JPS63227075A - Gas laser device - Google Patents
Gas laser deviceInfo
- Publication number
- JPS63227075A JPS63227075A JP6150287A JP6150287A JPS63227075A JP S63227075 A JPS63227075 A JP S63227075A JP 6150287 A JP6150287 A JP 6150287A JP 6150287 A JP6150287 A JP 6150287A JP S63227075 A JPS63227075 A JP S63227075A
- Authority
- JP
- Japan
- Prior art keywords
- resonator
- laser device
- gas laser
- cathode electrodes
- optical axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 22
- 239000000919 ceramic Substances 0.000 claims abstract description 17
- 239000012212 insulator Substances 0.000 claims abstract description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 12
- 230000003287 optical effect Effects 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims abstract description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 6
- 229910000640 Fe alloy Inorganic materials 0.000 claims description 5
- 229910000531 Co alloy Inorganic materials 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 abstract description 7
- 229910000831 Steel Inorganic materials 0.000 abstract description 3
- 239000010941 cobalt Substances 0.000 abstract description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 abstract description 3
- 239000010959 steel Substances 0.000 abstract description 3
- 229910017052 cobalt Inorganic materials 0.000 abstract description 2
- 229910052759 nickel Inorganic materials 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- 230000002301 combined effect Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は金属加工用、医療用としてのガスレーザ装置に
関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a gas laser device for metal processing and medical use.
従来の技術
従来のガスレーザ装置の共振器は第２図に示すように内
部を油冷したメインパイプ１３の両端部にアルミニウム
製の板厚４０〜８ｏｒｒｒＩｎのメインフランジ１４．
１５を取付け、前記メインフランジに絶縁物１６．１７
，１８．１９を介して出力鏡３、カソード電極４、カソ
ード電極６、反射鏡６を固定し、さらに絶縁ガイシ９を
介して前記メインパイプの中央部にアノード電極１ｏを
取付け、このアノード電極１ｏとカソード電極４，５の
間に放電管１１．１２を設けている。2. Description of the Related Art As shown in FIG. 2, the resonator of a conventional gas laser device has a main flange 14 made of aluminum and having a thickness of 40 to 8 mm at both ends of a main pipe 13 whose interior is cooled with oil.
15 and insulators 16 and 17 on the main flange.
, 18 and 19, the output mirror 3, the cathode electrode 4, the cathode electrode 6, and the reflecting mirror 6 are fixed, and the anode electrode 1o is attached to the center of the main pipe via the insulating insulator 9. A discharge tube 11.12 is provided between the cathode electrodes 4 and 5.
前記の出力鏡３、カソード電極４，５、反射鏡６、アノ
ード電ｊ１０を０．１〜０．２四〇亘線精度をもつ光軸
系の中で高出力レーザ光２ｏを取出している。A high-power laser beam 2o is extracted from the output mirror 3, cathode electrodes 4, 5, reflecting mirror 6, and anode electrode j10 in an optical axis system having a 0.1 to 0.2 40-line accuracy.
一般にガスレーザ装置は、そのレーザ発振に伴って、電
気入力エネルギーの８０〜９０チは熱エネルギーとして
共振器から放熱され、その熱により前記光軸に狂いが生
じるのを防がなければならない。Generally, in a gas laser device, 80 to 90 degrees of electrical input energy is radiated from the resonator as thermal energy during laser oscillation, and it is necessary to prevent the optical axis from being deviated by the heat.
第２図に示すメインパイプ１３は外径が１４０〜１６０
間、肉厚６〜１０団の鉄パイプであり、パイプ内に３０
±２℃に温度コントロールされた絶縁油を通し、さらに
肉厚４０〜８０間のメインフランジ１４．１５との組合
せ構成で光軸が狂うのを防いでいる。The main pipe 13 shown in Fig. 2 has an outer diameter of 140 to 160 mm.
It is an iron pipe with a wall thickness of 6 to 10 groups, and there are 30
The optical axis is prevented from going awry by passing insulating oil whose temperature is controlled to ±2°C and combining it with the main flange 14.15 with a wall thickness of 40 to 80 mm.
