JPS62210685A - Electrode supporting structure of silent discharge excitation laser oscillator - Google Patents
Electrode supporting structure of silent discharge excitation laser oscillatorInfo
- Publication number
- JPS62210685A JPS62210685A JP5393986A JP5393986A JPS62210685A JP S62210685 A JPS62210685 A JP S62210685A JP 5393986 A JP5393986 A JP 5393986A JP 5393986 A JP5393986 A JP 5393986A JP S62210685 A JPS62210685 A JP S62210685A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- rod
- laser oscillator
- silent discharge
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 title claims description 4
- 230000010355 oscillation Effects 0.000 claims description 3
- 239000003989 dielectric material Substances 0.000 claims 1
- 229910000831 Steel Inorganic materials 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野〕
この発明は無声放電励起レーザ発振器の電極支持構造に
関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) This invention relates to an electrode support structure for a silent discharge excited laser oscillator.
従来例によるこの種のレーザ発振器としては、特開昭５
４−１５４９８８号および特開昭５８−１１５８７６号
に示された無声放電式ガスレーザ装置がある。これらの
従来例形式による各無声放電励起レーザ発振器での原理
的構成を第２図に、また同上要部の拡大した横断面構造
を第３図に示しである。As a conventional example of this type of laser oscillator, there is a
4-154988 and Japanese Patent Laid-Open No. 58-115876 disclose silent discharge type gas laser devices. FIG. 2 shows the basic structure of each of these conventional silent discharge excited laser oscillators, and FIG. 3 shows an enlarged cross-sectional structure of the main parts thereof.
これらの従来例各図において、レーザ発振器を構成する
一対の棒状電極１ａ、ｌｂは、外面を誘電体層４．４に
より被覆させた鋼管３．３からなり、これらの各鋼管３
，３を一定の放電空隙を保持して相対向させると共に、
対向させた各面の放電部分を除く周囲を、絶縁層５．５
により被覆させたものである。In each figure of these conventional examples, a pair of rod-shaped electrodes 1a, lb constituting a laser oscillator consists of a steel tube 3.3 whose outer surface is covered with a dielectric layer 4.4, and each of these steel tubes 3.
, 3 are opposed to each other while maintaining a constant discharge gap, and
An insulating layer 5.5 is placed around the opposing surfaces excluding the discharge portion
It is coated with
従って、この従来例構成では、一対の棒状電極ｌａ 、
ｌｂ間に、交流電源６によって低圧力下で所定電圧を
印加させると、対向させた各面部分間に放電、いわゆる
無声放電を生じ、またこの放電部にレーザ媒質となるＣ
Ｏ。ガスを流通させることによってレーザ励起動作がな
されると共に、長手方向軸線上に配した一対の共振器ミ
ラー？ａ、７ｂにより励起レーザ光が増幅され、この増
幅されたレーザ発振光が矢印方向に放射されることにな
る。Therefore, in this conventional configuration, the pair of rod-shaped electrodes la,
When a predetermined voltage is applied under low pressure by the AC power source 6 between lb and lb, a discharge, a so-called silent discharge, is generated between the opposing surface portions, and C, which becomes a laser medium, is generated in this discharge portion.
O. A pair of resonator mirrors arranged on the longitudinal axis are activated by laser excitation by flowing gas. The excitation laser light is amplified by a and 7b, and this amplified laser oscillation light is emitted in the direction of the arrow.
そして、この従来例構成の場合、前記した一対の棒状電
極１ａ、ｌｂを発振器内に支持するために。In the case of this conventional configuration, in order to support the pair of rod-shaped electrodes 1a and lb described above within the oscillator.
第３図に示す構造が提案実施されている。The structure shown in FIG. 3 has been proposed and implemented.
すなわち、この従来例による電極支持構造は、一つの台
盤８上にあって、一方の下部棒状電極１ｂについては、
長手方向前後に電極台９，９を介して支持させ、他方の
上部棒状電極１ｄについては、長手方向前後を保持板１
０ 、１０により保持させると共に、両線状電極１ａ、
Ｌｂの相互を、前記したように相対向させた状態で、各
保持板１０．１０の両端部をして、各棒状電極１ａ、ｌ
ｂ間の対向間隔を調整可能なように、それぞれに調整ネ
ジ部１２ 、１２を有する支柱１１．１１により支持さ
せているのである。That is, the electrode support structure according to this conventional example is on one base plate 8, and one of the lower rod-shaped electrodes 1b is as follows.
