JPS59179630A - プラスチツクへの被膜形成方法 - Google Patents
プラスチツクへの被膜形成方法Info
- Publication number
- JPS59179630A JPS59179630A JP5672583A JP5672583A JPS59179630A JP S59179630 A JPS59179630 A JP S59179630A JP 5672583 A JP5672583 A JP 5672583A JP 5672583 A JP5672583 A JP 5672583A JP S59179630 A JPS59179630 A JP S59179630A
- Authority
- JP
- Japan
- Prior art keywords
- film
- plastic
- metal compound
- sputtering
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/60—Deposition of organic layers from vapour phase
Landscapes
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5672583A JPS59179630A (ja) | 1983-03-31 | 1983-03-31 | プラスチツクへの被膜形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5672583A JPS59179630A (ja) | 1983-03-31 | 1983-03-31 | プラスチツクへの被膜形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59179630A true JPS59179630A (ja) | 1984-10-12 |
| JPH0222143B2 JPH0222143B2 (enExample) | 1990-05-17 |
Family
ID=13035466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5672583A Granted JPS59179630A (ja) | 1983-03-31 | 1983-03-31 | プラスチツクへの被膜形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59179630A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008001989A (ja) * | 2006-06-23 | 2008-01-10 | Qimonda Ag | スパッタ堆積装置およびスパッタ堆積方法 |
| JP2016148108A (ja) * | 2015-02-11 | 2016-08-18 | 煙台首鋼磁性材料株式有限公司 | ネオジム磁石の表面コーティング装置及び表面コーティング方法 |
| JP2022014978A (ja) * | 2020-07-08 | 2022-01-21 | 株式会社アルバック | スパッタリング装置及び金属化合物膜の成膜方法 |
-
1983
- 1983-03-31 JP JP5672583A patent/JPS59179630A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008001989A (ja) * | 2006-06-23 | 2008-01-10 | Qimonda Ag | スパッタ堆積装置およびスパッタ堆積方法 |
| JP2016148108A (ja) * | 2015-02-11 | 2016-08-18 | 煙台首鋼磁性材料株式有限公司 | ネオジム磁石の表面コーティング装置及び表面コーティング方法 |
| JP2022014978A (ja) * | 2020-07-08 | 2022-01-21 | 株式会社アルバック | スパッタリング装置及び金属化合物膜の成膜方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0222143B2 (enExample) | 1990-05-17 |
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