JPS59226453A - Mass spectrograph - Google Patents
Mass spectrographInfo
- Publication number
- JPS59226453A JPS59226453A JP58099816A JP9981683A JPS59226453A JP S59226453 A JPS59226453 A JP S59226453A JP 58099816 A JP58099816 A JP 58099816A JP 9981683 A JP9981683 A JP 9981683A JP S59226453 A JPS59226453 A JP S59226453A
- Authority
- JP
- Japan
- Prior art keywords
- primary
- voltage
- ions
- high voltage
- variable high
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
Description
【発明の詳細な説明】
（イ）産業上の利用分野
本発明は試料に一次イオンビームを照射し、この試料か
ら得られる二次イオンを質量分離して試料の元素分析を
行なう質量分析装置に関する。Detailed Description of the Invention (a) Industrial Application Field The present invention relates to a mass spectrometer that irradiates a sample with a primary ion beam and performs elemental analysis of the sample by mass-separating secondary ions obtained from the sample. .
（ロ）従来技術
一般に、この種の質量分析装置においては、二次イオン
の収束調整を行なう場合、二次イオンに対する加速電圧
Ｅ２を必要に応じた範囲でスイープして二次イオンのピ
ークプロファイルをモニターするようにしている。とこ
ろが従来の装置では、二次イオンの加速電圧Ｅ２をスイ
ープしても、−次イオンの加速電圧Ｅ１はこれとは独立
していて変化しないので、−次イオンに与えられるエネ
ルギーは相対的にに、−（Ｅ２−ΔＥ２）（ただしΔＥ
２は二次イオンの加速電圧Ｅ２の変化分）のごとく変化
する。(b) Prior art In general, in this type of mass spectrometer, when performing secondary ion focusing adjustment, the accelerating voltage E2 for the secondary ions is swept within a range as necessary to adjust the peak profile of the secondary ions. I'm trying to monitor it. However, in conventional devices, even if the acceleration voltage E2 of the secondary ions is swept, the acceleration voltage E1 of the -order ions is independent of this and does not change, so the energy given to the -order ions is relatively , -(E2-ΔE2) (where ΔE
2 is a change in the accelerating voltage E2 of secondary ions).
つまり、これは試料に照射される一次イオンのエネルギ
ーが二次イオンの加速電圧Ｅ２のスイープにともない変
動することを意味し、このため、結果的て二次イオンの
強度も変化することになって収束調整が困難となるなど
の問題がある。In other words, this means that the energy of the primary ions irradiated to the sample changes as the secondary ion acceleration voltage E2 sweeps, and as a result, the intensity of the secondary ions also changes. There are problems such as difficulty in convergence adjustment.
（ハ） 目的
本発明は上述の問題点に鑑みてなされたものであって、
二次イオシの加速電圧をスイープしても一次イオンのエ
ネルギーがこれに影響されずに一定に保つことができて
安定した二次イオンが得られこれによって収束調整およ
び質量分析装置全体の調整が簡単に行なえるようにする
ことを目的とする。(C) Purpose The present invention has been made in view of the above-mentioned problems, and
Even if the accelerating voltage of the secondary ions is swept, the energy of the primary ions can be kept constant without being affected by this, and stable secondary ions can be obtained. This makes it easy to adjust the focus and the entire mass spectrometer. The purpose is to enable students to perform the following tasks.
に）構成
本発明はこのような目的を達成するため、−次イオンを
加速する電圧を供給する可変高圧電源とこの可変高圧電
源の電圧を二次イオンの加速電圧に同期してスイープさ
せるスイープ装置とを設けている。In order to achieve such an object, the present invention provides a variable high-voltage power supply that supplies a voltage for accelerating secondary ions, and a sweep device that sweeps the voltage of this variable high-voltage power supply in synchronization with the accelerating voltage of secondary ions. and.
（ホ）実施例
以下、本発明を図面に示す実施例に基づいて詳細に説明
する。(e) Examples Hereinafter, the present invention will be explained in detail based on examples shown in the drawings.
図は本発明の質量分析装置の要部を示す構成図である。The figure is a configuration diagram showing the main parts of the mass spectrometer of the present invention.
同図において１は質量分、折装置、２はデュオプラズマ
トロン型等の一次イオンガン、３はこの一次イオンガン
２のフィラメントで、このフィラメント３の加熱により
一次イオンエ、が発生する。４ａ、４ｂは一次イオ／ガ
ン２がう放射される一次イオンエ１のビームを収束して
試料６上に焦点を結ばせるだめの一次イオン側レンズで
ある。In the figure, 1 is a mass folding device, 2 is a primary ion gun such as a duoplasmatron type, and 3 is a filament of this primary ion gun 2. By heating this filament 3, primary ions are generated. 4a and 4b are lenses on the primary ion side that converge the beam of the primary ion beam 1 emitted by the primary ion gun 2 and focus it on the sample 6.
８は電圧を可変できる一次イオン側の可変高圧電源で、
との可変高圧電源８がらは上記−次イオン側レンズ４ａ
、４ｂに一次イオンエ１を加速する高電圧Ｅ１が分圧し
て供給される。１０ａ、１０ｂ。8 is a variable high voltage power supply on the primary ion side that can vary the voltage.
The variable high-voltage power supply 8 is connected to the secondary ion side lens 4a.