The other upper rod-shaped electrode 1d is supported by a holding plate 1 at the front and rear in the longitudinal direction.
0 and 10, and both linear electrodes 1a,
With the Lb facing each other as described above, both ends of each holding plate 10.10 are connected to each rod-shaped electrode 1a, l.
They are supported by struts 11.11 each having adjustment screw portions 12, 12 so that the opposing distance between the two portions b can be adjusted.
従来例レーザ発振器での電極支持構造は、前記のように
構成されているために、一対の各棒状電極間の放電空隙
、つまりこ＼では対向間隔を調整できると云う利点があ
る反面、設計条件が特定された製品、すなわち量産製品
としての無声放電励起レーザ発振器を製造する場合、各
棒状電極間の対向間隔を一台組上げる毎に、その都度、
キャップ調整する必要があって、却って組上げに手間取
るもので、これは棒状電極の消耗あるいは破損などに基
ずく交換時にも同様であり、また一方、レーザガスの流
れ方向での、棒状電極の長手方向前後の間隔精度を出し
難くて、発振出力の品質にバラツキを生ずる惧れもある
などの問題点を有するものであった。Since the electrode support structure of the conventional laser oscillator is configured as described above, it has the advantage of being able to adjust the discharge gap between each pair of rod-shaped electrodes, that is, the opposing distance in this case, but on the other hand, the design conditions When manufacturing a product with a specified value, that is, a silent discharge pumped laser oscillator as a mass-produced product, the opposing distance between each rod-shaped electrode should be changed each time each unit is assembled.
It is necessary to adjust the cap, which takes time to assemble, and this is also the case when replacing the rod-shaped electrode due to wear or damage. It is difficult to achieve interval accuracy, and there is a risk of variations in the quality of the oscillation output.
従ってこの発明の目的とするところは、一対の各棒状電
極間での、放電空隙形成のための調整要素を排除して、
装置構成の組上げならびに交換などが容易で、レーザ品
質の高いこの種の無声放電励起レーザ発振器の電極支持
構造を提供することである。Therefore, an object of the present invention is to eliminate the adjustment element for forming a discharge gap between each pair of rod-shaped electrodes,
It is an object of the present invention to provide an electrode support structure for a silent discharge excited laser oscillator of this type, which is easy to assemble and replace, and has high laser quality.
前記目的を達成するために、この発明は、一対の各棒状
電極の両端部相互間を、所定寸法に特定された絶縁支持
板によって、一体的に取付は固定させたものである。In order to achieve the above object, the present invention integrally attaches and fixes the ends of each of a pair of rod-shaped electrodes to each other by an insulating support plate having a specified size.
すなわち、この発明においては、各棒状電極の両端部相
互間を、予め所定長さ寸法に設定したそれぞれの絶縁支
持板によって、一体的に取付は固定させるために、装置
構成の組上げならびに交換などを極めて容易かつ迅速に
行ない得て、しかもこれらの各棒状電極相互間に、常時
、一定の放電空隙を精度良く保持させることができ、こ
れによってレーザ品質の向上が可能になる。That is, in this invention, in order to integrally attach and fix the ends of each rod-shaped electrode between each end with each insulating support plate set to a predetermined length dimension, assembly and replacement of the device configuration are required. This can be done extremely easily and quickly, and a constant discharge gap can always be maintained with high precision between each of these rod-shaped electrodes, thereby making it possible to improve laser quality.
以下、この発明に係る無声放電励起レーザ発振器の電極
支持構造の一実施例につき、第１図を参照して詳細に説
明する。Hereinafter, one embodiment of an electrode support structure for a silent discharge excited laser oscillator according to the present invention will be described in detail with reference to FIG.
第１図はこの実施例構造を適用した無声放電励起レーザ
発振器の概要構成を示す斜視図であり、この第１図実施
例構造において、前記第２図および第３図従来例構造と
同一符号は同一または相当部分を示している。FIG. 1 is a perspective view showing the general configuration of a silent discharge pumped laser oscillator to which the structure of this embodiment is applied. In the structure of the embodiment of FIG. Indicates the same or equivalent part.
