JPS5924488A - 磁気バブル検出器の製造方法 - Google Patents
磁気バブル検出器の製造方法Info
- Publication number
- JPS5924488A JPS5924488A JP57132610A JP13261082A JPS5924488A JP S5924488 A JPS5924488 A JP S5924488A JP 57132610 A JP57132610 A JP 57132610A JP 13261082 A JP13261082 A JP 13261082A JP S5924488 A JPS5924488 A JP S5924488A
- Authority
- JP
- Japan
- Prior art keywords
- detector
- thin film
- insulating layer
- magnetic
- bubble
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 239000010409 thin film Substances 0.000 claims abstract description 35
- 238000000034 method Methods 0.000 claims abstract description 25
- 239000004020 conductor Substances 0.000 claims abstract description 18
- 238000001514 detection method Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 abstract description 12
- 238000005530 etching Methods 0.000 abstract description 9
- 229910000889 permalloy Inorganic materials 0.000 abstract description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 6
- 238000001020 plasma etching Methods 0.000 abstract description 5
- 238000010884 ion-beam technique Methods 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 4
- 229910052814 silicon oxide Inorganic materials 0.000 abstract description 4
- 230000020169 heat generation Effects 0.000 abstract description 3
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 abstract description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 239000010931 gold Substances 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000002223 garnet Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 210000004379 membrane Anatomy 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 241000283690 Bos taurus Species 0.000 description 1
- 241000282994 Cervidae Species 0.000 description 1
- 241000237502 Ostreidae Species 0.000 description 1
- 239000008476 aike Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 235000020636 oyster Nutrition 0.000 description 1
- 210000004224 pleura Anatomy 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/14—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57132610A JPS5924488A (ja) | 1982-07-29 | 1982-07-29 | 磁気バブル検出器の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57132610A JPS5924488A (ja) | 1982-07-29 | 1982-07-29 | 磁気バブル検出器の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5924488A true JPS5924488A (ja) | 1984-02-08 |
| JPH0456392B2 JPH0456392B2 (cs) | 1992-09-08 |
Family
ID=15085350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57132610A Granted JPS5924488A (ja) | 1982-07-29 | 1982-07-29 | 磁気バブル検出器の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5924488A (cs) |
-
1982
- 1982-07-29 JP JP57132610A patent/JPS5924488A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0456392B2 (cs) | 1992-09-08 |
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