JPS59194047U - 同軸反射形光学検査器 - Google Patents

同軸反射形光学検査器

Info

Publication number
JPS59194047U
JPS59194047U JP8707083U JP8707083U JPS59194047U JP S59194047 U JPS59194047 U JP S59194047U JP 8707083 U JP8707083 U JP 8707083U JP 8707083 U JP8707083 U JP 8707083U JP S59194047 U JPS59194047 U JP S59194047U
Authority
JP
Japan
Prior art keywords
optical inspection
inspection device
reflective optical
coaxial
optical axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8707083U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0131958Y2 (cs
Inventor
紀臣 三好
橘　幸正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP8707083U priority Critical patent/JPS59194047U/ja
Publication of JPS59194047U publication Critical patent/JPS59194047U/ja
Application granted granted Critical
Publication of JPH0131958Y2 publication Critical patent/JPH0131958Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP8707083U 1983-06-09 1983-06-09 同軸反射形光学検査器 Granted JPS59194047U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8707083U JPS59194047U (ja) 1983-06-09 1983-06-09 同軸反射形光学検査器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8707083U JPS59194047U (ja) 1983-06-09 1983-06-09 同軸反射形光学検査器

Publications (2)

Publication Number Publication Date
JPS59194047U true JPS59194047U (ja) 1984-12-24
JPH0131958Y2 JPH0131958Y2 (cs) 1989-10-02

Family

ID=30216993

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8707083U Granted JPS59194047U (ja) 1983-06-09 1983-06-09 同軸反射形光学検査器

Country Status (1)

Country Link
JP (1) JPS59194047U (cs)

Also Published As

Publication number Publication date
JPH0131958Y2 (cs) 1989-10-02

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