JPS59179320U

JPS59179320U - magnetic sensor

Info

Publication number: JPS59179320U
Application number: JP7333183U
Authority: JP
Inventors: 克人長野; 均大竹; 横堀　渉
Original assignee: ティーディーケイ株式会社
Priority date: 1983-05-17
Filing date: 1983-05-17
Publication date: 1984-11-30

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図〜第４図は１．本考案の実施例を説明するだめの
図であり、このうち第１図が平面図、第２図が第１図の
■−■線切断端面図、第３図が第１図の■−■線切断端
面図、第４図が使用例を説明するための断面図である。１・・・・・・磁気センサ、２・・・・・・基板、３１
．３２・・・・・・主検知用の強磁性薄膜、３５．３６
・・開削検知用の強磁性薄膜、３１１，３２１，３５１
゜３６１・・・・・・検知部分、３１５，３１７，３２
５゜３２７．３５５，３５７，３６５，３６７・・曲電
極部分、４１５．４１７，４２５，４２７゜４５５．４
５７，４６５，４６７・・・・・・電極層、５・・・・
・・保護層、６５．６７・・・・・・リード体、７・・
曲樹脂モールド、Ｍ・・・・・・バイアスマクネット、
Ｒ・・四回転子。Figures 1 to 4 are 1. FIG. 1 is a plan view, FIG. 2 is an end view cut along the line ■-■ in FIG. 1, and FIG. A line-cut end view and FIG. 4 are cross-sectional views for explaining an example of use. 1... Magnetic sensor, 2... Substrate, 31
．． 32...Ferromagnetic thin film for main detection, 35.36
...Ferromagnetic thin film for excavation detection, 311, 321, 351
゜361...Detection part, 315, 317, 32
5゜327.355,357,365,367...Curved electrode part, 415.417,425,427゜455.4
57,465,467... Electrode layer, 5...
...Protective layer, 65.67...Lead body, 7...
Curved resin mold, M...bias maknet,
R... Quadruple rotor.

Claims

[Claims for Utility Model Registration] 1. A magnetic secessor in which a ferromagnetic thin film portion having two or more ferromagnetic thin films is provided on the surface of a substrate, and a pair of lead bodies can be connected to the ferromagnetic thin film, A convex portion is provided on a part of the surface of the substrate, and at least one ferromagnetic thin film for main detection is provided over the convex portion and an area other than the convex portion,
At least one ferromagnetic thin film for sub-detection is provided in a region other than the top surface of the convex portion, and a lead body is configured to be connectable to each ferromagnetic thin film located in the region other than the top surface of the convex portion. magnetic sensor. 2. The magnetic sensor according to claim 1, wherein the height of the convex portion on the substrate surface is 0.02 to 2 Truns. 3. The magnetic sensor according to claim 1 or 2, wherein the convex portion includes a flat top surface and a tapered surface connected to the top surface and the flat bottom surface.゛4 The angle between the tapered surface and the flat bottom surface is 20 to 80 degrees.
A magnetic sensor according to claim 3 of the utility model registration claim. 5 The connection between the tapered surface, the flat bottom surface, and the top surface is
A magnetic sensor according to claim 3 or 4 of the utility model registration claim having a curvature. 6. The magnetic sensor according to any one of claims 3 to 5, wherein the ferromagnetic thin film for main detection is formed on the flat bottom surface, the tapered surface, and the top surface. 7. The magnetic sensor according to claim 6, wherein the lead body is configured to be connected to a ferromagnetic thin film for main detection located on the flat bottom surface. 8. The ferromagnetic thin film portion consists of two or more ferromagnetic thin films and a protective layer □ provided over almost the entire surface of the substrate. Claims 1 through 7. The magnetic sensor described in . 9. The utility model according to any one of claims 1 to 8, wherein the ferromagnetic thin film part is provided on both ends of the ferromagnetic thin film and has an electrode layer interposed at the connection part with the lead body. magnetic sensor. The magnetic sensor according to any one of claims 1 to 9, wherein each of the IO magnetic thin films has a thickness of 100 to 4000A. 11 The ferromagnetic thin film for main detection has a strip-shaped detection portion provided on the top surface of the convex portion, and the inside of the strip of this detection portion is
The magnetic sensor according to any one of claims 1 to 10, which has a diameter of 5 to 100 μm. 12. The magnetic sensor according to any one of claims 3 to 11, wherein the ferromagnetic thin film for sub-detection is formed on the bottom flat surface of the substrate surface. 13. The magnetic sensor according to any one of claims 1 to 11, wherein the ferromagnetic thin film for sub-detection is formed on the back surface of the substrate. 14 There are two or more ferromagnetic thin films for main detection, and the sensing parts of the ferromagnetic thin films for main detection are arranged parallel to each other with a gap of 10 to 2000 μm.Claim 1 of the Utility Model Registration The magnetic sensor according to any one of Items 1 to 13. 15. According to any of claims 1 to 14 of the utility model registration claim, in which there are two or more ferromagnetic thin films for sub-detection, and the sensing portions of the ferromagnetic thin films for sub-detection are arranged parallel to each other. Magnetic sensor described.