in the middle into a basket shape, and both ends are connected to ``a filament attached to each of the electrode rods 5'', 7 a metal for vapor deposition supported by the filament 6, 8 a power source, 9 a pipe 10 that penetrates the pedestal 3 and communicates the inside of the first vacuum cylinder 1 with a vacuum source (not shown);
10 is a large material to be plated, and 10a is a convex portion to be plated.

Note that the reference numeral 11 in the figure indicates that the surface of the large-sized product 10 is uneven and that the first and second vacuum tubes 1 cannot be separated by the seal packing 4C alone.
, 2, if sufficient vacuum cannot be obtained within the large product 10.
This is a packing material such as clay that is filled on the outside of the joint.

Next, the operation of the dry plating apparatus will be explained.

Convex portions 1 of the plating film formed on the surface of the large product 10
When repairing the plating film that has peeled off at 0 a, the first vacuum cylinder 1 is moved up and down to adjust the deposition metal 7 to be at the optimum deposition position relative to the convex portion 10 a.

Next, after closing the space between the second vacuum cylinder portion 2C and the material to be plated 10 airtightly, the air in the first and second vacuum cylinders 1 and 2 is exhausted through the piping 9, and the Second vacuum tube 1, 2
By creating a predetermined degree of vacuum inside, then heating the filament 6 via the power supply 8 electrode rods 5, 5, evaporating the evaporation metal 7 (see 7a), and depositing it on the material to be plated 10. , a plating film 7b is formed.

Note that when the material to be plated 10 is cylindrical or corrugated, the second vacuum tube portion 2C and the seal packing 4C around the opening 2b are formed in the same shape to maintain airtightness.

Note that the first and second vacuum cylinders 1 and 2 can be replaced with vacuum cylinders of other shapes that match the shape of the material to be plated 10.

Next, the dry plating apparatus of the present invention will be explained with reference to another embodiment shown in the third example.The apparatus of this embodiment is applied to the ion plating method, which is a type of dry plating method, and the pedestal 3 is connected to the anode side pedestal 3a and the cathode side pedestal 3a. The plating metal piece 6 is attached to the cathode side pedestal 3b, and the anode side pedestal 3a is provided with an argon gas injection hole 13 communicating with the argon gas injection tube 12. The structure is similar to that of the embodiment shown in FIG. 2 above.

Next, the operation of the dry plating apparatus will be explained.

When repairing the plating film formed on the surface of the material to be plated 10 that has peeled off at the recess 10b, the first vacuum tube 1 is moved up and down so that the metal plate for plating is at the optimum deposition position. Adjust.

Next, after closing the space between the second vacuum cylinder portion 2C and the material to be plated 10 airtightly, the air in the first and second vacuum cylinders 1 and 2 is exhausted through the piping 9, and the vacuum cylinder 1 is removed. . Argon gas 1
4 is made into positive ions e+ (see 14a) and collided with the metal piece 6 for plating, such as gold Au.
An optimal plating film 7b is formed by scattering (see 7a) and depositing it on the material to be plated 10.

[Brief explanation of the drawings] Figure 1 is a vertical side view showing a conventional dry plating equipment,
The figure is a longitudinal sectional view showing one embodiment of the dry plating apparatus according to the present invention, and FIG. 3 is a longitudinal sectional side view showing another embodiment of the dry plating apparatus according to the present invention. DESCRIPTION OF SYMBOLS 1...First vacuum tube, 2...Second vacuum tube, 1a...Pedestal attachment part, 2a...
Pedestal part, lb, 2b...Opening, 3...
・Pedestal, IC, 2C...First and second vacuum cylinder parts around openings lb and 2b, 4a, 4b, 4
C... Seal packing, 10... Material to be plated, 10 a... Convex portion of material to be plated, 1
0 b... Concavity in the material to be plated.

Claims (1)

[Scope of utility model registration request] The first vacuum tube is attached to the second vacuum tube so as to be movable up and down, and a sealing device is interposed between each of the vacuum tubes, and the other end of the first vacuum tube is attached to the pedestal via the sealing device. What is claimed is: 1. A dry plating apparatus characterized in that a sealing device is attached to the other end of the second vacuum cylinder to close a gap between the second vacuum cylinder and the material to be plated.