JPS59184579A - Laser device - Google Patents

Laser device

Info

Publication number
JPS59184579A
JPS59184579A JP5765583A JP5765583A JPS59184579A JP S59184579 A JPS59184579 A JP S59184579A JP 5765583 A JP5765583 A JP 5765583A JP 5765583 A JP5765583 A JP 5765583A JP S59184579 A JPS59184579 A JP S59184579A
Authority
JP
Japan
Prior art keywords
electrodes
spacer
electrode
aperture
laser device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5765583A
Other languages
Japanese (ja)
Other versions
JPH0464195B2 (en
Inventor
Shigenori Yagi
重典 八木
Shuji Ogawa
小川　周治
Masaki Kuzumoto
昌樹 葛本
Kimiharu Yasui
公治 安井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5765583A priority Critical patent/JPS59184579A/en
Publication of JPS59184579A publication Critical patent/JPS59184579A/en
Publication of JPH0464195B2 publication Critical patent/JPH0464195B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To enable to easily obtain a laser light of good beam quality by a method wherein spacers of the same shape keeping electrode interval constant are provided at both ends between the electrodes. CONSTITUTION:The opposed surface of at least one electrode 2 of the electrodes 2 opposed to each other is covered with a dielectric 3, discharge is caused by impressing an AC voltage between the electrodes 2 in a gas flow, thus oscillating the laser light. The spacers 70 of the same shape keeping the interval of the electrodes 2 constant are provided at both ends between the electrodes 2 in such a device, for example, the spacer 70 is made of ceramic and has a hole corresponding to an aperture 7, which holes is coincident with the optical axis. Besides, the spacer 70 is composed of the first spacer part 71 keeping the electrode interval constant and a checking part 72 which checks to the side surface of the electrode 2 when the center of the aperture 7 comes coincident with the optical axis 9.

Description

【発明の詳細な説明】 この発明はレーザ装置、とくに、無声放電式レーザ装置
の電極間隔の保持に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to maintaining the electrode spacing of a laser device, particularly a silent discharge laser device.

従来、この種の装置として第１図に示すものがあった。Conventionally, there has been a device of this type as shown in FIG.

第１図は、従来の無声放電式レーザ装置を示す構成図で
あ名。図において、（１）は交流電源。FIG. 1 is a block diagram showing a conventional silent discharge laser device. In the figure, (1) is an AC power supply.

（２）は対向する電極であり、たとえば鋼管でできてい
る。（３）は、対向する二つの電極（２）の各対向面を
覆う誘電体で９例えば鋼管に溶着されるガラスよりなる
。（４）は電極（２）間に交流電圧を印加することによ
って生ずる放電を示す。（５）は部分反射ミラー。(2) is an opposing electrode, which is made of, for example, a steel pipe. (3) is a dielectric material 9 that covers each opposing surface of the two opposing electrodes (2), and is made of, for example, glass welded to a steel pipe. (4) shows a discharge caused by applying an alternating voltage between electrodes (2). (5) is a partially reflective mirror.

（６）は全反射ミラー、（７）はレーザ光を収束させる
アパーチャ、（８）は気体流で９紙面に垂直方向に流れ
ている。（９）はレーザ光で、光軸の方向を示す。叫は
ケース、　＋１１＋は一方の電極（２）を固定する固定
基台。(6) is a total reflection mirror, (7) is an aperture that converges the laser beam, and (8) is a gas flow flowing in a direction perpendicular to the plane of the paper. (9) is a laser beam and indicates the direction of the optical axis. The figure is the case, and +11+ is the fixed base that fixes one electrode (2).

α■は他方の電極（２）を保持すると共に、上記一方の
電極（２）との間隔を一定に保つ、ギャップ調整固定具
である。ＯＪはアパーチャ（７）の中心を光軸（９）と
＝（２） 致させるアパーチャ位置調整固定具である。α■ is a gap adjustment fixture that holds the other electrode (2) and maintains a constant distance from the one electrode (2). OJ is an aperture position adjustment fixture that aligns the center of the aperture (7) with the optical axis (9).