発明が解決しようとする問題点
しかしながら、上記従来のガスレーザ装置ではその光軸
系の直線精度を維持するために、温度コントロールされ
た冷却用油が必要であり、メインバイブ１３も強度を上
げるために、外径１４０〜１６０喘のものが必要であり
、共振器のコンパクト化、軽量化の障害となっていた。Problems to be Solved by the Invention However, in order to maintain the linear accuracy of the optical axis system in the above-mentioned conventional gas laser device, temperature-controlled cooling oil is required, and the main vibrator 13 is also required in order to increase the strength. , an outer diameter of 140 to 160 mm is required, which has been an obstacle to making the resonator more compact and lighter.
また、メインフランジ１４．１５も強度、軽量化を狙い
として４０〜８０閣のアルミニウム製とし、カソード電
極４，６、出力鏡３、反射鏡６とは電気的絶縁距離を考
慮して長さＳｏｗｍの前記絶縁物１６ 、１７゜１８．
１９を介していた。これらの絶縁物１６゜１了、１８，
１９ ４個分の長さも共振器のコンパクト花に障害とな
っていた。In addition, the main flange 14.15 is also made of 40 to 80 mm aluminum with the aim of strength and weight reduction, and the length of the cathode electrodes 4, 6, output mirror 3, and reflector 6 is set so that the length is set in consideration of electrical insulation distance. Said insulator 16, 17°18.
It was through 19. These insulators 16°1, 18,
19 The length of 4 pieces was also an obstacle to the compact flower of the resonator.
さらに、上記共振器でレーザ発振させたところ。Furthermore, the above resonator was used to oscillate a laser.
共振器の熱変形に伴う出力の変動率はレーザ出力値に対
して±２％以内となり、加工性能向上のためにはさらに
改善が必要であった。The rate of variation in output due to thermal deformation of the resonator was within ±2% of the laser output value, and further improvements were required to improve processing performance.
問題点を解決するための手段
上記問題点を解決するために本発明は、共振器の一方の
カソード電極と反射鏡、他方のカソード側電極と出力鏡
とを、光軸に直角に対面して設けた一対のセラミック板
にそれぞれ配置し、前記一対のセラミック板を低熱膨張
材で連結しかつ前記低熱膨張材に絶縁物を介し、前記両
カソード電極間の中央部位置にアノード電極を配置した
ものである。Means for Solving the Problems In order to solve the above problems, the present invention provides a structure in which one cathode electrode and the reflecting mirror of the resonator, and the other cathode side electrode and the output mirror facing each other perpendicularly to the optical axis. The anode electrode is arranged on a pair of ceramic plates provided, the pair of ceramic plates are connected with a low thermal expansion material, and an insulator is interposed between the low thermal expansion material and an anode electrode is placed at a central position between the cathode electrodes. It is.
作用
本発明は上記構成によりセラミック板が絶縁物そのもの
であり、また、ガスレーザ装置の構成部品としては機械
強度は大きく、熱膨張係数も小さいためレーザ発振器の
コンパクト化につながる。According to the present invention, the ceramic plate is an insulator itself due to the above-mentioned structure, has high mechanical strength as a component of a gas laser device, and has a small coefficient of thermal expansion, so that the laser oscillator can be made more compact.
さらに、一対のセラミック板を連結するのに低膨張合金
を使ったため、従来の鉄パイプに温度コントロールした
冷却油を流し、鉄パイプの熱膨張量を押える構成に替わ
って、油冷することなしに両カソード電極、反射鏡、出
力鏡の直線性で構成するガスレーザ装置の光軸を一定に
保つことができる。Furthermore, since a low expansion alloy was used to connect the pair of ceramic plates, instead of the conventional configuration in which temperature-controlled cooling oil is poured into the iron pipe to suppress the amount of thermal expansion of the iron pipe, it is possible to eliminate the need for oil cooling. The optical axis of the gas laser device constituted by the linearity of both cathode electrodes, the reflecting mirror, and the output mirror can be kept constant.
実施例 本発明の一実施例を第１図に示す。Example An embodiment of the present invention is shown in FIG.
