JPS6047485A - Gas laser device - Google Patents
Gas laser deviceInfo
- Publication number
- JPS6047485A JPS6047485A JP15557383A JP15557383A JPS6047485A JP S6047485 A JPS6047485 A JP S6047485A JP 15557383 A JP15557383 A JP 15557383A JP 15557383 A JP15557383 A JP 15557383A JP S6047485 A JPS6047485 A JP S6047485A
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- gimbal
- gas laser
- curvature
- beam radius
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08059—Constructional details of the reflector, e.g. shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
Abstract
Description
【発明の詳細な説明】
本発明はガスレーザ装置に関し、複数の曲率からなる反
射鏡を任意に選択し出方およびビーム径を容易に可変出
来るガスレーザ装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a gas laser device, and more particularly, to a gas laser device in which reflecting mirrors having a plurality of curvatures can be arbitrarily selected to easily vary the output direction and beam diameter.
ガスレーザ装置は、プラズマ細管内にレーザ媒質となる
ガスを封入し、陽極、陰極間に高電圧を加えて放電させ
、プラズマ細管の両端に具備するミラーの相対角度位置
を適切に調整することによってレーザ発振を行なわしめ
る。一対の反射鏡が凹面の反射鏡と、平面反射鏡から構
成された光共ここで、λ＝発振波長、Ｒ＝凹面鏡の曲率
半径。A gas laser device generates a laser by filling a plasma capillary with a gas serving as a laser medium, applying a high voltage between an anode and a cathode to generate a discharge, and appropriately adjusting the relative angular position of mirrors provided at both ends of the plasma capillary. Causes oscillation. Here, λ = oscillation wavelength, R = radius of curvature of the concave mirror.
Ｌ＝凹面鏡と平面鏡間の距離、π＝円周率を示す。L = distance between the concave mirror and the plane mirror, π = pi.
この計算式から明らかのように１例えばＨｅ−Ｎｅガス
レーザにおいては代表的な発振波長は０．６３２８μｍ
（赤色）とその光共振器長りを一定として考えるならば
、凹面鏡の曲率を変えることによって任意なビーム径を
選択することが可能である。”しかしながら、ビーム径
を選択する都度反射鏡を取ったりはずしたりすることは
一対の反射鏡間の最適角度が損なわれややもするとレー
ザ発振を停止させる問題点があった。As is clear from this calculation formula, 1For example, in a He-Ne gas laser, the typical oscillation wavelength is 0.6328 μm.
(red) and its optical resonator length are considered constant, it is possible to select an arbitrary beam diameter by changing the curvature of the concave mirror. ``However, removing and removing the reflecting mirror each time the beam diameter is selected has the problem of impairing the optimum angle between the pair of reflecting mirrors, and eventually stopping laser oscillation.
本発明の目的は、レーザ出力とビーム位置の再現性をそ
こなうことなく、ビーム径を必要に応じて容易に切換え
可能なマウントを備えたガスレーザ装置を提供すること
にある。An object of the present invention is to provide a gas laser device equipped with a mount that allows the beam diameter to be easily changed as required without impairing the reproducibility of laser output and beam position.
本発明によれば、レーザ管、光共振器から構成されるガ
スレーザ装置において、光共振器を構成する一対の反射
鏡のうち、出力側反射は複数の曲率から成る反射鏡を取
付けたマウントより構成され、任意の曲率を選択し切換
゛える機構を備えビーム径を必要に応じて容易に切換え
可能にしたガスレーザ装置が得られる。According to the present invention, in a gas laser device composed of a laser tube and an optical resonator, of a pair of reflecting mirrors forming the optical resonator, the output side reflection is composed of a mount to which a reflecting mirror having a plurality of curvatures is attached. Thus, a gas laser device is obtained which is equipped with a mechanism for selecting and switching an arbitrary curvature, and which allows the beam diameter to be easily switched as required.
