JPS59172609A - Color filter - Google Patents

Abstract

PURPOSE:To obtain a red color filter which has a colored layer formed under control over film thickness by vacuum deposition while thin-film interference effect is utilized and has large difference in quantity of transmitted light between the light transmission wavelength area and a light attenuating wavelength area. CONSTITUTION:A pigment film has such film thickness that the transmittance to a light wave with a 550nm wavelength in the transmission wavelength range is maximum or at least between Tmax and Tmax.X85% within the film thickness range wherein a light wave of 650nm in the attenuation wavelength range has transmittance below a specific value. The refractive index of the colored layer used for a red color filter should be smaller than that of a substrate in order to set the optimum film thickness of the colored layer. Further, the center wavelength, i.e. 650nm is selected normally as a wavelength within the red transmission wavelength range, and 600nm are selected as representative wavelengths in the attenuation wavelength range. Then, the transmittance of light with some wavelength in the attenuation wavelength range should be some set value for the color filter.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a JY Schiller filter, and particularly to a red color fine color separation filter used in color image pickup devices, color displays, etc.

As a conventional general color filter, an organic dyed filter is known in which an organic polymer film is formed on a substrate and further dyed with a dye.

However, creating these filters requires a lot of man-hours and time due to dyeing, which is inefficient.

As the Ushida dyed layer, that is, the colored transparent layer, becomes comparatively thicker,
of. Since it is difficult to make the hardness uniform, it has the disadvantage that the permeation characteristics etc. are non-uniform.

In contrast, the coloring material is directly formed on the substrate by vacuum evaporation.
However, hue vapor deposition using this colored layer as an optical filter element is an excellent color filter that removes the flash of the dyed filter. It has the advantage that the cost required to create it is relatively low, and the colored layer created has excellent heat resistance.

In addition, since the colorant is directly deposited on the substrate without using a mordant layer or a charge-retaining layer such as a binder, the circulation required for a fine color separation filter can be easily obtained, and the coloring layer can be coated with the colorant. Since it is made from only a single layer, it is easy to obtain the light absorption necessary for color filters even if the layer thickness is thin.

However, when the thickness of the colored layer is on the order of the visible light wavelength or less, the behavior of the nine-color layer as a light absorption layer (dl) differs from that previously known. In other words, the influence of multiple beam interference is As a result, the transmittance characteristic curve with respect to film thickness changes becomes a curve with periodic peak values, rather than the conventionally well-known monotonically decreasing curve. .

Due to this phenomenon, the spectral transmittance characteristics of the coloring material-deposited color filter become poor, so in order to prevent this by 1υ), the entire layer was made 1υ faster by using a J2424 film that has the same R+i refractive index as the colored layer. The effect of light interference can be reduced by controlling the phase of the reflected light by using a transparent layer with an appropriate thickness and a refractive index different from that of the color layer. 7j is reduced (Japanese Patent Application Laid-Open No. 56-301.08).

However, it is difficult to select a transparent layer that has a high refractive index depending on the coloring material, and when forming multiple colors on the same substrate, it is difficult to It is very difficult to put out the conditions /, :/.

The present invention has been proposed in view of the above points, and has a colored layer formed by controlling the 1ψ accumulation (by vacuum evaporation) to make use of the thin film interference effect. The purpose of the present invention is to provide a color filter that increases the difference in the amount of transmitted light in the attenuation wavelength range.

Without further ado, we will briefly explain the light transmission characteristics and phenomena of the colored layer, which are the premises of Example 5iii, and the conditions for obtaining the film thickness of the color layer A according to the present invention.

In general, when light is transmitted through a light-absorbing δ ~ film, the transmitted light noi (and the reflected scene are determined by the refractive index (n) of the troughs of the thin film and 7V-1 film, the attenuation 4 (k), 16
The thickness of the film is d). Among these, the ノ++J refractive index and the inner layer are unique to the color layer (here, the colored layer) and the upper and lower layers. Therefore, in order to control the amount of transmitted light, it is necessary to change the thickness of one block.

FIG. 1 is a diagram showing the relationship between the light transmittance for light in the transmission wavelength range and the +m thickness of the colored layer. The solid line is the film thickness vs. light transmittance curve when optical interference effects are considered, and the broken line is the film thickness vs. light transmission curve when optical interference effects are not considered. In the figure, the 1jψ thickness d of the coloring l·ρ is on the same order as or less than the wavelength of this light, and therefore, the absorption of -11° by the colored layer is small, so the interference effect is significant. The nature of the film thickness-light transmittance curve changes depending on the relationship between the refractive index of the colored layer and the refractive index of the substrate, but this figure shows when the refractive index of the substrate is higher than that of the colored layer. .

