JPS59192989A - Bellows - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a bellows for use in a vacuum device, especially a bellows for use in a vacuum device.

[Background of the invention]

In an apparatus that moves a sample in a high vacuum to perform processing such as ion implantation, surface analysis, observation, etc., the sample is often moved mechanically. In particular, in a vacuum device such as the one described above, it is extremely important to have airtight seals for the linear mechanism parts that require lubrication and for the parts where the driving force is introduced from the atmosphere into the vacuum.

In a vacuum device such as the one described above, it is desirable to arrange the mechanical parts in the atmosphere as much as possible, and a bellows is often used for airtight sealing.

FIG. 1 is a diagram showing an embodiment using a conventional airtight sealing mechanism e-bellows for a linear motion part. The sample table 1, which moves in a straight line, and the three-dynamic system 3, which is arranged outside the vacuum chamber 2, are connected to the vacuum chamber 2 via a shaft 4 and a bellows 5. If the bellows is stretched beyond the allowable limit, it will be damaged, and if the bellows is made too long, it will buckle and the bellows will be damaged.

[Purpose of the invention]

An object of the present invention is to provide a bellows that does not lose its flexibility even when it is long and is not damaged by buckling or the like.

[Summary of the invention]

In the present invention, an intermediate ring having a shaft insertion hole bored in the center is arranged between a plurality of bellows, and a movable flange is attached to one end of the bellows including the intermediate ring, and a movable flange is attached to the other end of the bellows. These fixed flannons are arranged respectively, and the intermediate ring and the bellows are lined up (P) and the rose and the flange are hermetically joined (V) to form a multi-stage long bellows, and the intermediate ring and flange are connected to the outside of the bellows to form a multi-stage long bellows. The bellows is characterized by being connected by multiple wires of equal length, so that even if the bellows is long, it will not lose its l-11 flexibility and will not be damaged by buckling or the like. It is strained.

[Embodiments of the invention]

An embodiment of the present invention will be described with reference to Figure 2 and Figure 3. FIG. 2 is a diagram showing an embodiment in which the bellows of the present invention is applied to a linearly moving part. FIG. 3 is a diagram showing details of essential parts of the embodiment shown in FIG. 2V.

1 As shown in Figures 2 and 3, the bellows 5' with a length within the range that does not cause buckling can be expanded and contracted to a specified degree. 5' has a shaft insertion hole 6 having a diameter larger than the outer diameter of the bellows 5', through which the shaft 4' which runs straight through the center allows smooth sliding. A movable flange [Oa] and a fixed flange] having M number of eights 8 that can be passed through one wire 7 is arranged on the circumference of Ob is arranged at one end and the other end of the bellows 5' including the intermediate ring 9, and the movable flange 1aa, the fixed flange 10b, and the intermediate ring 9?
The bellows 5' and the intermediate ring 9 are lined up so that the holes 8 and 8' through which the wire 7 is passed are facing each other. The bellows 5' and the movable flange]Oa and the fixed flange]Ob are hermetically joined. M wires 7 of equal length to the maximum length t of the multi-stage long bellows formed in this way are then connected to the fixed flange 10bi from the movable flange]Oa side via the intermediate ring 9. Pass through continuously,
Use screws 11 so that the allowable stretch of the bellows 5' is not exceeded, and the maximum stretch of the bellows 5' is placed evenly against the N bellows 5'.
Move wire 7 to movable flage] Oa, intermediate ring 9. Fixed flange] Ob# is fixed. The straight-moving shaft 4' passes through the movable flange]Oa through the bellows 5', the intermediate ring 9, and the fixed flange]Ob, and the movable flange]
A shaft 4' that moves straight through Oa, a fixed flanone lObke vacuum chamber 2', and a 11. One end of a straight shaft 4' pulled out to the atmosphere side is connected to a straight drive mechanism 3'F in an airtight manner via a gasket 12, respectively.

In the bellows of this embodiment, the amount of elongation of the bellows alone due to the linear movement of the shaft that moves straight by the wire can be suppressed by one degree of allowable elongation, and the center position of the bellows can be controlled by the intermediate ring from the shaft that moves straight. This can prevent damage such as buckling that impairs flexibility.

FIG. 4 shows another embodiment of the present invention, in which a portion e of the intermediate link 9' corresponding to the outer surface of the shaft 4'' is a ball bearing J3.
There is a lot of trouble. In addition, in Fig. 4, the l1lI
Components and the like that are the same as those in FIG. 3 are designated by the same reference numerals and their explanations will be omitted.

With the bellows of this embodiment, it is possible to obtain the same effect as that of the embodiment of the present invention described above, and when the shaft has linear and rotational functions, the ball bearing is more effective than the shaft. It is possible to prevent rotational motion or mixed rotational and linear motion from being transmitted to the bellows, and torsion of the bellows due to these Vs can be prevented.

〔Effect of the invention〕

Is uninvented as explained above? An intermediate ring with a shaft insertion hole drilled in the center is placed between multiple bellows,
A movable flange at one end of the bellows containing the intermediate ring,
A fixed flange is placed at the other end, and the intermediate ring and bellows are lined up and the bellows and flange are carefully joined to form a multi-stage long bellows.The intermediate ring and flange are connected in multiple stages on the outside of the bellows. By connecting multiple wires of equal length to the maximum length of the long bellows, the extension of the bellows itself can be suppressed, and the center position of the bellows can be controlled by the shaft via the intermediate ring. This has the effect of preventing damage such as buckling that would impair the flexibility of the bellows.

[Brief explanation of the drawing]

Fig. 1 is a longitudinal cross-sectional view of a conventional bellows used in an airtight sole P of a linear movement mechanism, and Fig. 2 shows an embodiment of the bellows according to the present invention. Sole? FIG. 3 is an enlarged longitudinal sectional view of the main part of FIG. 2, and FIG. 4 is an enlarged longitudinal sectional view of the mold part showing an embodiment of the bellows pond according to the present invention. 5'... /< O-s, 6... Shaft insertion hole, 7
...Wire, 9,9'...Intermediate ring, ]Oa...Movable fludge, Job...Fixed flagge 1 Figure '1' 20 Year 3 Figure 1 Year 4 Figure

Claims (1)

[Claims] 1. An intermediate ring having a shaft insertion hole bored in the center is arranged between a plurality of bellows, a movable flange is arranged at one end of the bellows containing the intermediate ring, and a fixed flange is arranged at the other end, A ring and the bellows as well as the bellows and the flange are hermetically joined to form a multi-stage long bellows, and the intermediate ring and the flange are joined on the outside of the bellows to a maximum length V of the multi-stage long bellows.
This bellows is characterized by being connected by multiple wires of equal length.