次に動作について説明する。気体流（８）中で、誘電体
（３）で覆われた電極（２）に電源（１）から交流高周
波電圧を印加し、電極間に放電（４）を生じさせる。こ
の放電は詳しくは無声放電、　５ｉｌｅｎｔ　ｄｉｓｃ
ｈａｒｇｅと呼ばれる。放電（４）の領域をはさんで９
部分反射ミラー（５）と全反射ミラー（６）を対置し、
レーザ光（９）を発生させる。Next, the operation will be explained. In a gas flow (8), an AC high frequency voltage is applied from a power source (1) to an electrode (2) covered with a dielectric (3) to generate a discharge (4) between the electrodes. This discharge is described in detail as silent discharge, 5ilent disc
It is called harge. 9 across the area of discharge (4)
A partial reflection mirror (5) and a total reflection mirror (6) are placed oppositely,
Generate laser light (9).

両ミラーｆ５１．　ｆ６）の前面にはアパーチャ（７）
を置き。Both mirrors f51. f6) has an aperture (7) in front of it.
Place it.

モードの品質のよいレーザ光（９）を得る。A laser beam (9) with good mode quality is obtained.

この場合、電極（２）とアパーチャ（７）の相対関係は
第２図に示す通りである。第２図は、従来の無声放電式
レーザ装置の部分断面図で、アパーチャ（７）の中心は
光軸（９）と一致している。ここで、二つの電極（２）
の間隔は長手方向の全長にわたって等しいことが必要で
、アパーチャ（７）の位置は二つの電極（２）に対して
、正しく対称あ位置にあることが、よい品質のレーザ光
（９）を得るためには必要である。In this case, the relative relationship between the electrode (2) and the aperture (7) is as shown in FIG. FIG. 2 is a partial cross-sectional view of a conventional silent discharge laser device, in which the center of the aperture (7) coincides with the optical axis (9). Here, two electrodes (2)
The spacing between the two electrodes (2) must be equal over the entire length, and the aperture (7) must be positioned correctly and symmetrically with respect to the two electrodes (2) to obtain laser light (9) of good quality. It is necessary for this purpose.

このため、従来の無声放電式レーザ装置では、第１図に
示される様に、一方の電極（２）は固定基台（１υ（３
） に固定し、他方の電極（２）を、ケース０αに取り付け
られたギャップ調整固定具（抑で、ケース（１０）に固
定すると共に９両電極（２）間隔を一定に保つように調
節を行っていた。またアパーチャ（７）の位置は、ケー
スｆＩＱ）にとりつけられたアノぐ−チャ位置調節固定
具Ｑ３１で、二つの電極（２）に対して対称の位置にく
るように調節していた。For this reason, in conventional silent discharge laser devices, one electrode (2) is mounted on a fixed base (1υ (3
), and the other electrode (2) is fixed to the case (10) using the gap adjustment fixture (depressor) attached to the case 0α, and the nine electrodes (2) are adjusted so as to maintain a constant spacing between the two electrodes (2). In addition, the position of the aperture (7) was adjusted using the annograph position adjustment fixture Q31 attached to the case fIQ) so that it was in a symmetrical position with respect to the two electrodes (2). Ta.

従来の装置は以上のように構成されているので。The conventional device is configured as described above.

２つの電極（２）はそれぞれ独立しており、電極（２）
間隔を所定の値に設定することが難しいこと、さらにア
パーチャ（７）を電極（２）に対して最適の位置に設定
することが、容易に調整できにくい等の欠点があった。The two electrodes (2) are independent, and the electrode (2)
There are drawbacks such as difficulty in setting the interval to a predetermined value and difficulty in easily adjusting the optimum position of the aperture (7) relative to the electrode (2).

この発明は、上記のような従来のものの欠点を除去する
ためになされたもので、電極間の両端部に、電極間隔を
一定に保つ、同一形状のスペーサを設けることにより、
ビーム品質のよいレーザ光を容易に得ることができるレ
ーザ装置を提供することを目的としている。This invention was made in order to eliminate the drawbacks of the conventional ones as described above, and by providing spacers of the same shape at both ends between the electrodes to keep the electrode spacing constant,
It is an object of the present invention to provide a laser device that can easily obtain laser light with good beam quality.