;、! Figure 52 shows the relationship between the light transmittance for light in the attenuation wavelength range and the 1lrA thickness of the colored layer. in this case,
The thickness of the Numairo layer or its concentricity with the original wavelength or its 1
Even if the order is below -, the ridges in transmittance are stiff and shadows due to interference = +t cannot be seen.

3rd) N1G, hjl refractive index of the chromophoric layer is the no 1p of the substrate and j
Conditions similar to those in Figure 1 except that the condition is higher than
This is a diagram showing the relationship between the light transmittance for light in the transmission wavelength range and the first layer of the color layer. Fu ↓ d [Film thickness when optical interference effect is considered 1/phantom - original transmission small song 4j
k, and the temporary powder is a seven-layer film that does not take into account the optical interference effect) ↓
Although there is no light transmittance LLI, it differs from the case shown in FIG. 1 in that the transmittance decreases due to interference effects.

Note that light in the attenuation wavelength range does not exhibit interference effect -ψ; therefore, the characteristics are not affected by the condition that the refractive index of the colored layer is higher than the refractive index of the substrate; The relationship between the film thickness and the light transmission wavelength range is similar to that of the cloth 11'.

Next, from the above characteristic diagram, the conditions for setting the optimal green color layer to be used as a red color filter are determined. The H' and Di indexes (of the colored layer) are lower than the HOE refractive index of the 4R group. This is because there is a possibility (Fig. 3)
-li). 1. As a wavelength in the red transmission wavelength range, the central value of 650 nm is used as the wavelength, and a wavelength of 600 nm is used as a representative wavelength in the long wavelength range.

Assuming that Fig. 1 is a diagram showing the relationship between j film thickness - f: h undervalue at a wavelength of 4.50 nm, we assume that the relationship between
It is assumed that the diagram is a diagram showing the relationship between the IT thickness in nm and the thickness in nm.

The necessary condition for a color filter (is that the transmittance of wavelengths in the long range is less than or equal to a certain value without being shunted.If the set value is t1%, then from Figure 2, the J film at that time is Since the thickness is d, the required film thickness is d or more.

Under these conditions, the desired film thickness is the film thickness at which the transmittance of wavelengths in the transmission wavelength range 1 is between 1 and 2, and this is determined from FIG. That is, in FIG. 1, lj1ν1. -Id, greater than or equal to i
il, '+, I+9)4, which indicates the maximum transmittance Tmax in the box
C4 is d2. In this way, the optimal film thickness can be set, but in reality, variations occur in the film thickness setting, and the film thickness does not necessarily have to exhibit the maximum transmittance. The analogy is from Tm1n'21.
According to the diagram, the J exchange thickness is determined, 1, 1 day no 1 ↓dmi
n(d(dmax).

Next, a case will be explained in which the red color filter according to the embodiment of the present invention is applied to one element.

First of all, a solid ("2 ordinary tin elements were formed...")
Apply P IVI 210 with L spinner and adjust the odor to 700OA.After drying, perform a grill bake at 150-200'C for 3-60 minutes. Thereafter, stripe-shaped mask exposure was performed using deep ultraviolet light.Furthermore, a J-type development process was performed to form a resist mask.

Next, the entire surface of the wafer on which the resist mask has been formed is irradiated with deep ultraviolet light and bonded to a solvent.

Next, the wafer and morphine (M, O) powder were placed in a vacuum container with the given Irgazine Red BPT (Ciba Geigy C, I.7] 127) at a vacuum level of 1.
0-7~5 1, Mo boat at OTorr 4.50~500
It was heated to 0.degree. C. to perform vapor deposition of dolphin red BPT.

The thickness of the deposited film at this time was set as follows based on the above-mentioned principle. The refractive index (n) and attenuation rate (10) of copper phthalocyanine were calculated using the method of ellipsometry. As a result, n = 2.:3. .01, and at the wavelength in the attenuation wavelength range (λ=550 nm), n=2.(', ), ]
<=0.5, and the bending rate of Si is n=3.8
(λ-650nm).

n=4.2 (λ-550 nm). Using this value, the relationship between j film thickness and light transmittance is graphed in Figure 4 (f
yj.

Figure 5 (attenuation wavelength range). If we set the transmittance in the attenuation wavelength range to 3% or less, as shown in Figure 5,
It can be seen that the film thickness must be 270 nm or more. Under these conditions, the film thickness at which the wavelength of the transmission wavelength castle exhibits the maximum transmittance is the 4th layer.
From the figure, it can be seen that d == 35011111 and the transmittance of J′ is 85%. When the transmittance in the transmission wavelength range is required to be more than a certain set value, according to Figure 4, The range in which the film 19 should be set is determined accordingly.

In the example, the thickness of the deposited film is 350 nm.

