JPS59213033A - Manufacture of vertical magnetic recording body - Google Patents

Abstract

PURPOSE:To raise magnetic characteristics by ionizing one part in a vertical vapor-deposition process of a magnetic metal or an alloy vapor. CONSTITUTION:The inside of a vacuum enclosed vessel 1 is evacuated, and an evaporating material A of a prescribed composition is heated and evaporated by an electronic beam heating device 8. On the other hand, oxygen is led in from an oxygen leading-in pipe 11, and for instance, a positive DC voltage is applied to an electrode 12 connected to a DC power source 13. An electron from an electronic beam and a secondary electron from an evaporating liquid surface are attracted to a positive electric field, and a metallic vapor and an oxygen atom are partially ionized. In this state, the vapor of a magnetic metal is vapor- deposited roughly vertically to the lower face of a tape base material B fed out of a roll 4 passing through an opening 10 and running at a constant speed along the lower end face of a can 3 being right above said opening. In this way, a vertical magnetic tape having a vertically magnetized film (a) whose magnetic characteristic has been raised is obtained around a winding roll 5.

Description

[Detailed description of the invention] The present invention is an IIB tape capable of high-density recording.

This invention relates to improvements in manufacturing methods for perpendicular magnetic recording bodies such as disks.

Conventionally, Co-0r thin films have been produced by the snow ξ ivy method or the vapor deposition method as one of the leading methods for producing perpendicular magnetization films for perpendicular magnetic recording bodies.
In the ivy method, the deposition rate is low, and for formats used for large amounts of liquid such as floppy disks and magnetic tapes, 1.
Although the vapor deposition method has a high precipitation rate, it is difficult to control a stable Or composition over a long period of time because the vapor pressures of 00 and Or differ greatly. Unless the material is heated to 200 to 300 DEG C., vertical solid-state properties cannot be obtained; in other words, a perpendicularly magnetized film cannot be obtained at room temperature. Accordingly, manufacturing costs increase as a result of using relatively expensive base materials.

Furthermore, the 0o-Or type thin 1st paper tends to cause curling of the magnetic tape and warping of the desk.

In order to eliminate the drawbacks of the conventional manufacturing method, the inventors of the present invention first coated the substrate surface with % Co, Ni or C.

When vertically depositing Ni and Ni, 02 gas is simultaneously oxidized and a part of the metal vapor is oxidized to form 0o-0,N with a specific composition ratio.
Method for manufacturing a perpendicular magnetic recording medium in which a perpendicular magnetization film made of i-0 or Co-Ni-0 is formed (￥j Gansho 58-3665
No. 3 as well as No. 58-36652), in a different way (No. 4?
proposed a method for manufacturing a perpendicular magnetic recording medium (filed on April 26, 1982) in which a perpendicularly magnetized film having a certain Fe0oNi)O composition was formed. Therefore, a good perpendicular magnetization film can be obtained by these manufacturing methods even by conventional methods.

The present invention provides a method for manufacturing a perpendicular magnetic recording body equipped with a perpendicularly magnetized film that has improved magnetic properties compared to the manufacturing method proposed earlier. Co, F directly or through a soft magnetic thin film previously formed on the surface.
When evaporating m-type metals or alloys such as e, Ni, etc. and performing substantially normal incidence evaporation, 02 is introduced and 1 of the vapor is evaporated.
In a method for manufacturing a perpendicular magnetic recording material in which a perpendicularly magnetized film is formed by oxidizing and vapor depositing a part of the metal or alloy vapor, a part of the metal or alloy vapor is oxidized and vapor-deposited to form a perpendicularly magnetized film consisting of a metal and O in a specific composition ratio. It is characterized by ionization.

Thus, according to the +J1 invention, the crystallinity of the single ferromagnetic columnar grain is improved, and the degree of crystal orientation is also increased, thereby increasing the magnetocrystalline anisotropy. In addition, lattice defects and subgrains in F:l (in the columnar islands) are also removed, orderly arranged columnar particles are obtained, and the shape magnetic anisotropy is also improved.

According to a second invention, there is further provided a method for manufacturing a perpendicular magnetic recording body having a perpendicular magnetization film with improved magnetic properties as compared to that according to the first invention.

The manufacturing method according to the first aspect of the invention is characterized in that the ionized vapor is accelerated by a direct current or alternating current electric field and is vapor-deposited vertically.

Next, an embodiment of the present invention will be described.

FIG. 1 shows a vacuum evaporation apparatus that performs water washing.

(1) shows all the vacuum closed containers, and the container (1) is 1111! There is a rotary cooling can (5) connected to the vacuum pump through the exhaust port (2) of I above.
3) and a pair of rolls +4) +5) are arranged on the left and right above it, and roll (4)'f of 11 nozzles is used for feeding the tape base material, and the other roll (5) is used for winding the tape base material. and roll (
5) is connected to an external drive motor (not shown), and the evaporation source (6) is located directly below the gun (3). ]l-provide. The evaporation source (6) consists of a crucible (7) and a Kameko beam heating device (8) for heating and evaporating a predetermined ferromagnetic metal or Vi alloy material placed therein. (9) is
The can (3) between the crucible (7) and the can (3)
Shows the anti-adhesion plate interposed except for the area directly below the lower end surface.

