JPS59223919A - Production for thin film magnetic head - Google Patents

Abstract

PURPOSE:To obtain a desired gap depth with a high precision by forming plural comb teeth different in depth in the side opposite to the tape contacting face side of a head core on monitor patterns formed on both sides of the head core and regulating the gap depth in root parts of comb tooth parts. CONSTITUTION:Monitor patterns 11 and 11' are formed simultaneously with formation of a pattern for coil by the thin film forming technique such as vapor- deposition, sputtering, or the like and the photoetching technique. Plural comb teeth 11a1-11a1'-different in depth are formed in the side opposite to the tape contacting face side of a head core 6 on monitor patterns 11 and 11', and the quantity of grinding is regulated by lengths from one side ends 11b and 11b', which are placed on the same line as the tape contacting face side, to notched parts 11c1-11c1'- which prescribe depths of individual comb teeth changing stepwise. That is, the number of lost comb teeth of monitor patterns exposed in the ground face side is counted by optical observation with an optical microscope when the tape contacting face side is ground, thereby detecting a remaining gap depth.

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a method for manufacturing a thin film magnetic head, and in particular, to a method that allows the gap depth to be defined accurately.

<Explanation> Prior art Figure 1 shows the basic structure of a thin film magnetic head, in which a lower helad core pattern (2) is formed on a substrate, a first insulating layer (3) is formed on it, Next, a coil pattern (4) is formed on this first insulator layer (3), and then a second insulator layer (5>) is formed, and an upper head core pattern (6) is formed thereon. Also, in the final manufacturing process of such a thin-film magnetic head, it is necessary to polish the tape contacting surface side in the same way as with a bulk type head (for example, a video head). The difference is that the gap depth cannot be directly observed due to the presence of a shield-cum-protection plate that is bonded after each pattern is formed.Furthermore, thin-film magnetic heads aimed at high-density recording are required to measure the gap depth. Accuracy is also becoming stricter, and time-controlled polishing is insufficient.
there were. Therefore, as shown in Fig. 2, triangular monitor patterns (7) (7') are separately formed on both sides of the head core, and when polishing the tape contacting surface (for example, when polishing up to line A-A') The length of the part exposed on the polished surface side is l.
), the gap depth can be calculated to control the amount of polishing, or monitor patterns (8) (8') can be formed into multiple comb-like shapes with different lengths, as shown in Figure 3. When polishing the tape-contacting surface (for example, when polishing to line B-B'), the gap depth is determined by the number of comb teeth exposed on the polishing surface, and the amount of polishing is controlled. , especially in the latter case, polishing! (i.e. gap depth)
can be known digitally, observation from the polished surface is easy, measurement errors are small, and yield can be improved. Note that (9) is a protective plate that also serves as a shield, and (10) is an adhesive layer. However, even in such a case, there are problems; specifically, the gap and
Because each comb-teeth portion of the monitor pattern that defines the depth length is thin and the film thickness is relatively thick, and due to insufficient adhesion of the resist, the tip of each comb-teeth portion may be The shape was as shown by the solid line in Figure 4 (that is, the side edges were large), and an error occurred between the design shape and the shape shown by the dotted line in Figure 4, making it impossible to accurately define the gap depth.

(c) Purpose of the Invention The present invention has been made in view of the above-mentioned points, and provides a method for manufacturing a thin film magnetic gutter that can solve the above-mentioned problems and obtain a desired gap/depth with high precision. This is what we are trying to provide.

(d) Structure of the Invention That is, the present invention achieves the above-mentioned objects.When constructing a thin-film magnetic head by forming patterns for a head core and coils on a substrate, a gap is formed on both sides of the head core. A monitor pattern for defining the depth is formed, and the monitor pattern has a plurality of comb teeth of different depths formed on the side opposite to the tape contact surface of the herad core, and the tape contact surface The gap depth is defined by the number of missing comb teeth in the monitor pattern exposed on the polished surface side during side polishing.

(e) Examples An embodiment of the present invention will be described below with reference to the drawings.

In addition, the same components as before are the same 3- Figure numbers are given and explanations thereof are omitted.

That is, according to the present invention, the monitor patterns (11) (11') having the shapes shown in FIG. 5 are formed simultaneously with the formation of the coil pattern by thin film forming techniques such as vapor deposition or sputtering, and by photolithographic techniques. Tomorrow, such monitor patterns (11) (11') will have a plurality of comb teeth (llal
) ... (llal') ... are formed, and one side end (llb) (l
The amount of polishing is regulated by the distance from the comb teeth (lb'') side to the notches (11c+), (11c+'), etc. that define the depth of each comb tooth that changes stepwise.