以下、この発明の一実施例を図について説明す（４） る。第３図は、この発明の一実施例による無声放電式レ
ーザ装置の構成図である。υ鴨は電極（２）間の両端部
に設けられ、電極（２）間隔を一定に保つ同一形状のス
ペーサで、セラミックでできており、アパーチャ（７）
に概当する穴を有し、この穴は光軸と一致している。ま
たスペーサυのは電極間隔を一定に保つ第１スペーサ部
分と、アパーチャ（７）の中心が光軸（９）に一致した
とき、電極（２）側面に係止する係止部とで構成されて
いる。第４図はこの発明の一実施例によるレーザ装置の
部分断面図であり。An embodiment of the present invention will be described below with reference to the drawings (4). FIG. 3 is a configuration diagram of a silent discharge laser device according to an embodiment of the present invention. The υ duck is a spacer of the same shape that is provided at both ends between the electrodes (2) and keeps the distance between the electrodes (2) constant, and is made of ceramic and has an aperture (7).
It has a hole approximately corresponding to , and this hole coincides with the optical axis. In addition, the spacer υ is composed of a first spacer part that keeps the electrode spacing constant, and a locking part that locks onto the side surface of the electrode (2) when the center of the aperture (7) coincides with the optical axis (9). ing. FIG. 4 is a partial sectional view of a laser device according to an embodiment of the present invention.

（２）は第１スペーサ部分、（四は係止部である。同一
形状のスペーサ（７１を電極（２）間の両端部に設置す
ることにより容易に電極（２）の間隔は長手方向全域に
わたって一定に保持でき、且つ、スペーサ（’７ｄｌに
はアパーチャ（７）の機能も、第２図に示す構成により
。(2) is the first spacer part (4 is the locking part) By installing spacers (71) of the same shape at both ends between the electrodes (2), the spacing between the electrodes (2) can be easily adjusted over the entire longitudinal direction. With the structure shown in FIG. 2, the function of the spacer (7dl is also the aperture (7)).

もたせたので、アパーチャ（７）を光軸（９）に容易に
一致させることができる。This allows the aperture (7) to be easily aligned with the optical axis (9).

なお、スペーサ（７０の材質をセラミックにする理由は
、絶縁物であるため、放電を乱さないことと。The reason why the material of the spacer (70) is made of ceramic is that since it is an insulator, it does not disturb the discharge.

耐熱性を有することによる。従って、多少の放電（５） の乱れを犠牲にするならば、金属性のものでもよ〜）。Due to its heat resistance. Therefore, some discharge (5) If you sacrifice the turbulence, you can use a metallic one.)

また、スペーサυΦの形は、第１スペーサ部分（７０と
係止部■をもったものならば、十字形のものでもよい。Further, the shape of the spacer υΦ may be a cross shape as long as it has the first spacer part (70) and the locking part (2).

さらに、スペーサυ０に設けた穴は９円形でなくとも１
例えば、矩形のモードのレーザ光を得たい場合は矩形に
してもよ・い。Furthermore, the hole provided in the spacer υ0 does not need to be 9 circular.
For example, if you want to obtain a rectangular mode laser beam, you can use a rectangular mode.

また、上記実施例では誘電体（３）が、電極（２）の両
対向面を覆う無声放電式レーザ装置について示したが、
どちらか一方の電極（２）の対向面を覆った無声放電式
のレーザ装置に対しても、同様の効果が得られる。Further, in the above embodiment, the dielectric (3) covers both opposing surfaces of the electrode (2), but the silent discharge laser device is
Similar effects can be obtained with a silent discharge type laser device in which the facing surface of either electrode (2) is covered.

以−りのように、この発明によれば、電極間の両端部に
電極間隔を一定に保つ、同一形状のスペーサを設けたの
で、容易に、ビーム品質のよいレーザ光が得られる効果
がある。As described above, according to the present invention, since spacers of the same shape are provided at both ends of the electrodes to maintain a constant electrode spacing, it is possible to easily obtain a laser beam with good beam quality. .

