JPS59179321U

JPS59179321U - magnetic sensor

Info

Publication number: JPS59179321U
Application number: JP7333283U
Authority: JP
Inventors: 克人長野; 均大竹; 横堀　渉
Original assignee: ティーディーケイ株式会社
Priority date: 1983-05-17
Filing date: 1983-05-17
Publication date: 1984-11-30
Also published as: JPH0346333Y2

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図〜第３図は、本考案の実施例を説明するための図
であり、こあうち第１図が平面図１、第２図が第１図の
■−■線切断端面図、第３図が、使用例を示す断面図で
ある。１・・・・・・磁気センサ、１１・・・・・・主検知部
、１１Ｇ・・・・・・副検知部、２・・・・・・第１の
基板、２０・・・・・・第２の基板、３１．３２，３０
１．３０２・・・・・・強磁性薄膜、３・１１，３２１
．３０１１．３０２１・・聞検知部分、３１５，３１７
，３２５，３２７゜３０１５．３０１？、３０２５．３
０２７・・間電極部分、４１５，４１７，４２５，４２
７゜４０１５．４０１？、４０２５．４０２７・・・・
・・電極層、５．５０・・・・・・保護層、６５．６７
．６０５゜６０７・・・・・・リード体、７・・・・・
・樹脂モールド、Ｍ・・・・・・バイアスマグネット、
Ｒ・・・・・・回転子。1 to 3 are diagrams for explaining an embodiment of the present invention, in which FIG. 1 is a plan view 1, FIG. 2 is an end view cut along the line ■-■ in FIG. FIG. 3 is a sectional view showing an example of use. DESCRIPTION OF SYMBOLS 1... Magnetic sensor, 11... Main detection part, 11G... Sub detection part, 2... First board, 20...・Second board, 31.32,30
1.302...Ferromagnetic thin film, 3.11,321
．． 3011.3021...Hearing detection part, 315,317
,325,327°3015.301? ,3025.3
027... Interelectrode part, 415, 417, 425, 42
7゜4015.401? , 4025.4027...
... Electrode layer, 5.50 ... Protective layer, 65.67
．． 605゜607...Lead body, 7...
・Resin mold, M...Bias magnet,
R...Rotor.

Claims

[Claims for Utility Model Registration] 1. A main detecting device having a convex portion on a part of the surface of the first substrate, and having at least one ferromagnetic thin film over the convex portion and the area other than the convex portion. A main sensing part is provided with a magnetic thin film part and is configured such that a lead body can be connected to each ferromagnetic thin film located in an area other than the top surface of the convex part on the surface of the first substrate; A sub-sensing section having a ferromagnetic thin film section for sub-detection having one ferromagnetic thin film is laminated and integrated so that the ferromagnetic thin-film section for main detection is located on the outer surface. Features magnetic sensor. 2 The height of the convex portion on the surface of the first substrate is 0.02 to 2r
The magnetic sensor according to claim 1 of the utility model registration, which is rrm. 3 The convex portion has a flat top surface, this top surface and a flat bottom,
2. The magnetic sensor according to claim 1 or 2, which comprises a tapered surface connected to the surface. 4 The angle between the tapered surface and the bottom flat surface is 20 to 80°
A magnetic sensor according to claim 3 of the utility model registration claim. 5 The tapered surface, the bottom flat surface, the top surface and the 9 joints are
A magnetic sensor according to claim 3 or 4 of the utility model registration claim having a curvature. 6. The ferromagnetic thin film of the ferromagnetic thin film section for main detection is formed on the bottom flat surface, tapered surface and top surface of the first substrate surface. The magnetic sensor according to any one of the above. 7. The magnetic sensor according to claim 6, wherein the lead body is configured to be connected to the ferromagnetic thin film of the main detection ferromagnetic thin film portion located on the flat bottom surface. 8 Utility model in which the main sensing ferromagnetic thin film part and/or the sub-sensing ferromagnetic thin film part consists of at least one ferromagnetic thin film and a protective layer provided over almost the entire surface of the substrate. A magnetic sensor according to any one of registered claims 1 to 7. 9 Claims for registration of a utility model in which a ferromagnetic thin film part for main detection and a ferromagnetic thin film part for sub-detection are provided on both ends of the ferromagnetic thin film, and have an electrode layer interposed at the connection part with the lead body The magnetic sensor according to any one of Items 1 to 8. 10. The magnetic sensor according to any of claims 1 to 9 of the patent application, wherein each ferromagnetic thin film has a thickness of 100 to 40,000 cm. 11 The ferromagnetic thin film for main detection has a strip-shaped detection portion provided on the top surface of the convex portion, and the inside of the strip of this detection portion is
The magnetic sensor according to any one of claims 1 to 10, wherein the magnetic sensor has a diameter of 5 to 100 μm. 12 There are two or more ferromagnetic thin films for main detection, and the detection parts of the ferromagnetic thin films for main detection are arranged parallel to each other with a gap of 10 to 2000 μm.Claim 1 of the Utility Model Registration The magnetic sensor according to any one of Items 1 to 11. 13. According to any one of claims 1 to 12 of the utility model registration claim, in which there are two or more ferromagnetic thin films in the sub-detection section, and the detection parts of the ferromagnetic thin films in the sub-detection section are arranged parallel to each other. Magnetic sensor described. 14 Utility model registration claims 1 to 13 in which the main detection part and the sub-detection part are laminated and integrated so that the first substrate and the ferromagnetic thin film part of the sub-detection part are in contact with each other. The magnetic sensor according to any one of the above. 15 Utility model registration claimed in any one of claims 1 to 14, in which a main detection section and a sub-detection section are laminated and integrated so that the first substrate and the second substrate are in contact with each other. magnetic sensor.