JPH0259527B2 - - Google Patents
Info
- Publication number
- JPH0259527B2 JPH0259527B2 JP59217140A JP21714084A JPH0259527B2 JP H0259527 B2 JPH0259527 B2 JP H0259527B2 JP 59217140 A JP59217140 A JP 59217140A JP 21714084 A JP21714084 A JP 21714084A JP H0259527 B2 JPH0259527 B2 JP H0259527B2
- Authority
- JP
- Japan
- Prior art keywords
- recording medium
- information recording
- optical information
- thin film
- turntable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 20
- 239000010409 thin film Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 9
- 239000002245 particle Substances 0.000 claims description 8
- 229910005900 GeTe Inorganic materials 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 239000010408 film Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 3
- 229910018321 SbTe Inorganic materials 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 description 15
- 230000008020 evaporation Effects 0.000 description 15
- 230000007423 decrease Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910001215 Te alloy Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Thermal Transfer Or Thermal Recording In General (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
- Manufacturing Optical Record Carriers (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は光ビームを用いて情報が記録される円
盤状光情報記録媒体の改良に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to improvement of a disc-shaped optical information recording medium on which information is recorded using a light beam.
（従来の技術）
光情報記録媒体としては、Te合金薄膜や色素
薄膜を用いた穿孔型記録媒体と、非晶質−結晶質
転移等を利用した濃淡型記録媒体が知られている
が、いずれも情報を記録するに要する光エネルギ
ーは媒体上のいかなる位置においても一定であ
る。(Prior art) As optical information recording media, there are known perforated recording media that use Te alloy thin films or dye thin films, and density type recording media that utilize amorphous-crystalline transition, etc. However, the light energy required to record information is constant at any position on the medium.
（発明が解決しようとする問題点）
光情報記録媒体が円盤状であり、この媒体を角
速度一定で回転させ情報を記録再生する場合、外
周における線速度は内周における線速度よりも大
であるため、情報を記録するに要する光エネルギ
ーを内周から外周になるに従つて徐々に大きくす
る必要がある。(Problem to be solved by the invention) When an optical information recording medium is disk-shaped and information is recorded and reproduced by rotating this medium at a constant angular velocity, the linear velocity at the outer circumference is greater than the linear velocity at the inner circumference. Therefore, it is necessary to gradually increase the optical energy required to record information from the inner circumference to the outer circumference.
本発明はこの様な欠点を改良する為になされた
もので、角速度一定で回転する円盤状記録媒体に
情報を記録する時、情報記録位置に応じて光エネ
ルギーを変化させなくても均一に記録できる記録
媒体を提供することを目的とするものである。 The present invention has been made to improve these drawbacks, and when recording information on a disc-shaped recording medium that rotates at a constant angular velocity, it is possible to record information uniformly without changing the optical energy depending on the information recording position. The purpose is to provide a recording medium that can.
（問題点を解決するための手段）
この為本発明は、円盤状記録媒体の記録薄膜と
して本出願人が概に昭和59年10月11日付で「光情
報記録媒体」として提案したGe1-xSb2xTe1+2x（０
＜ｘ＜1.0）合金を主成分とする薄膜を用い、上
記円盤状記録媒体の内周から外周にかけて徐々に
上記ｘの値を増加させる様にしたものである。(Means for Solving the Problems) Therefore, the present invention utilizes Ge 1- , which the present applicant proposed as an "optical information recording medium" on October 11, 1980, as a recording thin film for a disc-shaped recording medium. x Sb 2x Te 1+2x (0
<x<1.0) A thin film mainly composed of an alloy is used, and the value of x is gradually increased from the inner circumference to the outer circumference of the disc-shaped recording medium.
（実施例）
以下、本発明を実施例にしたがつて詳細に説明
する。第１図は本発明による光情報記録媒体を製
造する装置の一例を示したものである。真空チヤ
ンバー１１の中に回転する基板ホルダー１２が設
けられており、円盤状基板１３は該基板ホルダー
１２の下方に取り付けられる。該円盤状基板１３
の中心軸直下で距離H1の位置に第１の蒸発源１
４が置かれ、斜線のGeTeを蒸発させるのに使用
する。蒸発源１４からのGeTe蒸発量は電源１６
の出力を変化させて制御第２の蒸発源１５は第１
の蒸発源１４から水平に距離Ｌの位置に置かれ斜
線のSb2Te3を蒸発させるのに使用する。蒸発源
１５からのSb2Te3蒸発量は電源１７の出力を変
化させて制御する。(Example) Hereinafter, the present invention will be explained in detail according to an example. FIG. 1 shows an example of an apparatus for manufacturing an optical information recording medium according to the present invention. A rotating substrate holder 12 is provided in the vacuum chamber 11, and a disk-shaped substrate 13 is attached below the substrate holder 12. The disk-shaped substrate 13
The first evaporation source 1 is located at a distance H 1 directly below the central axis of
4 is placed and used to evaporate the GeTe shown in the diagonal line. The GeTe evaporation amount from the evaporation source 14 is the power supply 16
The second evaporation source 15 is controlled by changing the output of the first evaporation source 15.
