JPS59210520A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPS59210520A JPS59210520A JP8347883A JP8347883A JPS59210520A JP S59210520 A JPS59210520 A JP S59210520A JP 8347883 A JP8347883 A JP 8347883A JP 8347883 A JP8347883 A JP 8347883A JP S59210520 A JPS59210520 A JP S59210520A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- carbon film
- magnetic head
- magnetic
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
- G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
Abstract
Description
【発明の詳細な説明】
本発明は、例えば薄膜磁気再生ヘッドや垂直磁気記録再
生ヘッドなどのように基板上に薄膜状の感磁層を形成し
た磁気ヘッドに係り、特にそれの基板に関する８
この種磁気ヘッドは使用の際、磁気テープや磁気ディス
クなどの磁気記録媒体が磁気ヘッドの基板端面に摺接す
るため、基板に耐摩耗性が要求される。この種磁気ヘッ
ドの基板として、従来は合成樹脂板やガラス板などが用
いられていたが耐摩耗性が十分でなく、基板の摩耗にと
もなって感磁層が損耗する欠点があった。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic head in which a thin film magnetically sensitive layer is formed on a substrate, such as a thin film magnetic reproducing head or a perpendicular magnetic recording/reproducing head, and particularly relates to the substrate thereof. When a magnetic head is used, a magnetic recording medium such as a magnetic tape or a magnetic disk comes into sliding contact with the end surface of the substrate of the magnetic head, so the substrate is required to have wear resistance. Synthetic resin plates, glass plates, and the like have conventionally been used as substrates for this type of magnetic head, but they lack sufficient wear resistance and have the disadvantage that the magnetically sensitive layer is worn out as the substrate wears.
本発明の目的は、このような従来技術の欠点を解消し、
耐用寿命の長い、性能の安定した磁気ヘッドを提供する
にある。The purpose of the present invention is to eliminate such drawbacks of the prior art,
Our goal is to provide magnetic heads with long service life and stable performance.
この目的を達成するため、本発明は、例えば合成樹脂、
ガラスあるいはセラミックなどからなる基板の表面に、
例えば磁気抵抗効果素子あるいは軟磁性材料などからな
る薄膜状の感磁層を形成してなる磁気ヘッドにおいて、
前記基板の少な（とも磁気テープあるいは磁気ディスク
などの磁気記録媒体が摺接する表面に、非晶質構造の炭
素膜が形成されていることを特徴とするものである。To achieve this objective, the present invention utilizes, for example, synthetic resins,
On the surface of a substrate made of glass or ceramic,
For example, in a magnetic head formed with a magnetoresistive element or a thin magnetically sensitive layer made of a soft magnetic material,
The present invention is characterized in that a carbon film having an amorphous structure is formed on the surface of the substrate (which is in sliding contact with a magnetic recording medium such as a magnetic tape or a magnetic disk).
前記非晶質構造の炭素膜は、減圧下において炭化水素系
化合物に高周波電界を加えてプラズマ分解させて、基板
表面に析出させることによって形成することができる。The carbon film having an amorphous structure can be formed by applying a high frequency electric field to a hydrocarbon compound under reduced pressure to cause plasma decomposition, and depositing it on the substrate surface.
。
前記炭化水素系化合物としては、パラフィン系炭化水素
やオレフィン系炭化水素などの鎖式炭化水素、あるいは
芳族炭化水素や脂環式炭化水素などの環式炭化水素が用
いられる。. As the hydrocarbon compound, chain hydrocarbons such as paraffin hydrocarbons and olefin hydrocarbons, or cyclic hydrocarbons such as aromatic hydrocarbons and alicyclic hydrocarbons are used.