次に本発明を図面を参照して説明する。第１図は凹面の
曲率が異なる出力側反射鏡１． ２． ３゜４と全反射
側反射鏡５の構成図である。第２図は本発明の実施例に
おけるマウントの一部拡大図である。第３図は本発明の
実施例におけるガスレーザ発振器の構成断面図である。Next, the present invention will be explained with reference to the drawings. Figure 1 shows an output side reflecting mirror 1 with different concave curvatures. 2. 3° 4 and a configuration diagram of the total reflection side reflecting mirror 5. FIG. 2 is a partially enlarged view of the mount in the embodiment of the present invention. FIG. 3 is a cross-sectional view of a gas laser oscillator according to an embodiment of the present invention.
プラズマ細管９と両端にブリュースタ窓８．陽極２．陰
極３を主なる構成としたガスレーザ管１はレーザ管Ｎを
固定し且つＸ−Ｙ軸に微動可能な複数個のホルダー５に
取付けられ、ホルダー５は筐体４に機械的に固定されて
い石、出力側反射鏡である凹面鏡１，２゜３．４はジン
バル７に、全反射側である平面鏡はジンバル６によって
固定され、ジンノ（ル６，７共に筐体４に機械的に固定
されている。レーザ管１を固定しているホルダー５は管
軸の真直度が良く出るようそれぞれのホルダー５につい
ているＸ・Ｙ軸の微動調整ツマミを動かし１整し、且つ
この管軸に対して一対の発振器の角度が最適になるよう
にそれぞれのジンバル６．７についているＸ・Ｙ軸の微
動調整ツマミを調整することによってレーザ発振を得る
ことが出来る。第１図に示すように出力側反射鏡である
凹面鏡１と全反射側平面鏡にて光共振器を構成しており
、共振器長りが一定の為出力側反射鏡の凹面鏡１０曲率
によってビーム径が決定され且つ回折損失はレーザ管上
の凹面鏡７に近いプラズマ細管１０の内径によって決定
され、出力が左右される。ジンバル７をレーザ光軸に対
して回転することによって出力側凹面鏡は２、 ３．
４と容易に可変し、凹面鏡２と平面鏡ｌ。Plasma capillary 9 and Brewster windows 8 at both ends. Anode 2. A gas laser tube 1 mainly composed of a cathode 3 is attached to a plurality of holders 5 that fix the laser tube N and are movable slightly in the X-Y axes. The concave mirrors 1 and 2° 3.4, which are the output side reflecting mirrors, are fixed to the gimbal 7, and the plane mirror, which is the total reflection side, is fixed to the gimbal 6. The holder 5 that fixes the laser tube 1 is adjusted by moving the fine adjustment knobs on the X and Y axes on each holder 5 so that the tube axis is well straight. Laser oscillation can be obtained by adjusting the X and Y axis fine adjustment knobs on each gimbal 6.7 so that the angle of the oscillator is optimal.As shown in Figure 1, the output side reflector The concave mirror 1 and the flat mirror on the total reflection side constitute an optical resonator, and since the resonator length is constant, the beam diameter is determined by the curvature of the concave mirror 10 of the output side reflecting mirror, and the diffraction loss is The output is determined by the inner diameter of the plasma capillary 10 close to the concave mirror 7. By rotating the gimbal 7 with respect to the laser optical axis, the output side concave mirror can be adjusted to 2, 3.
4 and easily variable, concave mirror 2 and plane mirror l.
凹面鏡３と平面鏡１．凹面鏡４と平面鏡ｌにてそれぞれ
光共振器を構成し凹面鏡が持っている曲率によってビー
ム径が変化し、且つ回折損失が変化する。必要なビーム
径と出力を考慮しあらかじめ曲率を選択してジンバル７
に装着しておくと同時に、ジンバル７を回転させた時そ
れぞれの装着された凹面鏡がレーザ管１の管軸に対して
偏心することなく直角度を機緘精度よく出しておく必要
があることはいうまでもない。Concave mirror 3 and plane mirror 1. The concave mirror 4 and the plane mirror 1 each constitute an optical resonator, and the beam diameter and diffraction loss vary depending on the curvature of the concave mirror. Select the curvature in advance considering the required beam diameter and output and install the gimbal 7.
