JPS59173339U - Support device for rotating stage for semiconductor device manufacturing - Google Patents
Support device for rotating stage for semiconductor device manufacturingInfo
- Publication number
- JPS59173339U JPS59173339U JP6733383U JP6733383U JPS59173339U JP S59173339 U JPS59173339 U JP S59173339U JP 6733383 U JP6733383 U JP 6733383U JP 6733383 U JP6733383 U JP 6733383U JP S59173339 U JPS59173339 U JP S59173339U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- support device
- rotating stage
- device manufacturing
- rotary stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図面は本考案の一実施例を示すもので、第１図はレチク
ル欠陥検査装置のステージ系を示す平面図、第２図はそ
の側面図、第３図は回転中心を構 □成する板ば
ねを示す平面図、第４図は第３図中■−ＩＶ線に沿って
示す断面図、第５図はテーブルの移動方向を示す座標系
図である。
２・・・基板（ｘ、 ｙステージ）、５・・・θ（回転
）ステージ１．１０．１１・・・ばね材（板ばね、線ば
ね）。The drawings show one embodiment of the present invention, in which Fig. 1 is a plan view showing the stage system of a reticle defect inspection device, Fig. 2 is a side view thereof, and Fig. 3 is a leaf spring constituting the center of rotation. FIG. 4 is a sectional view taken along the line -IV in FIG. 3, and FIG. 5 is a coordinate system diagram showing the moving direction of the table. 2... Substrate (x, y stage), 5... θ (rotation) stage 1.10.11... Spring material (plate spring, wire spring).
Claims (3)
Ｘ字状に交差するばねを介して連結し、このばね材によ
り上記回転ステージの回転中心を構成したことを特徴と
する半導体装置製造用回転ステージの支持装置。(1) Manufacture of a semiconductor device characterized in that a substrate and a rotary stage provided on the substrate are connected via springs that intersect in an X-shape, and the center of rotation of the rotary stage is constituted by the spring material. Support device for rotary stage.
新案登録請求の範囲第１−項記載の半導体装置製造用回
転ステージの支持装置。(2) A support device for a rotary stage for semiconductor device manufacturing according to claim 1, wherein the spring member is in the shape of a leaf spring.
新案登録請求の範囲第１項記載の半導体装置製造用θ回
転ステージの支持装置。(3) The support device for a θ rotation stage for semiconductor device manufacturing according to claim 1, wherein the spring material has a wire spring shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6733383U JPS59173339U (en) | 1983-05-04 | 1983-05-04 | Support device for rotating stage for semiconductor device manufacturing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6733383U JPS59173339U (en) | 1983-05-04 | 1983-05-04 | Support device for rotating stage for semiconductor device manufacturing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59173339U true JPS59173339U (en) | 1984-11-19 |
Family
ID=30197525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6733383U Pending JPS59173339U (en) | 1983-05-04 | 1983-05-04 | Support device for rotating stage for semiconductor device manufacturing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59173339U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS547277A (en) * | 1977-06-20 | 1979-01-19 | Nippon Telegr & Teleph Corp <Ntt> | Fine adjustment unit for stage |
| JPS5873117A (en) * | 1981-10-28 | 1983-05-02 | Hitachi Ltd | Fine adjustment |
-
1983
- 1983-05-04 JP JP6733383U patent/JPS59173339U/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS547277A (en) * | 1977-06-20 | 1979-01-19 | Nippon Telegr & Teleph Corp <Ntt> | Fine adjustment unit for stage |
| JPS5873117A (en) * | 1981-10-28 | 1983-05-02 | Hitachi Ltd | Fine adjustment |
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