次に本発明の実施例を図とともに説明する。第１図ない
し第３図は、第１実施例に係る薄膜磁気再生ヘッドを説
明するための図である。薄膜磁気再生ヘッドは、ホルダ
１と磁気抵抗効果素子組立体２とから主に構成されてい
る。第１図に示すよ５にホルダ１の磁気テープ３と接触
する側には窓４を有し、それの裏側は開口凹部５となっ
ている１、この開口凹部５から窓４の方向に回げて？み
気ｊル抗効呆素子組立体２が挿入され、隙間ｉｃ ５ｔ
、填した妾着剤６で固着される。Next, embodiments of the present invention will be described with reference to the drawings. 1 to 3 are diagrams for explaining a thin film magnetic reproducing head according to a first embodiment. The thin film magnetic reproducing head mainly consists of a holder 1 and a magnetoresistive element assembly 2. As shown in FIG. 1, there is a window 4 on the side of the holder 1 that comes into contact with the magnetic tape 3, and an opening recess 5 is formed on the back side of the holder 1. Get it? The air resistance element assembly 2 is inserted, and the gap IC is 5t.
, and is fixed with the adhesive agent 6 filled therein.
磁気抵抗効果素子組立体２は第２図に６よび第３図に示
すように、基板７と、その基板７０表面でかつ磁気テー
プ３と接触するように端部に形成された磁気抵抗効果素
子８と、基板７の狭面に形成され一端が磁気抵抗効果素
子８の端部にそれぞれ接続されて他端が基板７の後方ま
で延びた２つのリード部９と、前記磁気抵抗効果素子８
ならびにリード部９を覆う保護膜１０（第３図参照ンと
から構成されている。As shown in FIGS. 2 and 3, the magnetoresistive element assembly 2 includes a substrate 7 and a magnetoresistive element formed on the surface of the substrate 70 and at the end thereof so as to be in contact with the magnetic tape 3. 8, two lead parts 9 formed on the narrow surface of the substrate 7, one end of which is connected to the end of the magnetoresistive element 8, and the other end of which extends to the rear of the substrate 7, and the magnetoresistive element 8.
and a protective film 10 (see FIG. 3) that covers the lead portion 9.
前記基板７は例えば合成樹脂、ガラスある（・はセラミ
ックなどからなり、それの磁気テープ３と接触する側の
端面には磁気抵抗効果素子８およびリード部９を形成す
る前に、非晶質構造の炭素膜１１が全面にわたって形成
されている。この戻素ｉ摸１１は犬のようにして設けら
れる。The substrate 7 is made of, for example, synthetic resin, glass, or ceramic.The end surface of the substrate 7 that contacts the magnetic tape 3 is coated with an amorphous structure before forming the magnetoresistive element 8 and the lead portion 9. A carbon film 11 is formed over the entire surface.This return element i pattern 11 is provided like a dog.
すなわち、誘導結合型のプラズマ分解析出装置（径が５
０鴫の石英管）内に所定の大きさの基板７を入れ、容器
内を１０−４〜１０＝’Ｔｏｒｒに減圧する。In other words, an inductively coupled plasma analysis device (with a diameter of 5
A substrate 7 of a predetermined size is placed in a quartz tube of 0.0 to 0.0 Torr, and the pressure inside the container is reduced to 10-4 to 10 Torr.
次にその容器内に純度９８．３体積％のプロノくンガス
を４０ ｍＴｏｒｒ になるように導入し、周波数１
３．５６ＭＨｚ、電力２０Ｗで高周波電界を印加する。Next, Pronokun gas with a purity of 98.3% by volume was introduced into the container at a pressure of 40 mTorr, and a frequency of 1
A high frequency electric field is applied at 3.56 MHz and a power of 20 W.
これによってプラズマ状に分解し、基板７の表面に炭素
が順次析出し、厚さ約１０μｍの炭素膜１１が形成され
る。As a result, it decomposes into plasma, and carbon is sequentially deposited on the surface of the substrate 7, forming a carbon film 11 with a thickness of about 10 μm.