, 4b are supplied with a divided high voltage E1 for accelerating the primary ion beam 1. 10a, 10b.
１０Ｃは試料６がら一次イオンＩ、により励起され、
て放出される二次イオンエ、を質量分析計の手前の所
定位置に収束させるだめの二次イオン側レンズである。10C is excited by primary ions I from sample 6,
This is a secondary ion side lens that focuses the secondary ions emitted by the mass spectrometer onto a predetermined position in front of the mass spectrometer.
また１２は電圧を可変できる二次イオン側の可変高圧電
源で、この可変高圧電源１２からは上記二次イオン側レ
ンズ１０ａ、１０ｂ、１０Ｃと試料６とに二次イオンエ
、を加速する高電圧Ｅ２が分圧して供給される。１４は
スリットである。Reference numeral 12 denotes a variable high-voltage power source on the secondary ion side that can vary the voltage, and from this variable high-voltage power source 12, a high voltage E2 is applied to the secondary ion lenses 10a, 10b, 10C and the sample 6 to accelerate the secondary ions. is supplied at partial pressure. 14 is a slit.
１６は一次イオン側および二次イオン側の各可変高圧電
源８，１２から出力びれる加速電圧Ｆｉ、、 Ｂ。Reference numeral 16 denotes acceleration voltages Fi, B output from variable high voltage power supplies 8 and 12 on the primary ion side and secondary ion side.
を同期してスィーブさせるスイープ装置である。This is a sweep device that synchronously sweeps the
二次イオンエ、の収束調整を行なうため二次イオン側の
可変高圧電源１２の加速電圧馬をスイープする場合には
スイープ装置１６によって、−次イオン側の可変高圧電
源８の加速電圧Ｅ、もこれに同期してスイープされる。When sweeping the acceleration voltage of the variable high voltage power supply 12 on the secondary ion side in order to adjust the convergence of the secondary ion E, the acceleration voltage E of the variable high voltage power supply 8 on the negative ion side is also adjusted by the sweep device 16. is swept in synchronization with.
従って、両可変高圧電源８．１２間の相対的な電位差（
ＥＩ−Ｅ２）は変化しないので試料６に照射される一次
イオンエ１のエネルギーも変動しない。つまり、常時一
定のエネルギーを有する一次イオンエ、が試料６に照射
されることになり試料６から放出される二次イオンエ、
の強度も安定したものとなる。Therefore, the relative potential difference between both variable high voltage power supplies 8.12 (
Since EI-E2) does not change, the energy of the primary ion E1 irradiated onto the sample 6 also does not change. In other words, the sample 6 is irradiated with primary ions that always have a constant energy, and the secondary ions that are emitted from the sample 6,
The strength of is also stable.
（へ）効果
以上のように本発明によれば一次イオンを加速する電圧
を供給する可変高圧電源と、この可変高圧電源の高圧を
二次イオンの加速電圧に同期してスィーブさせるスイー
プ装置とを設けたので、二次イオンの加速電圧をスイー
プしても一次イオンのエネルギーを一定に保つことかで
きる。従って、安定した二次イオンが得られ収束調整お
よび装置全体の調整が容易となるという優れた効果が得
られる。(f) Effects As described above, according to the present invention, a variable high voltage power supply that supplies a voltage for accelerating primary ions and a sweep device that sweeps the high voltage of this variable high voltage power supply in synchronization with the accelerating voltage of secondary ions are provided. Since this is provided, the energy of the primary ions can be kept constant even if the accelerating voltage of the secondary ions is swept. Therefore, excellent effects are obtained in that stable secondary ions are obtained and convergence adjustment and adjustment of the entire apparatus are facilitated.
図面は本発明の一実施例を示す質量分析装置の構成図で
ある。
１・・質量分析装置、８・・−次イオン側可変高圧電源
、１２・・二次イオン側可変高圧電源、１６・・スイー
プ装置。
出 願 人 株式会社島津製作所The drawing is a configuration diagram of a mass spectrometer showing one embodiment of the present invention. 1...Mass spectrometer, 8...-Primary ion side variable high voltage power supply, 12...Secondary ion side variable high voltage power supply, 16...Sweep device. Applicant: Shimadzu Corporation
Claims (1)
源と、この可変高圧電源の電圧を二次イオンの加速電圧
に同期してスイープさせるスィーブ装置とを備えている
ことを特徴とする質量分析装置。(1) - A mass characterized by comprising a variable high-voltage power supply that supplies a voltage for accelerating secondary ions, and a sweep device that sweeps the voltage of this variable high-voltage power supply in synchronization with the accelerating voltage of secondary ions. Analysis equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58099816A JPS59226453A (en) | 1983-06-04 | 1983-06-04 | Mass spectrograph |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58099816A JPS59226453A (en) | 1983-06-04 | 1983-06-04 | Mass spectrograph |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59226453A true JPS59226453A (en) | 1984-12-19 |
Family
ID=14257364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58099816A Pending JPS59226453A (en) | 1983-06-04 | 1983-06-04 | Mass spectrograph |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59226453A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62160649A (en) * | 1986-01-09 | 1987-07-16 | Toshiba Corp | Secondary ion mass spectrometry device |
-
1983
- 1983-06-04 JP JP58099816A patent/JPS59226453A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62160649A (en) * | 1986-01-09 | 1987-07-16 | Toshiba Corp | Secondary ion mass spectrometry device |
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