JPS59166125U

JPS59166125U - magnetic sensor

Info

Publication number: JPS59166125U
Application number: JP6061083U
Authority: JP
Inventors: 克人長野; 均大竹; 横堀　渉
Original assignee: ティーディーケイ株式会社
Priority date: 1983-04-21
Filing date: 1983-04-21
Publication date: 1984-11-07

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図〜第４図は、本考案の実施例を示す図であり、こ
のうち第１図が断面図、第２図が第１図の右側面図、第
３図が第２図における第１のセンサ部分の正面図、第４
図が第３図の部分拡大断面図である。第５図は本考案の
他の実施例を示す図である。１１・・・第１のセンサ部分、１２・・・第２のセンサ
部分、２１・・・第１の基板、２２・・・第２の基板、
３１・・・第１の主検知用の強磁性薄膜、３２・・・第
２の主検知用の強磁性薄膜、３１１，３２１・・・検知
部分、３１５，３１７，３２５，３２７・・・電極部分
、３６・・・第１の副検知用の強磁性薄膜、３７・・・
第２の副検知用の強磁性薄膜、４１・・・保護層、５・
・・絶縁性スペーサー、６・・・接着剤、７１１゜７２
１．７１２，７２２・・・リード、８・・・バイアスマ
グネット、９・・・回転子。1 to 4 are views showing an embodiment of the present invention, of which FIG. 1 is a sectional view, FIG. 2 is a right side view of FIG. 1, and FIG. Front view of sensor part 1, 4th
The figure is a partially enlarged sectional view of FIG. 3. FIG. 5 is a diagram showing another embodiment of the present invention. DESCRIPTION OF SYMBOLS 11... 1st sensor part, 12... 2nd sensor part, 21... 1st board|substrate, 22... 2nd board|substrate,
31... Ferromagnetic thin film for first main detection, 32... Ferromagnetic thin film for second main detection, 311, 321... Sensing portion, 315, 317, 325, 327... Electrode Part, 36... Ferromagnetic thin film for first sub-detection, 37...
Ferromagnetic thin film for second sub-detection, 41... protective layer, 5.
...Insulating spacer, 6...Adhesive, 711°72
1.712,722...Lead, 8...Bias magnet, 9...Rotor.

Claims

[Claims for Utility Model Registration] 1- A first sensor portion provided with a first ferromagnetic thin film portion having at least one ferromagnetic thin film on a first substrate;
a second sensor portion including a second ferromagnetic thin film portion having at least one ferromagnetic thin film on a second substrate;
The first sensor part and the second sensor part are integrated so that the ferromagnetic thin film of the first sensor part and the ferromagnetic thin film of the second sensor part face each other and are separated by a predetermined thickness. Features magnetic sensor. 2. The magnetic sensor according to claim 1, wherein the predetermined thickness is 10 to 1000 μm. 3. Insulate the first sensor portion and the second sensor portion so that the first ferromagnetic thin film portion of the first sensor portion and the second ferromagnetic thin film portion of the second sensor portion face each other. TI magnetic sensor 4 according to claim 1 or 2, which is formed by integrating a first sensor part and a second sensor part through a magnetic spacer. 2. The magnetic sensor according to claim 1 or 2, which is integrated so that the back surface of the substrate of the second sensor portion is located on the ferromagnetic thin film portion of the magnetic sensor. 5. A request for registration of a utility model in which a first sensor part and a second sensor part are integrated such that the back surface of the first substrate of the first sensor part and the back surface of the substrate of the second sensor part are opposed to each other. A magnetic sensor according to scope 1 or 2. 6 Utility model registration claims 1 to 3 in which the magnetic sensor is used to detect rotation by being arranged on the rotation circumference of a circular rotor that is multi-pole magnetized in the circumferential direction. Item 5: Power heat - self-mounted magnetic sensor. 7 The first ferromagnetic thin film part and the second ferromagnetic thin film part are
Utility model registration claims 1 to 6 each comprising a ferromagnetic thin film, or a ferromagnetic thin film and a protective layer or plate-like body provided on the ferromagnetic thin film. magnetic sensor. 8. The magnetism according to any one of claims 1 to 7, wherein the ferromagnetic thin films of the first ferromagnetic thin film part and the second ferromagnetic thin film part have a thickness of 100 to 40,000 mm. sensor. 9 The ferromagnetic thin films of the first ferromagnetic thin film portion and the second ferromagnetic thin film portion include a ferromagnetic thin film for main detection and a ferromagnetic thin film for sub-detection, respectively. Scope of Utility Model Registration Claim 1 9. The magnetic sensor according to any one of items 8 to 8. 10 The width of the detection portion of the ferromagnetic thin film for main detection of the first ferromagnetic thin film portion and the second ferromagnetic thin film portion is 5 to 100 mm.
The magnetic sensor according to any one of claims 1 to 9, which is registered as a utility model. 11 The length of the detection part of the ferromagnetic thin film for main detection of the first ferromagnetic thin film part and the second ferromagnetic graffiti film part is 0.1
10. The magnetic sensor according to any one of claims 1 to 10, which is a utility model registration claim. 12 The detection portions of the ferromagnetic thin films for main detection of the first ferromagnetic thin film portion and the second ferromagnetic thin film portion are respectively
12. A magnetic sensor according to any one of claims 1 to 11, which is arranged parallel to an end surface of the first substrate and an end surface of the second substrate. 13 Utility model registration request where the thickness direction of the rotor's circumferential part is parallel to the longitudinal direction of the detection portion of the ferromagnetic thin film for main detection of the first ferromagnetic thin film part and the second ferromagnetic thin film part. The magnetic sensor according to any one of the ranges 6 to 12. 14. Utility model registration claims 1 to 1 in which there is no insulating spacer or other substrate on the lead connection ends of the ferromagnetic thin film both ends of the first ferromagnetic thin film part and the second ferromagnetic thin film part. The magnetic sensor according to any one of Item 13.