この実施例構造においては、前記した一対の各棒状電極
１ａ、ｌｂの両端部相互間を、一定の放電空隙を保持し
て対向支持し得るように、所定寸法に特定された一組を
なす一対の絶縁支持板２ａ、２ｂおよび２ｃ、２ｄによ
り、取付はネジ１３ 、１３を用いて一体的に取付は固
定させたものである。In the structure of this embodiment, a pair of rod-shaped electrodes 1a, 1b having a specified size are formed so that the ends of each of the pair of rod-shaped electrodes 1a, 1b can be supported facing each other while maintaining a certain discharge gap. The insulating support plates 2a, 2b, 2c, and 2d are integrally fixed using screws 13, 13.
すなわち、このように各棒状電極相互間を、所定寸法か
らなる絶縁支持板２ａ、２ｂおよび２ｃ、２ｄによって
、画一的に取付は固定させることで、これらの各棒状電
極をして、何等の調整操作をも必要とせずに、常時、一
定の放電空隙を精度良く保持できるのであり、その組上
−げ、取外しならびに交換などの操作を迅速に、しかも
容易に行なえると共に、放電空隙の精度維持が確実にな
されてレーザ品質を向上できるのである。In other words, by uniformly mounting and fixing the rod-shaped electrodes between each other using the insulating support plates 2a, 2b, 2c, and 2d having predetermined dimensions, each of these rod-shaped electrodes can be It is possible to maintain a constant discharge gap with high accuracy at all times without requiring adjustment operations, and operations such as assembly, removal, and replacement can be performed quickly and easily, and the accuracy of the discharge gap can be maintained at all times. Maintenance can be ensured and laser quality can be improved.
またご覧で、前記各棒状電極Ｌａ 、 ｌｂを構成する
鋼管３．３としては、一般的に例えば機械構造用の炭素
鋼管、いわゆる角パイプ（勿論その他の断面形状であっ
てもよい）が用いられ、誘電体層４，４としては、例え
ば０．６〜０．８ｍｍ程度の厚さにガラスライニングを
施せばよく、外部絶縁層５，５としては、例えばシリコ
ン樹脂などのモールド被覆をなせばよい。Also, as you can see, the steel pipes 3.3 constituting each of the rod-shaped electrodes La, lb are generally carbon steel pipes for mechanical structures, so-called square pipes (of course, other cross-sectional shapes may be used). For the dielectric layers 4, 4, a glass lining with a thickness of, for example, about 0.6 to 0.8 mm may be applied, and for the external insulating layers 5, 5, for example, a mold coating of silicone resin or the like may be formed. .
そして、この実施例構造の場合にあって、各棒状電極１
ａ、ｌｂでの外部絶縁層５．５には、長手方向両端一部
にセラミ、りを用い、また平板状の各絶縁支持板２ａ、
２ｂ、２ｃ、２ｄおよび取付はネジ１３．１３にもセラ
ミックを用いて、放電空隙の精度向上、絶縁維持を図る
のである。In the case of this embodiment structure, each rod-shaped electrode 1
For the external insulating layers 5.5 at a and lb, ceramic and glue are used at both ends in the longitudinal direction, and each of the flat insulating support plates 2a,
2b, 2c, 2d and the mounting screws 13 and 13 are also made of ceramic to improve the precision of the discharge gap and maintain insulation.
なお、前記実施例において、絶縁支持板は平板状のほか
にも、任意の形状のものを用いてよく、かつその数量に
も限定されない、また適用対象はＣＯ□ガスレーザに限
られず、その他の無声放電励起式ガスレーザであっても
同様な作用、効果を奏し得る。In addition, in the above embodiments, the insulating support plate may be of any shape other than a flat plate, and the number is not limited, and the application target is not limited to CO□ gas laser but also other silent Similar actions and effects can be achieved even with a discharge-excited gas laser.
以上詳述したように、この発明によれば、無声放電励起
レーザ発振器において、一対の各棒状電極の両端部相互
間を、予め所定長さ寸法に設定したそれぞれの絶縁支持
板により、一体重に取付は固定させるために、各棒状電
極相互間にあって、何等の調整操作をもなさずに、常時
、一定の放電空隙を精度良く保持させることができ、結
果的には、装置構成の組上げならびに交換などを極めて
容易かつ迅速に行ない得られ、また放電空隙の精度改善
に伴なってレーザ品質を向上できるほか、全体構造を簡
単にし得て、この種の無声放電励起レーザ発振器を、容
易かつ安価に提供できるなどの優れた特技を有するもの
である。As described in detail above, according to the present invention, in a silent discharge excited laser oscillator, the ends of each pair of rod-shaped electrodes are connected to each other by respective insulating support plates each having a predetermined length dimension. Since the installation is fixed, it is possible to maintain a constant discharge gap between each rod-shaped electrode with high accuracy at all times without any adjustment operations, and as a result, it is easy to assemble and replace the device configuration. This type of silent discharge pumped laser oscillator can be easily and inexpensively manufactured, and the laser quality can be improved by improving the precision of the discharge gap. They have excellent skills such as being able to provide.