It is placed horizontally at a distance L from the evaporation source 14 and is used to evaporate the Sb 2 Te 3 indicated by diagonal lines. The amount of Sb 2 Te 3 evaporated from the evaporation source 15 is controlled by changing the output of the power source 17.
以上の様な構成において、蒸発源１４から蒸発
したGeTe粒子の基板１３への飛来量は基板１３
の中心部で大であり外周部へと徐々に小さくな
る。内周部と外周部におけるGeTe粒子飛来量の
比は距離H1を変えることにより所望の値に調整
することができ、H1を大とすると外周部の内周
部に対する飛来GeTe粒子比R1は１に近ずく。逆
にH1を小とするとR1は１から遠ざかる。同様に
蒸発源１５から蒸発したSb2Te3粒子の基板１３
への飛来量はＬ及びH2を変化させると外周部で
大きく内周部で小さくすることができる。そして
H1，H2，Ｌ及び電源１６および１７の出力を適
切な値を選ぶと、円盤状基板１３には、膜厚は内
周部と外周部で等しいGe1-xSb2xTe1+2ｘ合金薄
膜が得られ、その組成は内周部から外周部にかけ
てｘが連続的に増加した合金薄膜が得られる。 In the above configuration, the amount of GeTe particles evaporated from the evaporation source 14 flying to the substrate 13 is
It is large at the center and gradually decreases towards the periphery. The ratio of the amount of incoming GeTe particles at the inner and outer peripheries can be adjusted to a desired value by changing the distance H 1. If H 1 is increased, the ratio of the GeTe particles at the outer periphery to the inner periphery increases approaches 1. Conversely, if H 1 is made small, R 1 moves away from 1. Similarly, the substrate 13 of Sb 2 Te 3 particles evaporated from the evaporation source 15
By changing L and H 2 , the amount of flying can be made larger at the outer periphery and smaller at the inner periphery. and
By selecting appropriate values for H 1 , H 2 , L and the outputs of the power supplies 16 and 17, the disk-shaped substrate 13 has the same film thickness on the inner and outer peripheries.Ge 1-x Sb 2 xTe 1+2 An x alloy thin film is obtained, the composition of which is such that x continuously increases from the inner circumference to the outer circumference.
ここで、本出願人が昭和59年10月11日付で「光
情報記録媒体」として提案した前記出願で用いら
れるGe1-xSb2xTe1+2x合金薄膜は、第２図に示さ
れるごとくｘの値が増加するにしたがつて曲線２
１の様に転移点の温度が下降し、曲線２２の様に
情報を記録するのに必要な光エネルギーが減少す
る。従つて上述の如き構造を有する円盤状光情報
記録媒体では内周部から外周部へと連続的に小さ
い光エネルギーで情報を記録することができる。
したがつて上述の様にして得られた光情報記録媒
体を一定角速度で回転させて情報を記録する時、
従来の様に情報を記録する位置に応じて光エネル
ギーを変化させなくても、該媒体上にどの位置に
も均一に情報を記録することが可能である。 Here, the Ge 1-x Sb 2x Te 1+2x alloy thin film used in the aforementioned application, which was proposed by the present applicant as an "optical information recording medium" dated October 11, 1980, is as shown in Figure 2. As the value of x increases, curve 2
1, the temperature at the transition point decreases, and the light energy required to record information decreases, as shown by curve 22. Therefore, in the disc-shaped optical information recording medium having the structure as described above, information can be continuously recorded from the inner circumference to the outer circumference with small optical energy.
Therefore, when recording information by rotating the optical information recording medium obtained as described above at a constant angular velocity,
It is possible to uniformly record information at any position on the medium without changing the optical energy depending on the position where information is recorded as in the conventional method.
今円盤状記録媒体において情報を記録する領域
の内径をr1、外径をr2とすると一般にr2／r1＝２
となるよう選択され、内外周における媒体の回転
時の線速比はr2／r1に比例し、情報を記録するに
必要なエネルギー比は√2 1〜r2／r1の範囲の
値になる。したがつて第２図により、記録光エネ
ルギーの比が1.4〜２となるように、ｘの値を内
周で小さく外周で大きくなるよう選択すればよ
い。例えば内周部でｘ＝0.1のとき外周部でｘ＝
0.5〜0.6とするのが適当である。ｘの値は上記
r2／r1＝２のとき内周部でｘ＝０〜0.2、外周部で
ｘ＝0.4〜0.9で選ぶことができる。 If the inner diameter of the area where information is recorded in a disc-shaped recording medium is r 1 and the outer diameter is r 2 , generally r 2 /r 1 = 2.
The linear velocity ratio during rotation of the medium at the inner and outer peripheries is proportional to r 2 / r 1 , and the energy ratio required to record information is a value in the range of √ 2 1 to r 2 / r 1 become. Therefore, as shown in FIG. 2, the value of x may be selected to be small at the inner circumference and large at the outer circumference so that the ratio of recording light energy is 1.4 to 2. For example, when x = 0.1 at the inner periphery, x = 0.1 at the outer periphery.
