JPS59212710A - 静電容量型変位検出器 - Google Patents

静電容量型変位検出器

Info

Publication number
JPS59212710A
JPS59212710A JP8721883A JP8721883A JPS59212710A JP S59212710 A JPS59212710 A JP S59212710A JP 8721883 A JP8721883 A JP 8721883A JP 8721883 A JP8721883 A JP 8721883A JP S59212710 A JPS59212710 A JP S59212710A
Authority
JP
Japan
Prior art keywords
electrode
transmitting
electrodes
receiving
fixed plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8721883A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354284B2 (enrdf_load_stackoverflow
Inventor
Koji Sasaki
康二 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP8721883A priority Critical patent/JPS59212710A/ja
Priority to DE3418566A priority patent/DE3418566C2/de
Priority to US06/611,869 priority patent/US4633249A/en
Publication of JPS59212710A publication Critical patent/JPS59212710A/ja
Publication of JPH0354284B2 publication Critical patent/JPH0354284B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP8721883A 1983-05-18 1983-05-18 静電容量型変位検出器 Granted JPS59212710A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP8721883A JPS59212710A (ja) 1983-05-18 1983-05-18 静電容量型変位検出器
DE3418566A DE3418566C2 (de) 1983-05-18 1984-05-18 Verschiebungsdetektor
US06/611,869 US4633249A (en) 1983-05-18 1984-05-18 Displacement detector utilizing change of capacitance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8721883A JPS59212710A (ja) 1983-05-18 1983-05-18 静電容量型変位検出器

Publications (2)

Publication Number Publication Date
JPS59212710A true JPS59212710A (ja) 1984-12-01
JPH0354284B2 JPH0354284B2 (enrdf_load_stackoverflow) 1991-08-19

Family

ID=13908767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8721883A Granted JPS59212710A (ja) 1983-05-18 1983-05-18 静電容量型変位検出器

Country Status (1)

Country Link
JP (1) JPS59212710A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61155706U (enrdf_load_stackoverflow) * 1985-03-19 1986-09-27
JPS61235702A (ja) * 1985-04-11 1986-10-21 Mitsutoyo Mfg Corp 静電容量型ノギス
JPH032211U (enrdf_load_stackoverflow) * 1989-05-29 1991-01-10
JPH04242117A (ja) * 1991-01-16 1992-08-28 Mitsutoyo Corp 静電容量形変位測定装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61155706U (enrdf_load_stackoverflow) * 1985-03-19 1986-09-27
JPS61235702A (ja) * 1985-04-11 1986-10-21 Mitsutoyo Mfg Corp 静電容量型ノギス
JPH032211U (enrdf_load_stackoverflow) * 1989-05-29 1991-01-10
JPH04242117A (ja) * 1991-01-16 1992-08-28 Mitsutoyo Corp 静電容量形変位測定装置

Also Published As

Publication number Publication date
JPH0354284B2 (enrdf_load_stackoverflow) 1991-08-19

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