第１図に示すように、光軸と直角に対面して設けたアル
ミナ焼成物の厚さ２５＃のセラミック７ランジ１．２に
絶縁物を介さず、直接に出力鏡３、カソード電極４，６
１反射鏡６を取付け、このセラミックフランジ１を低膨
張材である外径５０ｍ、肉厚Ｓ順、長さ１．２ｍの鉄、
ニッケル、コバルトの合金鋼のメインバイブ７．８で連
結し、がっ、このメインバイブ７．８に絶縁ガイシ９を
介して両カソード電極４．５の中央部にアノード電極１
ｏを設け、両カソード電極４，５とアノ−・ド電極１０
間にそれぞれ放電管１１．１２を付けて共振器とした。As shown in FIG. 1, the output mirror 3, cathode electrode 4, 6
1 reflector 6 is installed, and this ceramic flange 1 is made of low-expansion material made of iron with an outer diameter of 50 m, wall thickness in order of S, and length of 1.2 m.
A main vibe 7.8 made of nickel and cobalt alloy steel is connected to the main vibe 7.8, and an anode electrode 1 is connected to the center of both cathode electrodes 4.5 via an insulating insulator 9.
o, both cathode electrodes 4, 5 and anode electrode 10 are provided.
Discharge tubes 11 and 12 were attached between each of them to form a resonator.
本実施例によれば、セラミックフランジとして使用した
アルミナ焼成物のセラミック板構成で絶縁物１５，１６
，１７．１８の合計長さ相当分だけ共振器長を短かくで
きる。また、メインバイブ７．８を鉄、ニッケル、コバ
ルトの合金鋼としているので複合効果として熱膨張に伴
う共振器の光軸を安定に保つことができ、従来の光軸ズ
レに伴うレーザ出力の変動率が±１．６％であったのに
対して、本実施例では±０．６６％を達成できた。According to this embodiment, the insulators 15 and 16 are made of a ceramic plate made of fired alumina used as a ceramic flange.
, 17.18, the resonator length can be shortened by an amount equivalent to the total length of . In addition, since the main vibrator 7.8 is made of iron, nickel, and cobalt alloy steel, the combined effect is that the optical axis of the resonator can be kept stable due to thermal expansion. While the ratio was ±1.6%, this example achieved ±0.66%.
またレーザ出力の変動率は鋼板の切断加工においては、
その加工性能（切断面粗度、光沢）の制約から、±１チ
以下が望まれるが、本実施例によれば、アルミナ焼成物
のセラミック板と鉄、ニッケル、コバルトの低膨張合金
鋼の組合せで構成した共振器において、熱変形に伴う共
振器の光軸ズレを従来比で捧〜■と小さくでき、出力変
動率も従来例の±１．６％に対して±１．０係以下とで
きた。In addition, the fluctuation rate of laser output is
Due to constraints on machining performance (cut surface roughness, gloss), ±1 inch or less is desired, but according to this example, a ceramic plate made of fired alumina and a low expansion alloy steel of iron, nickel, and cobalt are combined. In the resonator configured with this, the optical axis deviation of the resonator due to thermal deformation can be reduced to ~■ compared to the conventional example, and the output fluctuation rate is also less than ±1.0 coefficient, compared to ±1.6% in the conventional example. did it.
さらに本実施例においては熱膨張係数が０．５×１σ６
／°Ｃの鉄、ニッケル、コバルトの低膨張合金をメイン
バイブに用いたが、１．１Ｘ１０ ／’Ｃの鉄、ニッケ
ル合金のメインパイプでも出力変動率±１チ以下を達成
し得た。Furthermore, in this example, the coefficient of thermal expansion is 0.5×1σ6
/°C low expansion alloy of iron, nickel, and cobalt was used for the main vibe, but even with the main pipe made of iron and nickel alloy of 1.1X10 /'C, an output fluctuation rate of ±1 inch or less could be achieved.
さらに、熱膨張係数０．６ Ｘ １０−５／’Ｃのアル
ミナ焼成物のセラミック板を実施例としたが、その他、
１．２ Ｘ １０−５／’Ｃ以下のセラミック板であれ
ば出力変動率を±１％以下とできた。Furthermore, although a ceramic plate made of fired alumina with a thermal expansion coefficient of 0.6 x 10-5/'C was used as an example, other examples include
With a ceramic plate of 1.2 x 10-5/'C or less, the output fluctuation rate could be kept below ±1%.
