JPS5921074A - 半導体ダイヤフラム - Google Patents

半導体ダイヤフラム

Info

Publication number
JPS5921074A
JPS5921074A JP57130793A JP13079382A JPS5921074A JP S5921074 A JPS5921074 A JP S5921074A JP 57130793 A JP57130793 A JP 57130793A JP 13079382 A JP13079382 A JP 13079382A JP S5921074 A JPS5921074 A JP S5921074A
Authority
JP
Japan
Prior art keywords
rigid body
diaphragm
central rigid
groove
peripheral fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57130793A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6337512B2 (cg-RX-API-DMAC7.html
Inventor
Kenkichi Takadera
高寺　賢吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP57130793A priority Critical patent/JPS5921074A/ja
Publication of JPS5921074A publication Critical patent/JPS5921074A/ja
Publication of JPS6337512B2 publication Critical patent/JPS6337512B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Pressure Sensors (AREA)
JP57130793A 1982-07-27 1982-07-27 半導体ダイヤフラム Granted JPS5921074A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57130793A JPS5921074A (ja) 1982-07-27 1982-07-27 半導体ダイヤフラム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57130793A JPS5921074A (ja) 1982-07-27 1982-07-27 半導体ダイヤフラム

Publications (2)

Publication Number Publication Date
JPS5921074A true JPS5921074A (ja) 1984-02-02
JPS6337512B2 JPS6337512B2 (cg-RX-API-DMAC7.html) 1988-07-26

Family

ID=15042819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57130793A Granted JPS5921074A (ja) 1982-07-27 1982-07-27 半導体ダイヤフラム

Country Status (1)

Country Link
JP (1) JPS5921074A (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102754382B1 (ko) 2019-08-15 2025-01-14 도레이 카부시키가이샤 전지용 세퍼레이터 및 그 제조 방법
EP4120459A4 (en) 2020-03-11 2024-10-23 Toray Industries, Inc. SEPARATOR FOR BATTERIES

Also Published As

Publication number Publication date
JPS6337512B2 (cg-RX-API-DMAC7.html) 1988-07-26

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