第１図はこの発明に係る電極支持構造の一実施例を適用
した無声放電励起レーザ発振器の概要構成を示す斜視図
であり、また第２図は従来例形式による無声放電励起レ
ーザ発振器の作動原理を説明する斜視図、第３図は同上
要部構造を拡大して示す横断面図、第４図は同上電極支
持構造の概要構成を示す斜視図である。
ｌａ、ｌｂ ＝一対の電極、２ａ、２ｂおよび２ｃ、２
ｄ ・・・・−組をなす一対の絶縁支持板、？ａ、７ｂ
・・・・−組の共振器ミラー。
代理人 大 岩 増 雄
第１図
ｈ
ｌａ、Ｉｂ＋ ＋染！）［１６
２０〜２ｄ、地神炎碕坂
１３：Ｊｉ２灯＋ｊネψ
７ａ７ｂ： 某撒葛ミラー
第２図
第３図
第４図FIG. 1 is a perspective view showing the general configuration of a silent discharge pumped laser oscillator to which an embodiment of the electrode support structure according to the present invention is applied, and FIG. 2 is a perspective view showing the operating principle of a conventional silent discharge pumped laser oscillator. FIG. 3 is an enlarged cross-sectional view showing the main structure of the same, and FIG. 4 is a perspective view showing the general structure of the electrode support structure. la, lb = pair of electrodes, 2a, 2b and 2c, 2
d...-a pair of insulating support plates, ? a, 7b
....-set of resonator mirrors. Agent Masuo Oiwa Figure 1 h la, Ib+ + dye! ) [16 20~2d, Earth God Flame Kasuzaka 13: Ji 2 lights + j ne ψ 7a7b: A certain Mikazu mirror Figure 2 Figure 3 Figure 4
Claims (1)
、両電極間での交流放電（無声放電）によつりレーザ媒
質ガスを励起させて、レーザ発振作動をなし得るように
した無声放電励起レーザ発振器において、前記各棒状電
極の両端部相互間を、所定寸法に特定された絶縁支持板
により、一定の放電空隙を保持して対向支持し得るよう
に、一体的に取付け固定させたことを特徴とする無声放
電励起レーザ発振器の電極支持構造。(1) Silent discharge excitation in which a dielectric material is interposed between at least a pair of rod-shaped electrodes, and the laser medium gas is excited by alternating current discharge (silent discharge) between both electrodes, thereby achieving laser oscillation operation. In the laser oscillator, both ends of each rod-shaped electrode are integrally attached and fixed by an insulating support plate having a specified size so that they can be supported facing each other while maintaining a certain discharge gap. Electrode support structure of a featured silent discharge pumped laser oscillator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5393986A JPS62210685A (en) | 1986-03-12 | 1986-03-12 | Electrode supporting structure of silent discharge excitation laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5393986A JPS62210685A (en) | 1986-03-12 | 1986-03-12 | Electrode supporting structure of silent discharge excitation laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62210685A true JPS62210685A (en) | 1987-09-16 |
Family
ID=12956701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5393986A Pending JPS62210685A (en) | 1986-03-12 | 1986-03-12 | Electrode supporting structure of silent discharge excitation laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62210685A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5140606A (en) * | 1990-10-12 | 1992-08-18 | Coherent, Inc. | RF excited CO2 slab waveguide laser |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59184579A (en) * | 1983-04-01 | 1984-10-19 | Mitsubishi Electric Corp | Laser device |
-
1986
- 1986-03-12 JP JP5393986A patent/JPS62210685A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59184579A (en) * | 1983-04-01 | 1984-10-19 | Mitsubishi Electric Corp | Laser device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5140606A (en) * | 1990-10-12 | 1992-08-18 | Coherent, Inc. | RF excited CO2 slab waveguide laser |
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