The vapor other than the vapor rising substantially vertically above the material A to be evaporated is blocked by the nuclear deposition plate (9).

As described below, 1 prevents obliquely incident vapor deposition on the base tape B that moves on the circumferential surface of the can (3) as shown by the arrow.
On the other hand, the rising steam is
, and transfer the lower end surface of the can (3) to the base material B.
It was arranged to be deposited substantially perpendicularly to the lower surface. αυ is
Open the nonoiso for oxygen introduction, and open the tip of the pipe 0η Mf.
A predetermined amount of accumulated acid was made to flow out toward the lower surface of the Teso B material through the pipe Oυ by opening it toward the opening OIJ marked J.

The configuration described above is the same as that of the manufacturing method of the perpendicular magnetic recording body of the invention proposed earlier, but in addition to this, the following ionization device is provided in order to carry out the manufacturing method of the invention. That is, the ionization device Vi, an ionization source provided in the space above the crucible (6), and a DC source or RF source connected thereto.
; Consisting of 9.

The polarization (2) is used as a positive electrode, and the positive DC city pressure or U IL
The F voltage is applied to ionize the gold ψ and part of the vapor and oxygen with high efficiency, as will be described in detail below. Furthermore, in order to carry out the manufacturing method of the $2 invention, in addition to this, a mesh-like accelerating pole 04) is connected to the base material 8 in the vicinity of the bottom surface of the can (3). Do D C
It is equipped with an accelerating device consisting of a source, an AO power source, and an AO power source.

Using the apparatus constructed as described above, a perpendicular magnetic recording body of the present invention is manufactured, for example, as follows.

That is, the inside of the gK waste container (1) is evacuated to 1 x 10-5 Torr or less, and the evaporation material A having a predetermined composition is heated and evaporated by the electron beam heating device (8). Oxygen is supplied from the one-way oxygen introduction pipe Oυ. For example, the evaporation rate and gas partial pressure are set to 200λ and I
Apply a positive DC voltage to. In this case, all the electrons from the electron beam and the secondary electrons from the evaporated liquid surface are attracted to the positive electric field, and at this time, in that space, the metal vapor and oxygen atoms collide with these electrons, partially converting the metal Ionization of the vapor and oxygen atoms takes place. Partial ionization of metal vapor
However, by applying a positive voltage in the presence of electrons, the electrons are attracted to the positive electric field, and metal vapor is caused to collide with the electrons, thereby producing a relatively large amount of metal vapor. In this case, the atoms in the oxygen gas will also be ionized into comparative heavy atoms 1F. As will be clear from this.

Immediately after the ionization process, in addition to applying a positive voltage of 10I pressure,
The same effect can be obtained by applying a positive voltage using an RF voltage, and in this case, the UL1=' source also acts as a deuteron generation source, so there is no need to use the entire electron beam type as the heating device (8). It can be used for non-electronic heating such as 1E heat furnace of 1 figure hunting.

Thus, a portion of the vapor of the magnetic metal material described above is converted into 2. In an ionized state, it passes along the opening curve above the tape base material B along with oxygen gas, and runs approximately perpendicularly to the lower surface of the tape base material B, which is sent out from the roll (4) running at a constant speed on the lower end surface of the can (3) directly above it. A perpendicular magnetic tape according to the invention having a perpendicular magnetization of 11!4 af on the take-up roll (5) was prepared by vapor deposition of a partially oxidized and ionized magnetic metal.

In the manufacturing method of the present invention described above, the magnetic metal material Ar is used as C0, and the vapor-deposited coffin box and 02. The 0n/7' partial pressure of the present invention was set to 200λ/x, respectively, and the I x 10-' Thor Q was constant, but the ionization value of the positive pressure was applied to the DC polarization uz was varied. A 41J perpendicular magnetic tape with a -0 series perpendicularly magnetized film was used, and the relationship between changes in its ionization current and the characteristics of the perpendicularly magnetized film was investigated. For one-sided comparison, without using the DC tunable O2, Co-0 thread = iMm 111. under the same conditions as above 1.11. A vertical fin air system with li + iii is manufactured and its aeration characteristics are measured/ζ.

The results are shown in FIG. It is clear from this that Yotsuko,
Ilc/I(C/ and Iuryu/B re
The l1rf U, i 4fri O'J and the one in which no positive 1d pressure is applied Vi is the minimum, and as the 11 flow is increased from this, the height becomes larger, 11 □ 11. Ionization flow t12. According to Yusuke 2 Genmei, who found that these -comfortability values become constant at about OA, in the case of blue (manufactured by the above-mentioned invention 1), at that time, when the DC power source O
A negative accelerating voltage is applied to the pole Oa of the mesh 1 connected to Q to produce the mesh.