A value of 0.5 to 0.6 is appropriate. The value of x is above
When r 2 /r 1 = 2, x can be selected from 0 to 0.2 at the inner periphery and 0.4 to 0.9 at the outer periphery.
なお蒸発源１４および蒸発源１５は抵抗加熱式
蒸発源、電子ビーム加熱式蒸発源のいずれも用い
ることができる。又、記録薄膜作製法は本実施例
に示した真空蒸発法に限定することなくスパツタ
リング法によることもでき、この場合粒子の発生
源として第１図の蒸発源の位置にターゲツトを置
き換えるだけで良い。この場合、粒子発生源はタ
ーンテーブルの下方に限るものではなく、例えば
第１図の位置関係をさかさまにして、ターンテー
ブルの上方にしてもよく、又横倒し状態にしてタ
ーンテーブルの横にしてもよいことはもち論であ
る。 Note that the evaporation source 14 and the evaporation source 15 can be either a resistance heating type evaporation source or an electron beam heating type evaporation source. Furthermore, the recording thin film manufacturing method is not limited to the vacuum evaporation method shown in this example, but may also be a sputtering method, in which case it is sufficient to simply replace the target at the position of the evaporation source shown in Figure 1 as the source of particle generation. . In this case, the particle generation source is not limited to being below the turntable; for example, it may be placed above the turntable by turning the positional relationship shown in Figure 1 upside down, or it may be placed sideways to the side of the turntable. What is good is a theory.
（発明の効果）
以上述べたように、本発明による円盤状光記録
媒体においては、内周から外周になるに従い連続
的に記録感度が高くなつているので、情報を記録
するに必要なエネルギーは外周になるにしたがつ
て小さくて良いので、媒体上のどの位置にも均一
に情報を記録することが可能である。(Effects of the Invention) As described above, in the disc-shaped optical recording medium according to the present invention, the recording sensitivity increases continuously from the inner circumference to the outer circumference, so the energy required to record information is Since the disk size may be smaller toward the outer periphery, it is possible to record information uniformly at any position on the medium.
第１図は本発明の光情報記録媒体を製造する装
置の一例であり、第２図は本発明の光情報記録媒
体記録膜組成と記録光エネルギーの関係を示す図
である。
１２……ターンテーブル、１３……光情報記録
媒体、１４，１５……蒸発源。
FIG. 1 is an example of an apparatus for manufacturing the optical information recording medium of the present invention, and FIG. 2 is a diagram showing the relationship between the recording film composition of the optical information recording medium of the present invention and the recording light energy. 12... Turntable, 13... Optical information recording medium, 14, 15... Evaporation source.
Claims (1)
薄膜へ光ビームを照射し情報を記録する円盤状光
情報記録媒体において、上記薄膜をGe1-xSb2x
Te1+2x（０＜ｘ＜1.0）なる組成の合金膜を主成分
とする薄膜とし、上記円盤状光情報記録媒体の内
周から外周に向けて、上記合金膜のｘの値を徐々
に増加させたことを特徴とする光情報記録媒体。 ２ デイスクを回転させるターンテーブルと、該
ターンテーブルの回転軸の延長線上で上記ターン
テーブルのデイスク装着面に対向する位置に
GeTe粒子の発生源を設け、上記延長線から外れ
て上記デイスク装着面に対向する位置にSbTe粒
子の発生源を設けた光情報記録媒体の製造装置。[Claims] 1. A disc-shaped optical information recording medium that has a substrate and a thin film formed on the substrate, and records information by irradiating the thin film with a light beam, wherein the thin film is made of Ge 1-x Sb 2x.
A thin film whose main component is an alloy film having a composition of Te 1+2x (0<x<1.0), and the value of x of the alloy film is gradually changed from the inner circumference to the outer circumference of the disk-shaped optical information recording medium. An optical information recording medium characterized in that: 2. A turntable that rotates a disk, and a position facing the disk mounting surface of the turntable on an extension of the rotation axis of the turntable.
An apparatus for manufacturing an optical information recording medium, wherein a generation source of GeTe particles is provided, and a source of SbTe particles is provided at a position away from the extension line and facing the disk mounting surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59217140A JPS6196536A (en) | 1984-10-16 | 1984-10-16 | Optical information recording medium and its manufacturing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59217140A JPS6196536A (en) | 1984-10-16 | 1984-10-16 | Optical information recording medium and its manufacturing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6196536A JPS6196536A (en) | 1986-05-15 |
| JPH0259527B2 true JPH0259527B2 (en) | 1990-12-12 |
Family
ID=16699478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59217140A Granted JPS6196536A (en) | 1984-10-16 | 1984-10-16 | Optical information recording medium and its manufacturing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6196536A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6432438A (en) * | 1987-07-28 | 1989-02-02 | Nippon Columbia | Optical information recording medium |
| JP2674837B2 (en) * | 1989-07-19 | 1997-11-12 | 日本電気株式会社 | Phase change optical disk |
-
1984
- 1984-10-16 JP JP59217140A patent/JPS6196536A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6196536A (en) | 1986-05-15 |
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