炭素膜１１の堆積速度は約１０．０〜２００− であり
、炭素膜１１はＸ線回折の結果炭素の回折線は見られず
非晶質であることが確認された、またこの炭素膜１１の
赤外線スペクトルをとってみたとこへ２９００ｃｍ ’
、 １４６０／Ｍ□１および１３８０ｚ１にそれぞれＣ
−Ｈ，の伸縮振動ｒ Ｃ−Ｈ２Ｔｅ−Ｊの変角振動によ
る強し・吸収が観察され、その結果この非晶質炭素には
水素が強く結合していることが解明された。さらにこの
炭素膜１１をマイクロビッカース硬度計を用いて硬度測
定をしたところ、ダイヤモンド圧子の圧痕は見られず測
定不可能であった。このことから析出形成された炭素膜
１１は、極めて高硬度であることが分かる。The deposition rate of the carbon film 11 was about 10.0 to 200 -, and as a result of X-ray diffraction, it was confirmed that the carbon film 11 was amorphous with no carbon diffraction lines observed. I took the infrared spectrum of 2900cm'
, C to 1460/M□1 and 1380z1, respectively.
-H, stretching vibration r C-H2Te-J strength and absorption due to bending vibration were observed, and as a result, it was clarified that hydrogen is strongly bonded to this amorphous carbon. Furthermore, when the hardness of this carbon film 11 was measured using a micro-Vickers hardness meter, no indentations of the diamond indenter were observed and measurement was impossible. This shows that the carbon film 11 deposited has extremely high hardness.
このようにして炭素膜１１を形成したのち、公知の方法
によって磁気抵抗効果素子８．リード部９．９ならびに
二酸化ケイ素からなる保護１Ｊ１０が順次形成されて磁
気抵抗効果素子組立体が得られる。この組立体のリード
部９，９に第１図に示す如くリード線１２．１２が半田
刊けされ、その後ホルダ１に組込まれて薄膜磁気再生ヘ
ッドとなる。この再生ヘッドの使用時には、第２図に示
すように磁気抵抗効果素子８の端面と炭素膜１１とが走
行する磁気テープ３と接触して、信号の読取りがなされ
る。After forming the carbon film 11 in this manner, the magnetoresistive effect element 8. A lead portion 9.9 and a protection layer 1J10 made of silicon dioxide are sequentially formed to obtain a magnetoresistive element assembly. Lead wires 12 and 12 are soldered to the lead portions 9, 9 of this assembly as shown in FIG. 1, and then assembled into the holder 1 to form a thin film magnetic reproducing head. When this reproducing head is used, as shown in FIG. 2, the end face of the magnetoresistive element 8 and the carbon film 11 come into contact with the running magnetic tape 3, and signals are read.
第４図は、本発明の第２実施例に係る垂直磁気記録再生
ヘッドを説明するための図である。このヘッドは、軟磁
性材からなる主磁極２１と補助磁極２２とから主に構成
される。主磁極２１は、ガラスやポリイミドなどの基板
２３０片面にスパッタリングによって約１μｍ厚に形成
される訳であるが、この主磁極２１を形成する前に基板
２３の磁気ディスク２４と対向する側の端面に非晶質構
造の炭素膜２５が形成される。この炭素膜２５の形成方
法は第１実施例で説明した方法と同様であるので、ここ
ではその説明を省略する。前記補助磁極２２には、励磁
コイル２６が所定ターン数巻回される。FIG. 4 is a diagram for explaining a perpendicular magnetic recording/reproducing head according to a second embodiment of the present invention. This head is mainly composed of a main magnetic pole 21 and an auxiliary magnetic pole 22 made of a soft magnetic material. The main magnetic pole 21 is formed on one side of a substrate 230 made of glass or polyimide to a thickness of approximately 1 μm by sputtering. A carbon film 25 having an amorphous structure is formed. The method for forming this carbon film 25 is the same as the method described in the first embodiment, so its description will be omitted here. An excitation coil 26 is wound around the auxiliary magnetic pole 22 for a predetermined number of turns.