In this case, the previously ionized positively charged metal vapor is shifted at the JD speed, increasing the reaction between the metal atoms and oxygen atoms and the surface diffusion of the metal atoms, and causing perpendicular magnetization on the 8 surfaces of the base material. The above-mentioned magnetic properties of the film are increased compared to the case without the addition of such accelerating means. Furthermore, in this acceleration means, an AC power source is used instead of a DC power source, and the
1) When positive and negative voltages are applied alternately to Since the atoms are also accelerated, the uniform reaction and diffusion of the metal vapor and oxygen atoms improves the effect of the DC pressure.

The ionization current is 2. Keep ON constant and accelerating accumulation α→
By varying the accelerating voltage applied from the DC or AC power source, we studied the relationship between this and the magnetic properties of the vertically saponified film of Co-0 composition. The results are shown in Figure A43. As is clear from this, when an accelerating voltage is applied, either AC or negative DC power supply.

It can be seen that the characteristics of Ilc on /15 and Br on /Br/ increase compared to when no accelerating voltage is applied, and that each characteristic increases with an increase in the accelerating voltage.

In addition, when the base material is polyethylene terephthalate (fPET), which is highly insulated, it is preferable to use an AC power supply. .

Figures 4 and 5 show Fe-10%C as the evaporation material.
Depending on the pilotage when using o-104Ni alloy (F
'Similar to the above example, the results of examining the relationship between the ionization current and acceleration pressure and their magnetic properties in the manufacturing method of a magnetic tape having a perpendicularly magnetized film having the e-Oo-N10 composition, It is recognized that there is an effect of ionization and acceleration. Incidentally, the perpendicularly magnetized film can be formed at a specific composition ratio of metal and oxygen described in the above-mentioned patent application.

That is, Co-1,5-50at%Os (Oo+-xN
ix) + -yoy (0≦x (0,40, (1,1
5<y<0.50), (FexCoyNi, )
+ -m O+n (iJ, at (110≦X≦o, o
s, 0≦2≦0.40゜Q, 15 (m (+1
．． 50, but x + y + 2 "" l + also U (
210, 40≦x;=+, 1.0.0≦2≦i1.25
, 0.25≦[n≦t1.50, where z+y+z=1).

Another aspect of the present invention is the implementation of the above! In addition to the case where 1-edge contact is applied to the base material surface as in 1, it is also applied to the surface of a soft magnetic film previously formed on the base material surface, and 1iJi similar to ij'lJ 7r is applied.
A perpendicularly magnetized film having 192 characteristics can be formed.

As described above, according to the present invention, when vertically depositing the vaporized magnetic gold alloy material 4 or its alloy material on the surface of the substrate, 02 is introduced and a part of it is oxidized to give 1 gv of oxidation perpendicularly. When forming a magnetic film, it is necessary to ionize the 7 magnetism (11), or accelerate the ionized material and vertically deposit it. The effect of improving the !lk+・L is km.

[Brief explanation of the drawing]

Fig. 1 is a side view of the 1y1 (P) used in carrying out the present invention, and Figs.・Evaporation material (11... its evaporator (3)
... Can 13 ... Tape product - material (41
15), Low /L, a-...Tare]
Self 1tn (Is 1jQ(6)... Evaporation source
(2)...Acceleration electrode (21) Figure 1 Figure 2 Ionization electrode (A) Acceleration chamber closing (V)

Claims (1)

[Scope of Claims] 1. Evaporating a magnetic metal or alloy such as 00*F e ) N 11 directly onto the surface of a non-magnetic substrate or through a soft magnetic thin film previously formed on the surface, and depositing this with substantially perpendicular incidence. In a method for producing a perpendicular magnetic recording body, in which a part of the vapor is oxidized and vapor-deposited by introducing O2 at the time of evaporation to form a perpendicularly magnetized film consisting of a metal and O having a specific composition ratio. A method for manufacturing a perpendicular magnetic recording body, which involves ionizing a part of the metal or alloy vapor during the vertical vapor deposition process to obtain a total W characteristic. 2. Oo, Fe, N1, directly on the non-magnetic base material surface or via a soft magnetic thin film previously formed on that surface.
etc.! When evaporating a soluble metal or alloy and depositing it with substantially perpendicular incidence, a part of the vapor is oxidized and deposited to form a perpendicular magnet ('ts) consisting of a metal and O in a specific composition ratio. A method for manufacturing a perpendicular magnetic recording medium that forms a film is to ionize a portion of the metal or alloy vapor during vertical vapor deposition, and then accelerate the ionized vapor using a direct current or alternating current electric field. The manufacturing method according to claim (1), characterized in that vertical vapor deposition is performed.