発明の詳細
な説明から明らかなように、本発明によればレーザ発振
器の小型化を図ることができるとともに、ガスレーザ装
置の光軸を一定に保つことができる。As is clear from the detailed description of the invention, according to the present invention, it is possible to downsize the laser oscillator and to keep the optical axis of the gas laser device constant.
第１図は本発明の一実施例による共振器の構成図、第２
図は従来例の共振「構成図である。
３・・・・・・出力鏡、４．６・・・・・・カソード電
極、６・・・・・・反射鏡、７．８・・・・・・低熱膨
張合金製メインパイプ、９・・・・・・絶縁ガイシ、１
ｏ・・・・・・アノード電極、１１．１２・°°・・・
放電管、１３・・・°°・鉄パイプ製メインパイプ、１
４，１６°゛°゛・°アルミニウム製メインフランジ、
１６，１７．１８．１９・・・・・・絶縁物、２ｏ・・
・・パ・レーザ光。FIG. 1 is a configuration diagram of a resonator according to an embodiment of the present invention, and FIG.
The figure is a configuration diagram of a conventional resonance system. 3...Output mirror, 4.6...Cathode electrode, 6...Reflector, 7.8... ...Low thermal expansion alloy main pipe, 9...Insulation insulator, 1
o...Anode electrode, 11.12.°°...
Discharge tube, 13...°° Main pipe made of iron pipe, 1
4.16°゛°゛・°aluminum main flange,
16,17.18.19... Insulator, 2o...
...Pa laser light.
Claims (3)
のカソード電極と反射鏡、他方のカソード電極と出力鏡
とを、前記光軸に直角に対面して設けた一対のセラミッ
ク板にそれぞれ配設し、前記一対のセラミック板を低熱
膨張材で連結しかつ前記低熱膨張材に絶縁物を介し、前
記両カソード電極間の中央部にアノード電極を配設した
ガスレーザ装置。(1) A pair of ceramics having a discharge electrode on the optical axis of the resonator, and one cathode electrode and a reflecting mirror of the resonator, and the other cathode electrode and output mirror facing each other at right angles to the optical axis. A gas laser device in which the pair of ceramic plates are connected to each other by a low thermal expansion material, and an anode electrode is provided in the center between the two cathode electrodes with an insulator interposed between the low thermal expansion material.
ルトとニッケルと鉄との合金とした特許請求の範囲第１
項記載のガスレーザ装置。(2) Claim 1 in which the low thermal expansion material is an alloy of nickel and iron or an alloy of cobalt, nickel, and iron.
The gas laser device described in Section 1.
範囲第１項記載のガスレーザ装置。(3) The gas laser device according to claim 1, wherein the ceramic plate is a fired alumina material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6150287A JPS63227075A (en) | 1987-03-17 | 1987-03-17 | Gas laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6150287A JPS63227075A (en) | 1987-03-17 | 1987-03-17 | Gas laser device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63227075A true JPS63227075A (en) | 1988-09-21 |
Family
ID=13172931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6150287A Pending JPS63227075A (en) | 1987-03-17 | 1987-03-17 | Gas laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63227075A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001093380A1 (en) * | 2000-05-30 | 2001-12-06 | Matsushita Electric Industrial Co., Ltd. | Laser oscillating device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5010594A (en) * | 1973-05-25 | 1975-02-03 |
-
1987
- 1987-03-17 JP JP6150287A patent/JPS63227075A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5010594A (en) * | 1973-05-25 | 1975-02-03 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001093380A1 (en) * | 2000-05-30 | 2001-12-06 | Matsushita Electric Industrial Co., Ltd. | Laser oscillating device |
| US6895030B1 (en) | 2000-05-30 | 2005-05-17 | Matsushita Electric Industrial Co., Ltd. | Laser oscillating device |
| US6944200B2 (en) | 2000-05-30 | 2005-09-13 | Matsushita Electric Industrial Co., Ltd. | Laser oscillator |
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