At the same time, when the gimbal 7 is rotated, each attached concave mirror must be properly perpendicular to the tube axis of the laser tube 1 without being eccentric to the tube axis. Needless to say.
第１図は複数の出力側凹面鏡と全反射側平面鏡における
光共振器の構成図、第２図は複数の出力側凹面鏡を装着
したジンバル部の拡大図、第３図は本発明の実施例にお
けるガスレーザ発振器の構成断面図である。
入・・・・・−ガスレーザ管、２・・・・・・陽極、３
・・・・・・陰極。
４・・・・・・筐体、５・・・・・・ホルダー、６・・
・・・・全反射鏡側ジンバル、７・・・・・・出力側凹
面鏡のジンバル、８・・・・・・ブリュースタ窓、９・
・・・・・プラズマ細管、１０・・・・・・出力側凹面
鏡７に近いプラズマ細管。
代理人 弁理士 内 原 晋（丘濃モFig. 1 is a configuration diagram of an optical resonator in a plurality of output side concave mirrors and a total reflection side plane mirror, Fig. 2 is an enlarged view of a gimbal section equipped with a plurality of output side concave mirrors, and Fig. 3 is an illustration of an embodiment of the present invention. FIG. 2 is a cross-sectional view of the configuration of a gas laser oscillator. Input...-Gas laser tube, 2...Anode, 3
······cathode. 4... Housing, 5... Holder, 6...
... Total reflection mirror side gimbal, 7 ... Output side concave mirror gimbal, 8 ... Brewster window, 9.
...Plasma capillary, 10...Plasma capillary near the output side concave mirror 7. Agent: Susumu Uchihara, patent attorney (Nomo Oka)
Claims (1)
共振器を構成する一対の反射鏡のうち出力側反射鏡は複
数の曲率から成る反射鏡を取付けたマウントより構成さ
れ、任意の曲率を選択し切換える機構を備えていること
を特徴とするガスレーザ装置。In a gas laser device that includes a laser tube and an optical resonator, the output side reflector of the pair of reflectors that make up the optical resonator is composed of a mount to which reflectors with multiple curvatures are attached, and any curvature can be selected. A gas laser device characterized by being equipped with a switching mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15557383A JPS6047485A (en) | 1983-08-25 | 1983-08-25 | Gas laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15557383A JPS6047485A (en) | 1983-08-25 | 1983-08-25 | Gas laser device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6047485A true JPS6047485A (en) | 1985-03-14 |
Family
ID=15608995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15557383A Pending JPS6047485A (en) | 1983-08-25 | 1983-08-25 | Gas laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6047485A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04240307A (en) * | 1991-01-25 | 1992-08-27 | Matsushita Electric Ind Co Ltd | Heat generating device |
| CN107498194A (en) * | 2016-06-14 | 2017-12-22 | 三星显示有限公司 | Laser crystallization apparatus and method |
| KR101894386B1 (en) * | 2018-04-25 | 2018-09-04 | (주)블루코어컴퍼니 | Patterned laser light output device |
| CN108736306A (en) * | 2018-05-23 | 2018-11-02 | 深圳市华星光电半导体显示技术有限公司 | Optical resonator and laser |
-
1983
- 1983-08-25 JP JP15557383A patent/JPS6047485A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04240307A (en) * | 1991-01-25 | 1992-08-27 | Matsushita Electric Ind Co Ltd | Heat generating device |
| CN107498194A (en) * | 2016-06-14 | 2017-12-22 | 三星显示有限公司 | Laser crystallization apparatus and method |
| KR101894386B1 (en) * | 2018-04-25 | 2018-09-04 | (주)블루코어컴퍼니 | Patterned laser light output device |
| CN108736306A (en) * | 2018-05-23 | 2018-11-02 | 深圳市华星光电半导体显示技术有限公司 | Optical resonator and laser |
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