That is, during polishing of the surface facing the tape (for example, when polished to line c-c'), the number of missing comb teeth of the monitor pattern exposed on the polished surface side is counted by optical observation using an optical microscope to determine the remaining number of comb teeth. You can know the gap depth.

Further, FIG. 6 shows another embodiment in which the gap depth is measured electrically rather than optically using such a monitor pattern, specifically, 4-monitor pattern (11) (11 ') of each comb tooth (lla
+)-(11al')..., connection patterns (12) and (12') are separately formed to be electrically connected, respectively.

Incidentally, it is desirable from the viewpoint of the process that the connection patterns (12) (12') are formed at the same time as the monitor patterns (11) (11'). In this way, connection pattern (12) (12')
The gap depth can be determined by checking whether the electrical conduction is correct or not between a-b;, a'-bH' (=1.2, ・7), for example, there is continuity up to a-b4, a'-b4 ,
It can be seen that after a-b5, a'-b, ,' the polishing progresses to line D-0' in FIG. 7 in the state of disconnection. Although this electrical measurement method has drawbacks such as the trouble of connecting to the terminal and the difficulty of making minute measurements due to checking immediately before disconnection, it is possible to bring the lens system closer by loading it into a polishing jig. This is extremely effective in cases where optical observation is not possible.

Effects of the Invention As described above, according to the present invention, in the monitor pattern formed on both sides of the head core, a plurality of comb teeth having different depths are formed on the side opposite to the tape facing surface of the head core. ,
Since the gap depth is regulated at the root of the comb teeth (i.e., the distance from the tape contacting surface to the root of the comb teeth), design issues such as lack of resist adhesion may occur. Compared to the conventional method in which the tip of the comb tooth portion, which causes an error in shape, is used to define the gap depth, the desired gap depth can be obtained with high accuracy.

[Brief explanation of the drawing]

FIG. 1 is an external perspective view showing an example of the basic structure of a thin film magnetic head, FIGS. a)(
b) is a plan view showing another example of monitor pattern formation and its B-8' sectional view, FIG. 4 is an enlarged view of the main part thereof, and FIGS. FIG. 6 is a plan view showing an example of forming a monitor pattern and a sectional view taken along C-C° thereof, and FIG. 6 is a plan view showing another embodiment. (1)... Board, (2>... Rad core to the bottom, (6
)... Rad core to the top, (n) (u')... Monitor pattern, 7- (lla,) ~ (lla8) (lla, ') ~ (l
lag')...comb teeth. 8- Ward to Ward 0 Procedural amendment written (voluntarily) Mr. Commissioner of the Japan Patent Office 1, Indication of the case Patent Application No. 99701 of 1988 2, Name of the invention Method for manufacturing thin film magnetic head 6, Person making the amendment Case and Relationship Patent Applicant Name (188) Sanyo Electric Co., Ltd. 4, Agent Address 2-18-4 Keihan Hondori, Moriguchi City, “Claims” column of the specification to be amended and details of 1 invention "Explanation" column. Contents of the amendment (1) "Claims" of the specification will be amended as shown in the attached sheet. (2) "Head core" described on page 4, line 10 of the specification
is corrected to "one or more head cores". (3) “Head core” for the second race on page 6, line 17 of the specification
is corrected to "one or more Heradcore". ``Claims'' ``(1) When configuring a thin film magnetic head by forming patterns for a head core, fill, etc. on a substrate, 1
A monitor pattern for defining the gap depth is formed on both sides of the head core, and the monitor pattern includes a plurality of comb teeth each having a different depth on the side opposite to the tape contacting surface of the head core. 1. A method for manufacturing a thin film magnetic head characterized in that the gap depth is defined by the number of missing comb teeth of a monitor pattern exposed on the polished surface side during polishing of the tape contacting surface side. −

Claims (1)

[Claims] (1) When constructing a thin film magnetic head by forming patterns for the head core and coils on a substrate, a monitor pattern for defining the gap/depth is formed on both sides of the head core, and the monitor pattern is A plurality of comb teeth with different depths are formed on the side opposite to the tape facing side of the Herad core, and when the tape facing side is polished, the missing combs of the monitor pattern are exposed on the polished side. A method for manufacturing a thin film magnetic head characterized by defining the gap depth by the number of teeth.