主磁極２１と補助磁極２２との間に配置される磁気ディ
スク２４はベースフィルム２７と磁性層２８とから構成
され、この磁性層２７が主磁極２１の端面ならびに炭素
膜２５と摺接するようになっている。The magnetic disk 24 disposed between the main magnetic pole 21 and the auxiliary magnetic pole 22 is composed of a base film 27 and a magnetic layer 28, and the magnetic layer 27 comes into sliding contact with the end face of the main magnetic pole 21 and the carbon film 25. ing.
前記励磁コイル２６に記録されるべき信号電流を流して
主磁極２１を補助磁極２２側から励磁すると、主磁極２
１の先端付近に強い垂直磁界が発生する。これによって
磁性層２８がそれの厚さ方向に磁化されて、所望の磁気
記録がなされる。When the main magnetic pole 21 is excited from the auxiliary magnetic pole 22 side by passing a signal current to be recorded in the excitation coil 26, the main magnetic pole 21 is excited from the auxiliary magnetic pole 22 side.
A strong vertical magnetic field is generated near the tip of 1. As a result, the magnetic layer 28 is magnetized in the direction of its thickness, thereby achieving desired magnetic recording.
前述した非晶質の炭素膜はダイヤモンドとほぼ同等の硬
度、耐摩耗性を有しているから、この炭素膜でヘッド基
板の少なくとも磁気記録媒体と摺接する表面を覆ってお
けば、基板の耐摩耗性が向上し、結局、磁気ヘッドの長
寿命化が図れる。また、炭素膜の形成によって耐摩耗性
が向上するから、基板の材質は特に限定されず選択範囲
が拡張され、コストの低減が図れる。The aforementioned amorphous carbon film has almost the same hardness and wear resistance as diamond, so if this carbon film covers at least the surface of the head substrate that makes sliding contact with the magnetic recording medium, the durability of the substrate can be improved. Abrasion resistance is improved, and as a result, the life of the magnetic head can be extended. Furthermore, since the wear resistance is improved by forming the carbon film, the material of the substrate is not particularly limited, and the range of selection is expanded, and costs can be reduced.
第１図ないし第３図は本発明の第１実施例に係る薄膜磁
気再生ヘッドを説明するための図で、第１図はその再生
ヘッドの縦断面図、第２図はそのヘッドに用いられる磁
気抵抗効果素子組立体の保護膜形成前の平面図、第３図
はその組立体の保護膜形成後の正面図、第４図は本発明
の第２実施例に係る垂直磁気記録再生ヘッドの使用態様
を示す断面図である。
３・・・・・・磁気テープ、７・・・・・・基板、８・
・・・・・磁気抵抗効果素子、１１・・・・・・炭素膜
、２１・・・・・・主磁極、２３・・・・・・基板、２
４・・・・・・磁気ディスク、２５・・・・・・炭素膜
。
第１図
第３図
第２図
第４図1 to 3 are diagrams for explaining a thin-film magnetic reproducing head according to a first embodiment of the present invention, in which FIG. 1 is a vertical cross-sectional view of the reproducing head, and FIG. 2 is a view used in the head. FIG. 3 is a plan view of the magnetoresistive element assembly before the protective film is formed, FIG. 3 is a front view of the assembly after the protective film is formed, and FIG. 4 is a perpendicular magnetic recording/reproducing head according to the second embodiment of the present invention. It is a sectional view showing a mode of use. 3...magnetic tape, 7...substrate, 8.
