JPS5924234A - 湿度センサ−及びその製造方法 - Google Patents

湿度センサ−及びその製造方法

Info

Publication number
JPS5924234A
JPS5924234A JP13431082A JP13431082A JPS5924234A JP S5924234 A JPS5924234 A JP S5924234A JP 13431082 A JP13431082 A JP 13431082A JP 13431082 A JP13431082 A JP 13431082A JP S5924234 A JPS5924234 A JP S5924234A
Authority
JP
Japan
Prior art keywords
humidity sensor
thin film
plasma
film
polymer thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13431082A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6218856B2 (enrdf_load_stackoverflow
Inventor
Shotaro Oka
正太郎 岡
Osamu Tawara
修 田原
Junya Kobayashi
潤也 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP13431082A priority Critical patent/JPS5924234A/ja
Priority to US06/516,959 priority patent/US4562725A/en
Priority to EP83304392A priority patent/EP0100661B1/en
Priority to DE8383304392T priority patent/DE3375829D1/de
Publication of JPS5924234A publication Critical patent/JPS5924234A/ja
Publication of JPS6218856B2 publication Critical patent/JPS6218856B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP13431082A 1982-07-31 1982-07-31 湿度センサ−及びその製造方法 Granted JPS5924234A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP13431082A JPS5924234A (ja) 1982-07-31 1982-07-31 湿度センサ−及びその製造方法
US06/516,959 US4562725A (en) 1982-07-31 1983-07-25 Moisture sensor and a process for the production thereof
EP83304392A EP0100661B1 (en) 1982-07-31 1983-07-29 Moisture sensor and a process for the production thereof
DE8383304392T DE3375829D1 (en) 1982-07-31 1983-07-29 Moisture sensor and a process for the production thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13431082A JPS5924234A (ja) 1982-07-31 1982-07-31 湿度センサ−及びその製造方法

Publications (2)

Publication Number Publication Date
JPS5924234A true JPS5924234A (ja) 1984-02-07
JPS6218856B2 JPS6218856B2 (enrdf_load_stackoverflow) 1987-04-24

Family

ID=15125301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13431082A Granted JPS5924234A (ja) 1982-07-31 1982-07-31 湿度センサ−及びその製造方法

Country Status (1)

Country Link
JP (1) JPS5924234A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61286802A (ja) * 1985-06-13 1986-12-17 Tokai Rika Co Ltd 防曇鏡
JPS61290351A (ja) * 1985-06-18 1986-12-20 Nok Corp 高分子薄膜感湿素子
JPS6216455U (enrdf_load_stackoverflow) * 1985-07-12 1987-01-31
JPS63137491A (ja) * 1986-11-29 1988-06-09 Shimadzu Corp 圧電素子型センサ
US5122237A (en) * 1990-07-27 1992-06-16 Korea Institute Of Science And Technology High molecular humidity sensor and manufacturing method thereof by electrochemical method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61286802A (ja) * 1985-06-13 1986-12-17 Tokai Rika Co Ltd 防曇鏡
JPS61290351A (ja) * 1985-06-18 1986-12-20 Nok Corp 高分子薄膜感湿素子
JPS6216455U (enrdf_load_stackoverflow) * 1985-07-12 1987-01-31
JPS63137491A (ja) * 1986-11-29 1988-06-09 Shimadzu Corp 圧電素子型センサ
US5122237A (en) * 1990-07-27 1992-06-16 Korea Institute Of Science And Technology High molecular humidity sensor and manufacturing method thereof by electrochemical method

Also Published As

Publication number Publication date
JPS6218856B2 (enrdf_load_stackoverflow) 1987-04-24

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