JPS59221847A - Disc for electron beam recording - Google Patents

Abstract

PURPOSE:To enable writing and reading out with good energy efficiency by forming a thin low melting metal layer on a disc and recording and reproducing information by using an electron beam. CONSTITUTION:A low melting metal such as Te, Se, Sb or the like or a compd. thereof is deposited by a method such as vacuum deposition or the like on, for example, a silicon disc 1 to form an information recording layer 2 having about 200Angstrom thickness. An electron beam is irradiated in a vacuum onto the layer 2 at about 500Angstrom spot diameter to melt and open the layer 2 in the irradiated part, thereby writing information. The electron beam weaker than the writing energy is then irradiated to said layer to detect the secondary electron quantity to be radiated, thereby reading out the information. Since the low melting material is used, the writing energy efficiency is good and since the material used has high emission efficiency of secondary electron, the disc having high reading out efficiency is obtd.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in an information recording medium used in an electron beam recording and reproducing apparatus that records and reproduces information using an electron beam.

(2) Background of the Technology Magnetic disk devices, optical disk devices, and even laser disk devices are known as devices for recording and reproducing information provided in the form of electrical pulse signals and the like.

These information recording and reproducing devices convert information input as electrical signals into magnetic flux signals, optical signals, laser signals, etc.
Using these converted signals, physical and chemical changes are applied to the disk-shaped information recording medium to write information, and changes in physical quantities caused by these physical and chemical changes are detected to read out the information. However, a common problem with these information recording and reproducing apparatuses is that the recording capacity per unit area of the information recording disk, which is the information recording medium, is not necessarily large enough to be satisfactory.

First, in a magnetic disk device, the required area for one bit is approximately 2JLm x 20gm. Next, even in an optical disk device having a relatively large recording capacity per unit area, the area required for one bit is approximately lpm×2ILm, which is not necessarily satisfactory.

This drawback is caused by the various signal media mentioned above, namely magnetic flux, light,
Focusing on the fact that there is a limit to the lower limit of the cross-sectional area when a fine beam is formed using a laser, etc., an electron beam recording and reproducing device was proposed that uses an electron beam as a signal medium, which can produce a finer beam. In this electron beam recording and reproducing device, the area required for 1 bit is 5
It has been confirmed that it can be reduced to about 00A x 500A.

This electron beam recording and reproducing device writes information on an information recording disk by using a fine electron beam that embodies information to create a fine aperture based on physical and chemical changes such as melting of the electron beam irradiation point. Difference between a certain physical quantity obtained from an area where information is written and the same physical quantity obtained from an area where information is not written, such as secondary electron emission amount, backscattered electron emission amount, X-ray emission amount, fluorescence amount, and phosphorescence amount The information is read by detecting the difference between the two.

3. Problems with the prior art In order to improve the performance of the above electron beam recording and reproducing device,
It is desirable to develop an information recording disk with excellent information writing efficiency and information reading efficiency, but in the information recording disk whose information recording layer is an aluminum (AI) film used in the conventional technology, the information writing efficiency and information reading efficiency are low. are not necessarily satisfactory, and it has been desired to develop an electron beam recording disk with even better efficiency.

(4) Purpose of the Invention The purpose of the present invention is to meet this demand, and to provide an electron beam recording disk with excellent information writing efficiency and information reading efficiency.

(5) Structure of the Invention The structure of the present invention resides in an electron beam recording disk in which a thin layer made of a low melting point metal is formed on the disk and this thin layer serves as an information recording layer. And as a low melting point metal,
Tellurium (Te), selenium (Se), antimony (sb)
, or these compounds are excellent, and it is advantageous for the disk to be a disk-shaped member made of silicon (Sl).

The present invention uses a method of forming fine apertures in the information recording layer on the surface of an information recording disk using an electron beam that embodies information as an information writing method, and rewrites the information as an information reading method. This method is based on a method that detects the amount of secondary electrons emitted by irradiating a relatively weak electron beam with no It was decided to use low melting point metals or their compounds with high electronic efficiency. The melting points and secondary electron efficiencies of various low melting point metals are listed below.

L8 Mden ≦ l king 13 selenium
221 1.75 tellurium 4
5 (11,35 Antimony 631 1.83 Aluminum 6HO,79 Silicon 1,412 0.73 From the table above, tellurium (Te), selenium (Se), antimony (sb
) is clearly superior.

(6) Embodiment of the Invention Hereinafter, an electron beam recording disk according to an embodiment of the invention will be further described with reference to the drawings.

Made of silicon (Si) with a thickness of 2.0 cm and a diameter of 20 cm (see Figure 1).
A tellurium thin film 2 having a thickness of 200 Å was formed on the layered disk 1 using a vacuum evaporation method, and an information recording disk was manufactured using this disk.

Refer to Figure 2. An electron beam with a spot diameter of 500λ was applied to the above information recording disk at 50K in a vacuum of about 10 Pa.
The tellurium thin film 2 was melted in the irradiated area by irradiation at an acceleration of 1.3 eV to form an opening and write information.

Next, when the material was irradiated with a relatively weak electron beam, it was strongly confirmed that secondary electrons were emitted with high efficiency. (
(shown as curve A in the figure).

For comparison, when information was written under the same conditions to an information recording disk using an aluminum (AI) film as the information recording layer using the conventional technology and secondary electrons were emitted, the amount of secondary electrons emitted was about the same as that on the upper side. It was confirmed that (indicated by curve B indicated by a broken line in the figure).

(7) As described in detail, according to the present invention, it is possible to provide an electron beam recording disk with excellent information writing efficiency and information reading efficiency.

[Brief explanation of drawings]

FIG. 1 is a sectional view of an electron beam recording disk according to an embodiment of the present invention. FIG. 2 is a graph showing the results of an effect confirmation test of the present invention. ■... Disk (disk), 2... Tellurium thin film (information recording layer), A... Emission of electron beam recording disk according to an embodiment of the present invention Curve showing the amount of secondary electrons B: Curve showing the amount of secondary electrons emitted from the electron beam recording disk according to the prior art. scan time

Claims (3)

[Claims] (1) An electron beam recording disk in which an information recording layer is formed by forming a thin layer of a low melting point metal on the disk. (2) The low melting point metal is tellurium, selenium, antimony,
Alternatively, the electron beam recording disk according to claim 1, which is a compound thereof. (3) The electron beam recording disk according to claim 1 or 2, wherein the disk is a disk-shaped member made of silicon.