... Magnetoresistive element, 11 ... Carbon film, 21 ... Main magnetic pole, 23 ... Substrate, 2
4... Magnetic disk, 25... Carbon film. Figure 1 Figure 3 Figure 2 Figure 4
Claims (1)
ドにおいて、前記基板の少なくとも磁気記録媒体が摺接
する表面に非晶質構造の炭素膜が形成されていることを
特徴とする磁気ヘッド、（す、特許請求の範囲第（１）
項記載において、前記炭素膜が水素結合炭素膜であるこ
とを特徴とする磁気ヘッド。 （す、特許請求の範囲第（１）項記載において、前記炭
素膜が、減圧下において炭化水素系化合物に高周波電界
を加えてプラズマ分解させて析出した炭素膜であること
を特徴とする磁気ヘッド。 （す、特許請求の範囲第（１）項記載において、前記炭
素膜が基板の端面に形成されていることを特徴とする磁
気ヘッド。 （Ｓ）、特許請求の範囲第（１）項記載におト・て、前
記感磁層が磁気抵抗効果素子で構成されていることを特
徴とする磁気ヘッド、１ （す、特許請求の範囲第（１）項記載において、ｆｉｆ
前記感磁層が軟磁性材料で構成されていることを特徴と
する磁気ヘッド。[Scope of Claims] (In a magnetic head formed by forming a thin film-like magnetically sensitive layer on a substrate, an amorphous carbon film is formed on at least the surface of the substrate in sliding contact with the magnetic recording medium. A magnetic head characterized in that: (Claim No. (1))
2. A magnetic head according to item 1, wherein the carbon film is a hydrogen-bonded carbon film. (A magnetic head according to claim (1), wherein the carbon film is a carbon film deposited by plasma decomposition by applying a high frequency electric field to a hydrocarbon compound under reduced pressure. (S) A magnetic head as set forth in claim (1), characterized in that the carbon film is formed on an end surface of a substrate. (S) as set forth in claim (1). A magnetic head, 1, characterized in that the magnetically sensitive layer is constituted by a magnetoresistive element (in claim (1), fif
A magnetic head, wherein the magnetically sensitive layer is made of a soft magnetic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8347883A JPS59210520A (en) | 1983-05-14 | 1983-05-14 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8347883A JPS59210520A (en) | 1983-05-14 | 1983-05-14 | Magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59210520A true JPS59210520A (en) | 1984-11-29 |
| JPH0376530B2 JPH0376530B2 (en) | 1991-12-05 |
Family
ID=13803570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8347883A Granted JPS59210520A (en) | 1983-05-14 | 1983-05-14 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59210520A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2611970A1 (en) * | 1987-03-06 | 1988-09-09 | Thomson Csf | METHOD FOR MAKING A THIN-FILM MAGNETIC HEAD AND APPLICATION TO A RECOVERY / READING HEAD |
| WO1994005007A2 (en) * | 1992-08-21 | 1994-03-03 | Minnesota Mining And Manufacturing Company | Bidirectional thin-film magnetoresistive tape head assembly |
| WO1995018442A1 (en) * | 1993-12-30 | 1995-07-06 | Seagate Technology, Inc. | Amorphous diamond-like carbon gaps in magnetoresistive heads |
| US5640292A (en) * | 1996-01-17 | 1997-06-17 | Seagate Technology, Inc. | Diamond-like carbon encapsulation of magnetic heads |
| US5644455A (en) * | 1993-12-30 | 1997-07-01 | Seagate Technology, Inc. | Amorphous diamond-like carbon gaps in magnetoresistive heads |
| US5658470A (en) * | 1995-12-13 | 1997-08-19 | Seagate Technology, Inc. | Diamond-like carbon for ion milling magnetic material |
| US5681426A (en) * | 1995-12-13 | 1997-10-28 | Seagate Technology, Inc. | Diamond-like carbon wet etchant stop for formation of magnetic transducers |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5334898A (en) * | 1976-08-23 | 1978-03-31 | Gen Electric | Process for preparing silicone compound |
| JPS53132322A (en) * | 1977-04-22 | 1978-11-18 | Nec Corp | Magnetic head |
-
1983
- 1983-05-14 JP JP8347883A patent/JPS59210520A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5334898A (en) * | 1976-08-23 | 1978-03-31 | Gen Electric | Process for preparing silicone compound |