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来の無声放電式レーザ装置の構成図。 第２図は従来の無声放電式レーザ装置の部分断面（６） 図、第３図は、この発明の一実施例による無声放電式レ
ーザ装置の構成図、第４図はこの発明の一実施例による
無声放電式レーザ装置の部分断面図である。 図において、（２）は電極、（３）は誘電体、（４）は
放電。 （７）はアパーチャ、（８）は気体流、（９）はレーザ
光の光軸、舛はスペーサ、００は第１スペーサ部分、（
７酊よ係止部である。 なお９図中、同一符号は同−又は相当部分を示す。 代理人大岩増雄 （７） 手続補正書（自発） ５８８１２ 昭和　　年　　月　　日 特許庁長官殿 １、事件の表示　　　特願昭５８−５７８５５号２、発
明の名称 レーザ装置 ３、補正をする者 代表者片山仁へ部 明細誉の特許請求の範囲および発明の詳細な説明の禰 ６、補正の内容 （１１明細書の特許請求の範囲を別紙の通り訂正する。 （２）同第４頁第１５行の「電極間の両端部」を「電極
間」に訂正する。 （３）同第４頁第１６行の「一定に保つ、同一形状のス
ペーサ」を「一定に保つスペーサ」に訂正する。 （４）同第６頁第１４行〜第１５行の「電極間の両端部
に」を「電極間に」に訂正する。 （５）同第６頁第１５行の「一定に保つ、同一形状の」
ヲ「一定に保つ」Ｋ訂正する。 ７、添付書類の目録 補正後の特許請求の範囲を記載した書面　１通以上 （１）　　対向する電極の少なくとも一方の上記電極の
対向面が誘電体で被覆され、気体流中で、上記電極間に
交流電圧を印加して放電をおこし、レーザ光を発振させ
るものにおいて、上記電極間に。 上記電極間隔を一定に保つスペーサを設けたことを特徴
とするレーザ装置。 （２）　　スペーサは、レーザ光を収束させるアパーチ
ャを有し、上記アパーチャの中心は光軸と一致している
ことを特徴とする特許請求の範囲第１項記載のレーザ装
置。 （３）スペーサは両電極間を保持する第１スペーサ部分
とアパーチャの中心が光軸に一致した時。 上記電極側面に係止する係止部とからなることを特徴と
する特許請求の範囲第２項記載のレーザ装置。 （４）　　スペーサはセラミック＊または金属製である
ことを特徴とする特許請求の範囲第１項ないし第３項の
いづれかに記載のレーザ装置。FIG. 1 is a configuration diagram of a conventional silent discharge laser device. FIG. 2 is a partial cross-section (6) of a conventional silent discharge laser device, FIG. 3 is a block diagram of a silent discharge laser device according to an embodiment of the present invention, and FIG. 4 is an embodiment of the present invention. 1 is a partial cross-sectional view of a silent discharge laser device according to FIG. In the figure, (2) is an electrode, (3) is a dielectric, and (4) is a discharge. (7) is the aperture, (8) is the gas flow, (9) is the optical axis of the laser beam, the ring is the spacer, 00 is the first spacer part, (
7. This is the locking part. In addition, in FIG. 9, the same reference numerals indicate the same or corresponding parts. Agent Masuo Oiwa (7) Procedural amendment (spontaneous) 58812 Year/Month 1939 To the Commissioner of the Japan Patent Office 1, Indication of the case: Japanese Patent Application No. 58-57855 2, Name of the invention: Laser device 3, Representative of the person making the amendment: Katayama Item 6 of the Claims and Detailed Explanation of the Invention in the Specification of the Specification (11) The claims of the Specification are corrected as shown in the attached sheet. (2) Page 4, line 15 of the same Correct “both ends between electrodes” to “between electrodes”. (3) Correct “spacer of the same shape to keep constant” in line 16 of page 4 to “spacer to keep constant”. (4 ) Correct "at both ends between the electrodes" in lines 14 to 15 of page 6 to "between the electrodes". ”
wo "keep it constant" K correct. 7. One or more documents stating the scope of claims after the amendment to the list of attached documents (1) The opposing surfaces of at least one of the opposing electrodes are coated with a dielectric material, and in a gas flow, between the electrodes. between the electrodes, in which an alternating current voltage is applied to generate a discharge and oscillate a laser beam. A laser device characterized in that a spacer is provided to keep the electrode spacing constant. (2) The laser device according to claim 1, wherein the spacer has an aperture for converging the laser beam, and the center of the aperture coincides with the optical axis. (3) When the first spacer portion that holds the spacer between both electrodes and the center of the aperture coincide with the optical axis. 3. The laser device according to claim 2, further comprising a locking portion that locks onto the side surface of the electrode. (4) The laser device according to any one of claims 1 to 3, wherein the spacer is made of ceramic* or metal.

