JPS5921660U - プラズマｃｖｄ装置 - Google Patents

プラズマｃｖｄ装置

Info

Publication number
JPS5921660U
JPS5921660U JP11682682U JP11682682U JPS5921660U JP S5921660 U JPS5921660 U JP S5921660U JP 11682682 U JP11682682 U JP 11682682U JP 11682682 U JP11682682 U JP 11682682U JP S5921660 U JPS5921660 U JP S5921660U
Authority
JP
Japan
Prior art keywords
base material
plasma cvd
end side
cvd apparatus
vacuum vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11682682U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6140772Y2 (enrdf_load_stackoverflow
Inventor
川上　伸男
横山　佳興
祐一 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP11682682U priority Critical patent/JPS5921660U/ja
Publication of JPS5921660U publication Critical patent/JPS5921660U/ja
Application granted granted Critical
Publication of JPS6140772Y2 publication Critical patent/JPS6140772Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP11682682U 1982-07-31 1982-07-31 プラズマｃｖｄ装置 Granted JPS5921660U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11682682U JPS5921660U (ja) 1982-07-31 1982-07-31 プラズマｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11682682U JPS5921660U (ja) 1982-07-31 1982-07-31 プラズマｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS5921660U true JPS5921660U (ja) 1984-02-09
JPS6140772Y2 JPS6140772Y2 (enrdf_load_stackoverflow) 1986-11-20

Family

ID=30269160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11682682U Granted JPS5921660U (ja) 1982-07-31 1982-07-31 プラズマｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPS5921660U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61288074A (ja) * 1985-06-17 1986-12-18 Canon Inc Ｃｖｄ法による堆積膜形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61288074A (ja) * 1985-06-17 1986-12-18 Canon Inc Ｃｖｄ法による堆積膜形成方法

Also Published As

Publication number Publication date
JPS6140772Y2 (enrdf_load_stackoverflow) 1986-11-20

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