JPS59222256A - Coater - Google Patents

Abstract

PURPOSE:To coat uniformly paste on the surface to be coated in a recess in accordance with a screen printing method and to rationalize operation by providing a scraper and a squeegee which move cooperatively in the same direction and either of which assumes an operating position. CONSTITUTION:A screen frame 4 on which a screen plate 5 is extended and a material 1 to be coated are disposed to face each other in a desired position. A scraper 6 is positioned on the left end of the plate 5 and a squeegee 7 is inclined and is positioned on the outside of the frame 4. While the paste 21 in the scraper 6 is discharged by a prescribed amt. from a nozzle by an air pressure onto the plate 5, the scraper is moved toward the right to spread the paste 21 over the entire surface of the plate 21. The material 1 is then moved upward to fit the plate 5 into the recess 2 thereof and at the same time the squeegee 7 and the scraper 6 are moved by a prescribed distance toward the right. The paste is coated this time on the surface 3 to be coated by the movement of the squeegee 7.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an adhesive coating device used, for example, in mounting a semiconductor chip into a package.

BACKGROUND TECHNOLOGY AND PROBLEMS Conventionally, semiconductor chips such as CCD imaging chips have been mounted in packages using base 1 adhesives for electronic components such as conductive adhesives, silver paste, etc. The coating on the bottom surface 1 of the package was done by hand under a microscope. In general, when the surface to be coated with a paste is located at the bottom of a so-called recess and is a narrow area, a dispenser method, a stamp method, 9 manual coating methods, etc. are used. However, when these methods are applied to the above semiconductor chip package, it is difficult to adjust the amount of paste applied (film thickness, application area), and to obtain a flat application 111. In addition, there are other problems such as the need to closely manage and limit the working conditions in order to maintain a constant coating amount, the need for skill, poor work efficiency, and the difficulty of achieving stable quality. Ta.

Purpose of the Invention The present invention provides a coating device based on a screen printing method based on the above-mentioned points, which makes it possible to uniformly apply paste to the inner bottom surface of the four parts of a package, etc., and which streamlines the work. It is.

8Ili Summary of the Invention The present invention has a screen plate that can enter a recess with an inner bottom surface as the surface to be coated, and a screen plate that moves in the same direction, and when one of them is located on the screen plate, the other one moves outside the screen plate. The paste dispensed from the spray scraper is supplied to the entire surface of the screen plate by the spray scraper, and then the squeegee is placed on the screen plate at 1 g, and the squeegee is swept over the screen plate to apply the paste to the surface to be coated. This coating device is designed to uniformly coat the surface.

The coating device of the present invention can uniformly and evenly coat the paste on the surface to be coated inside the recess, and the work can be streamlined through automation.

Example Hereinafter, the present invention will be described in detail with reference to the drawings.

FIG. 1 is an exploded perspective view of the main parts of a coating device according to the present invention. In the same figure, fl) is an object to be coated with the required paste, for example, silver paste, i.e., a package for a CCD imaging tip/knob, etc. The inner bottom surface of the recess I2) is the surface to be coated (3). The object to be coated is shown. Also, (4)
is a screen frame with screen version (5) attached, (6)
(7) shows a squeegee. In this example, a fixing stand (12) is provided protruding from the - side of the support part (11) set up on the base Gel, and the screen frame (4) is placed and fixed thereon. In addition, a pair of guide shafts (13) extending in the vertical direction are provided on the − side of the support portion (11), and along these guide shafts (13), the soil portion that can be moved is movable. The body (]4) and the lower movable body (15) are arranged.In this case, the upper iiJ moving body (14) and the soil movable body (15) are respectively arranged at the upper F position with the fixed base (I2) in between.

Then, 'C1 This F section + 14 A section (17) facing the screen plate (5) of the moving object (15) J- is the object to be coated (
1) so that when the object to be coated (1) is raised by the moving body (15) for the first part, the screen plate (5) enters into the fourth part (2) of the object to be coated (1). Eggplant. On the other hand, the upper movable body (14) is provided with a pair of guide shafts (18) extending in the horizontal direction, and a souffle flavor (6) and a squeegee (7) movable in the horizontal (i.e. left and right) direction are provided along the guide shafts. ). The souffle bar (6) and the squeegee (7) are mechanically connected to each other at a predetermined distance in the horizontal direction, so that they can both move in the same direction when moving in the vertical and horizontal directions. here,
The spacing between the souffle flavor (6) and the squeegee (7) is selected such that when one is located on the screen plate (5), the other is located on the screen plate (5) and therefore outside the screen frame (4). Also, although not shown, the two-part movable body (14) and the lower movable body (I5) are driven in the -F direction by their respective Tanabata, and similarly, the souffle flavor (6) and squeegee (7) are driven. Drive in the left and right directions is also performed by a motor.

The sour wrapper (6) has a built-in cartridge filled with the required paste, and is configured so that the required amount of paste is ejected from a nozzle at its tip by air pressure.

In addition, the screen frame (4) is arranged vertically so that the part (4a) on which the screen plate (5) is stretched can enter the recess (2) of the object to be coated (11) as shown in Figures 2 and 3. The screen plate (5) is formed in a slanted shape so that the opening gradually becomes larger upwards.
At the bottom of the part (4a) of the screen frame (4) covered with
A protrusion (20) that protrudes by the length is formed. This protrusion (
20), the screen plate (5) covers the four parts (1) of the object to be coated (1).
2) It defines the distance d between the screen plate (5) and the coating direction (3) when the screen plate (5) enters the inside.

Next, the operation of the coating apparatus having such a configuration will be explained.

