JPS59214712A - 静電容量形変位検出器 - Google Patents

静電容量形変位検出器

Info

Publication number
JPS59214712A
JPS59214712A JP8895983A JP8895983A JPS59214712A JP S59214712 A JPS59214712 A JP S59214712A JP 8895983 A JP8895983 A JP 8895983A JP 8895983 A JP8895983 A JP 8895983A JP S59214712 A JPS59214712 A JP S59214712A
Authority
JP
Japan
Prior art keywords
main
electrode
circuit
delay
phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8895983A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0358447B2 (enrdf_load_stackoverflow
Inventor
Ryochi Kato
加藤　良智
Kazutaka Nanba
難波　一隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nakamura Seisakusho KK
Original Assignee
Nakamura Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nakamura Seisakusho KK filed Critical Nakamura Seisakusho KK
Priority to JP8895983A priority Critical patent/JPS59214712A/ja
Publication of JPS59214712A publication Critical patent/JPS59214712A/ja
Publication of JPH0358447B2 publication Critical patent/JPH0358447B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Transmission And Conversion Of Sensor Element Output (AREA)
JP8895983A 1983-05-20 1983-05-20 静電容量形変位検出器 Granted JPS59214712A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8895983A JPS59214712A (ja) 1983-05-20 1983-05-20 静電容量形変位検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8895983A JPS59214712A (ja) 1983-05-20 1983-05-20 静電容量形変位検出器

Publications (2)

Publication Number Publication Date
JPS59214712A true JPS59214712A (ja) 1984-12-04
JPH0358447B2 JPH0358447B2 (enrdf_load_stackoverflow) 1991-09-05

Family

ID=13957371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8895983A Granted JPS59214712A (ja) 1983-05-20 1983-05-20 静電容量形変位検出器

Country Status (1)

Country Link
JP (1) JPS59214712A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4878013A (en) * 1986-04-04 1989-10-31 Mitutoyo Corporation Capacitive type measurement transducer with improved electrode arrangement
US4982509A (en) * 1988-08-19 1991-01-08 Delta International Machinery Corp. Measurement system having multiple display orientations
US5414420A (en) * 1992-03-23 1995-05-09 Hewlett-Packard Corporation Switch interconnect for position encoder system
US5428355A (en) * 1992-03-23 1995-06-27 Hewlett-Packard Corporation Position encoder system
JP2007093287A (ja) * 2005-09-27 2007-04-12 Tietech Co Ltd リニアモータ
JP2016206163A (ja) * 2015-04-24 2016-12-08 株式会社ミツトヨ エンコーダスケール及びその製造・取付方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4878013A (en) * 1986-04-04 1989-10-31 Mitutoyo Corporation Capacitive type measurement transducer with improved electrode arrangement
US4982509A (en) * 1988-08-19 1991-01-08 Delta International Machinery Corp. Measurement system having multiple display orientations
US5414420A (en) * 1992-03-23 1995-05-09 Hewlett-Packard Corporation Switch interconnect for position encoder system
US5428355A (en) * 1992-03-23 1995-06-27 Hewlett-Packard Corporation Position encoder system
JP2007093287A (ja) * 2005-09-27 2007-04-12 Tietech Co Ltd リニアモータ
JP2016206163A (ja) * 2015-04-24 2016-12-08 株式会社ミツトヨ エンコーダスケール及びその製造・取付方法

Also Published As

Publication number Publication date
JPH0358447B2 (enrdf_load_stackoverflow) 1991-09-05

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