JPS59227130A - 電子ビ−ムアニ−ル装置 - Google Patents

電子ビ−ムアニ−ル装置

Info

Publication number
JPS59227130A
JPS59227130A JP58100823A JP10082383A JPS59227130A JP S59227130 A JPS59227130 A JP S59227130A JP 58100823 A JP58100823 A JP 58100823A JP 10082383 A JP10082383 A JP 10082383A JP S59227130 A JPS59227130 A JP S59227130A
Authority
JP
Japan
Prior art keywords
sample
electron beam
light
annealing
wavelength component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58100823A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0456454B2 (Direct
Inventor
Kenji Shibata
健二 柴田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP58100823A priority Critical patent/JPS59227130A/ja
Publication of JPS59227130A publication Critical patent/JPS59227130A/ja
Publication of JPH0456454B2 publication Critical patent/JPH0456454B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/90—

Landscapes

  • Electron Beam Exposure (AREA)
  • Recrystallisation Techniques (AREA)
JP58100823A 1983-06-08 1983-06-08 電子ビ−ムアニ−ル装置 Granted JPS59227130A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58100823A JPS59227130A (ja) 1983-06-08 1983-06-08 電子ビ−ムアニ−ル装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58100823A JPS59227130A (ja) 1983-06-08 1983-06-08 電子ビ−ムアニ−ル装置

Publications (2)

Publication Number Publication Date
JPS59227130A true JPS59227130A (ja) 1984-12-20
JPH0456454B2 JPH0456454B2 (Direct) 1992-09-08

Family

ID=14284048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58100823A Granted JPS59227130A (ja) 1983-06-08 1983-06-08 電子ビ−ムアニ−ル装置

Country Status (1)

Country Link
JP (1) JPS59227130A (Direct)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS584257A (ja) * 1981-06-30 1983-01-11 Toshiba Corp 走査型電子ビ−ムアニ−ル装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS584257A (ja) * 1981-06-30 1983-01-11 Toshiba Corp 走査型電子ビ−ムアニ−ル装置

Also Published As

Publication number Publication date
JPH0456454B2 (Direct) 1992-09-08

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