Claims (4)

【特許請求の範囲】[Claims] （１）対向する電極の少なくとも一方の上記電極の対向
面が誘電体で被覆され、気体流中で、上記電極間に交流
電圧を印加して放電をおこし、レーザ光を発振させるも
のにおいて、上記電極間の両端部に、上記電極間隔を一
定に保つ、同一形状のスペーサを設けたことを特徴とす
るレーザ装置。(1) The opposing surface of at least one of the opposing electrodes is coated with a dielectric material, and an alternating current voltage is applied between the electrodes in a gas flow to cause discharge and oscillate laser light. A laser device characterized in that spacers of the same shape are provided at both ends between the electrodes to keep the electrode spacing constant. （２）スペーサは、レーザ光を収束させるアパーチャを
有し、上記アパーチャの中心は光軸と一致していること
を特徴とする特許請求の範囲第１項記載のレーザ装置。(2) The laser device according to claim 1, wherein the spacer has an aperture for converging the laser beam, and the center of the aperture coincides with the optical axis. （３）スペーサは両電極間を保持する第１スペーサ部分
とアパーチャの中心が光軸に一致した時。 上記電極側面に係止する係止部とからなることを特徴と
する特許請求の範囲第２項記載のレーザ装置。(3) When the first spacer portion that holds the spacer between both electrodes and the center of the aperture coincide with the optical axis. 3. The laser device according to claim 2, further comprising a locking portion that locks onto the side surface of the electrode. （４）スペーサはセラミック製または金属製であ（１） ることを特徴とする特許請求の範囲第１項ないし第３項
のいづれかに記載のレーザ装置。(4) The laser device according to any one of claims 1 to 3, wherein the spacer is made of ceramic or metal.
JP5765583A 1983-04-01 1983-04-01 Laser device Granted JPS59184579A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5765583A JPS59184579A (en) 1983-04-01 1983-04-01 Laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5765583A JPS59184579A (en) 1983-04-01 1983-04-01 Laser device

Publications (2)

Publication Number Publication Date
JPS59184579A true JPS59184579A (en) 1984-10-19
JPH0464195B2 JPH0464195B2 (en) 1992-10-14

Family

ID=13061915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5765583A Granted JPS59184579A (en) 1983-04-01 1983-04-01 Laser device

Country Status (1)

Country Link
JP (1) JPS59184579A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62210685A (en) * 1986-03-12 1987-09-16 Mitsubishi Electric Corp Electrode supporting structure of silent discharge excitation laser oscillator
JPH0294486A (en) * 1988-09-29 1990-04-05 Komatsu Ltd Excimer laser device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62210685A (en) * 1986-03-12 1987-09-16 Mitsubishi Electric Corp Electrode supporting structure of silent discharge excitation laser oscillator
JPH0294486A (en) * 1988-09-29 1990-04-05 Komatsu Ltd Excimer laser device

Also Published As

Publication number Publication date
JPH0464195B2 (en) 1992-10-14

Similar Documents

Publication Publication Date Title
US3865472A (en) Mirror mount for a laser
US3396343A (en) Optical maser with an adjusting mechanism for a mirror
JPH04259271A (en) Slab or strip waveguide laser
JPS59184579A (en) Laser device
JPH0595142A (en) Laser oscillator
US4666302A (en) Ring laser, in particular for a ring laser type of gyro, having a block with an optical resonator cavity and three corner mirrors
US7664159B2 (en) Thermal distortion compensation for laser mirrors
JP2007220469A (en) Lamp with reflecting mirror and its manufacturing method
KR20080058375A (en) A lamp assembly comprising a reflector and a method for manufacturing the lamp assembly
JPH0234196B2 (en) GASUREEZASOCHI
JPS6047485A (en) Gas laser device
JPS6024082A (en) Laser oscillator
JPS62210685A (en) Electrode supporting structure of silent discharge excitation laser oscillator
JPS59204290A (en) Laser resonator
JP2989284B2 (en) High frequency discharge electrode of triaxial carbon dioxide laser.
US5107373A (en) Arrangement for turning image projected on image screen
JP2685946B2 (en) Gas laser oscillation device
JP2004186310A (en) Corona preionization method and device for gas laser
JPH038381A (en) Gas laser device
JPH02246179A (en) Etalon for excimer laser apparatus
JPS6028281A (en) Gas laser
KR960025903A (en) Direct Cathode Structure
JPS5889885A (en) Laser oscillator
JP2937441B2 (en) He-Ne gas laser device
JPH08136268A (en) Ring laser gyroscope