First, in the state shown in Figure 1, fix the screen frame (4) on which the required screen plate (5) is stretched on the fixing base (12),
Further, the object to be coated (1) is fixed to the mounting portion (17) J- of the lower movable body (15) facing the screen frame (4).

The sprayer (6) is located close to the left end of the screen plate (5) when facing the drawing, and the squeegee (7) is located in an inclined state outside the screen frame (4). From this state, as shown in Fig. 5A, the base (21) inside the spray flapper (6) is moved by a predetermined amount of air pressure from the nozzle at the tip onto the screen I slope (51), and as shown in Fig. 5B. Move the paste flavor (6) to the right and press the paste (21) so that it is not spread evenly over the entire surface of the screen plate (5). The coating body (1) rises twice, and the fixed screen plate (5) enters into its fourth part (2).
As explained in the figure, the protrusion (2) on the screen frame (4) side
0) accurately defines the distance d between the screen plate (5) and the surface to be coated 3). Therefore, even if there are variations in the object to be coated ( ), the distance d is always maintained accurately.

At the same time, the squeegee (7) and the flavor bar (6) are both raised to the Dobe FiJ moving body (14) by L, then moved a predetermined distance to the right, and then lowered by the lower movable body (I4). The state shown in FIG. 5C is brought to a state where the spray scraper (6) is moved outside the screen frame (4) and the squeegee (7) is positioned at the right end of the screen plate f51-1-.

Next, the squeegee (force is applied to the surface to be coated (3) each time the screen plate (5) is moved to the left)
21) is applied (see No. 513'21D jj〈().

During this application, the screen plate (5) placed at a distance d from the surface to be coated (3) is bent by the squeegee (7) to a thickness Z of the paste 1-1-. Sweep to apply paste (2I) evenly 4
j. After the paste (21) has been applied, the lower movable body (15) is lowered and the object to be coated +11 is returned to its original position. Also, squeegee (7) and souffler (6)
) is raised by the -1 partial movable body (14), then moved to the left (see Figure 5E), and then lowered by the upper Fift movable body (]4) to return to its original position, and then It is now in a waiting state for coating (see FIG. 5F). FIG. 6 shows a package for a COD imaging chip in which pastes such as silver bases 1 to (21) are applied to predetermined areas of the inner bottom surfaces of the four parts in this manner.

According to the coating device having such a configuration, it is possible to uniformly coat the paste onto the bottom surface of the package easily and accurately. In particular, by using the screen printing method in combination with a sprayer, it is possible to accurately obtain the coating thickness and coating area in a narrow area within the recess, and to obtain a coating surface that can be applied by hand. - (6) and squeegee (7) are mechanically integrated and interlock in the same direction;
In addition, when one of them is located on the screen plate 2, the other is located outside the screen frame, so the souffle flavor (6) and the squeegee (7
) are performed reliably, and the target coating surface is more accurately i#. In addition, since the paste l-(2]) is directly supplied from the paste flavor = (6), the paste supply mechanism is simplified, and the paste is also supplied in a predetermined amount (Jli) for each application, so that the paste 1 -'s/l!i%&I
Only a small amount is required. Further, since the screen frame (4) is inclined so that its opening becomes larger in one direction, the inclined squeegee (7) can be operated smoothly.

Pace 1 application j so, apply and apply jl! Adjustment is extremely easy as it can be done by replacing only the screen plate. Furthermore, efficient and stable coating work can be performed without the need for skill or detailed management of work conditions.

Furthermore, the second device can be inserted into the die bonder.
It is Noh. In this manner, the coating device can automate the base coating in the recessed portions, rationalize the coating work, and greatly improve the work efficiency.

In the application example, the application was applied to the case where silver paste was applied to the bottom of the package of an imaging chip (CCI).
The present invention can also be applied to the application of the required paste (21) to objects having various structures shown in FIGS. 15 to 15.

In addition, in the case of character printing shown in Fig. 13, not only adhesives such as '44 adhesive, silver base I, etc., but also adhesives such as 15
Different materials (21') in hybrid IC (not shown)
It can also be applied to selective application of

Effects of the Invention As mentioned above, the present invention 1! This allows the desired paste to be uniformly applied to a narrow area of the inner bottom surface of the recess. It also enables automation and rationalization of coating work.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of a main part showing an example of a coating device according to the present invention, FIGS. 2 and 3 are a plan view and a sectional view of a screen frame, and FIG. 4 is an enlarged sectional view of a main part of a screen frame. 5A to 5F are cross-sectional views for explaining the operation, FIG. 6 is a perspective view of a package for semiconductor chips coated with paste, and FIG.
14 are perspective views showing other examples of objects to be coated to which the present invention can be applied, and FIG. 15 is a plan view of essential parts of still another example of the object to be coated. ('') is the object to be coated, (2) is the recess, (3) is the surface to be coated,
(4) is a screen frame, (5) is a screen version, (6)
(7) is a souffler and a squeegee. 1 -330- Q port Fig. 13 Fig. 14 331- Fig. 15 21゛

Claims (1)

[Claims] A screen plate that can enter the recess with the inner bottom surface as the surface to be coated, and a spray scraper and squeegee that move in the same direction and are located outside the screen plate when one of them is located on the screen plate described in 1-. Prepare the paste, apply the paste discharged from the souffle flavor to the entire surface of the above screen plate using the souffle flavor, and then apply the above squeegee to -
A coating device characterized in that the coating device is positioned on the screen plate and sweeps the inside of the screen with the squeegee to uniformly coat the base 1- on the surface to be coated F.