| JPS53132322A (en) * | 1977-04-22 | 1978-11-18 | Nec Corp | Magnetic head |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2611970A1 (en) * | 1987-03-06 | 1988-09-09 | Thomson Csf | METHOD FOR MAKING A THIN-FILM MAGNETIC HEAD AND APPLICATION TO A RECOVERY / READING HEAD |
| WO1994005007A2 (en) * | 1992-08-21 | 1994-03-03 | Minnesota Mining And Manufacturing Company | Bidirectional thin-film magnetoresistive tape head assembly |
| WO1994005007A3 (en) * | 1992-08-21 | 1994-04-28 | Minnesota Mining & Mfg | Bidirectional thin-film magnetoresistive tape head assembly |
| US5331493A (en) * | 1992-08-21 | 1994-07-19 | Minnesota Mining And Manufacturing Company | Bidirectional thin-film magnetoresistive tape head assembly |
| US5541793A (en) * | 1992-08-21 | 1996-07-30 | Minnesota Mining And Manufacturing Company | Bidirectional thin-film magnetoresistive tape head assembly |
| WO1995018442A1 (en) * | 1993-12-30 | 1995-07-06 | Seagate Technology, Inc. | Amorphous diamond-like carbon gaps in magnetoresistive heads |
| US5644455A (en) * | 1993-12-30 | 1997-07-01 | Seagate Technology, Inc. | Amorphous diamond-like carbon gaps in magnetoresistive heads |
| US5658470A (en) * | 1995-12-13 | 1997-08-19 | Seagate Technology, Inc. | Diamond-like carbon for ion milling magnetic material |
| US5681426A (en) * | 1995-12-13 | 1997-10-28 | Seagate Technology, Inc. | Diamond-like carbon wet etchant stop for formation of magnetic transducers |
| US6215630B1 (en) | 1995-12-13 | 2001-04-10 | Seagate Technology Llc | Diamond-like carbon and oxide bilayer insulator for magnetoresistive transducers |
| US5640292A (en) * | 1996-01-17 | 1997-06-17 | Seagate Technology, Inc. | Diamond-like carbon encapsulation of magnetic heads |
| US5718949A (en) * | 1996-01-17 | 1998-02-17 | Seagate Technology, Inc. | Diamond-like carbon encapsulation of magnetic heads |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0376530B2 (en) | 1991-12-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5609948A (en) | Laminate containing diamond-like carbon and thin-film magnetic head assembly formed thereon | |
| US5837392A (en) | Soft magnetic thin film and thin film magnetic head using same | |
| JPS59210520A (en) | Magnetic head | |
| JPS60177420A (en) | Composite type thin film magnetic head and its production | |
| US6256171B1 (en) | Thin film magnetic head having an improved heat dispersion and magnetic recording apparatus using the same | |
| Bertram et al. | DC modulation noise in thin metallic media and its application for head efficiency measurements | |
| JPS6231010A (en) | Magnetic head | |
| JPH0612615A (en) | Magnetic head and magnetic disk | |
| US5218499A (en) | Thin-film magnetic head for perpendicular magnetic recording having a magnetic member with grooves crossing at right angles formed in a principal surface thereof | |
| JPS6275924A (en) | Unified thin film magnetic head | |
| JPS62177710A (en) | Vertical magnetic head | |
| Wang et al. | A perpendicular contact recording head with high moment laminated FeAlN/NiFe pole tips | |
| US20040233586A1 (en) | Magnetic head | |
| JPS6173220A (en) | Magneto-resistance type head | |
| JPS61248214A (en) | Thin film magnetic head | |
| O'Kane et al. | A thin film magnetoresistive head for quarter-inch tape applications | |
| US6183891B1 (en) | Magnetic head and method of manufacture | |
| JP2761969B2 (en) | Laminated substrate for perpendicular magnetic recording / reproducing thin film head | |
| JPS60256904A (en) | Magnetic head | |
| JPS60185214A (en) | Magnetic head | |
| JPH10260089A (en) | Temperature measuring device | |
| JPS62285211A (en) | Perpendicular magnetization type thin film head | |
| JPS60119610A (en) | Single magnetic pole type magnetic head for vertical recording | |
| JPH08203059A (en) | Magnetic recording medium | |
| JPS61248213A (en) | Thin film magnetic head |