IH for 3 minutes in FPM210D (FPM2) for CL (Lfτ I11: manufactured by Taikin Industries)
A red filter was formed on the wafer by dissolving the resist mask and simultaneously removing unnecessary portions of the deposited film.

For comparison, a conventional color filter, ie, a color filter using an organic polymer film, will be explained.

First, a gelatin layer was provided on the wafer, and dyed with Kayanol Milling Red R8 (Nippon Kaso), which has almost the same spectral absorption characteristics as Irukazin Red BPT, followed by known photoetching using a resist. Patterning was performed according to the method.

The relationship between the II wave thickness and the transmittance at this time is shown in FIG. 6 (transmission wavelength range) and No. 7 (attenuation wavelength range). As is clear from the figure, the optimal film thickness setting value is 4000 nm, and the maximum transmittance in the transmission wavelength range is 60%. As is clear from this, the color filter according to the present invention can obtain a transmittance 25% higher than that of the conventional color filter.

Example 2 A case will be described in which a liquid crystal color display is manufactured using a red color filter according to the present invention. First, 5n02 transparent 'Jt formed on a glass plate.
Chromo7tal L/Nod A3B is used as a polar plate and as a coloring material.
(C, 1,65300) was used to form a colored layer.

After that, as a pannulation film of the colored layer, P G f
Form ViA. Thereafter, a striped pattern was formed using the same procedure as in Example 1. In addition, 5n
02(7) The refractive index is n = 2.0 +' P GIv
The refractive index n of IA was 1.49, and a colored layer was formed with a thickness of 250 nm, which was the optimum film thickness value obtained from a film thickness-transmittance relationship diagram created using these values. the result,
A red filter with a transmission wavelength of 8.0% was obtained.This was bonded to a liquid crystal plate to create a liquid crystal color display.

As explained below, according to the present invention, a color filter with good filter resistance can be easily obtained. Tsukinoko,
Since it is a film, it is suitable for microfabrication, and is particularly useful for imaging devices and displays that require high precision.

Incidentally, the substrate used for the color filter according to the present invention is
Depending on the usage, it is selectable and not limited to convention.

Specifically, the following items can be used.

Glass plate, era name: J44→Thorn) Fingerboard, gelatin, polyvinyl alcohol, methyl methacrylate-1, polyester, butyral.

It is made of polyamide. 11
0. It is also possible to combine the color filter with the one that overuses it. In that case, - on the board: "CCD (charge coupled device), BB
I) (bucket brigade device), CID (
Examples include solid-state imaging devices such as charge injection devices, cathode ray tube display surfaces, image pickup tube light receiving surfaces, liquid crystal display surfaces, and photoreceptors for color electrophotography.

Any coloring material for the colored layer (d) that can be vacuum deposited can be used without any problem.

For example, (J) monoazo monolite first let B of naphthols (C, ■, N
O, 1, 2070) Noko First Red D 37
52 (C, 1, No 12310) Noko Red L
3750 (C, 1, Nα12120
) Noko Red L3250 (C, I
. N [L 12085) Oriental Red FBNe
w (C, 1, N [L 12'190) Monolite Red PC (C, I. N [l 12090) Loran Zeknal Loop F 4 RH (C, I. Nu 1
2420), Da Let D4250 (C
0 ■. No, 12335) Loran Seignard Loop F2L (C01, No, 12460) Loran Seignal Loop FRL (C01, Nα124.
40) Irugaramet Bordeaux FBS (C,
1, Na1.2430) Noko Bordeaux L4651
' (C, 1, NO, 12385) Permanent-Bordeaux FGR (C, I. + va 12380) Nomura Fury, ) --r Roof/1092
(C1, NO, 12465) Dainichi First
Poppy Red G (C01, No1239 (1) Monolite Rubine M (C81,
Nl 12350) Aliraidoma/L, -7@Dark (C, J, N [+, 12/100) Zanyo Fast Red CR (C, 1, lV;?,
I 2300) Dainichi First Scaresoto G
(C, T, Ni1.] 23] 5) First Red N0.6 New (C, 1, N
O, 12355) Bolimo Red R (C, 1, No,
123: U0) Polimo Rose FBL
(C, I. NO, 12, "J 60) Bolimo Red PR (C, 1, fkai 12320) Dainichi Naftyramine Bordeaux 5B (C, I. + V1012J7
o) Noko First Let L 3855 (
C, 1, N [L] 2370) Simulator First Association Carmine BS (C, 1, NO, +2351) Permanent Carmine F B B (C,
1, NLl, I 2485) Permanent Pink■
♂3B (C01, NO, J2433)
1) V-Carmini/I-I R (C, i, + boiled 1)
22!10) Noko First Scarenoto L 42
52 (C,1,No, '1.2475) Permanent Maroon HFM (C,I.1sσ
12512) Permanent Red HFT
(C,1,NO,1251:3>1) V-CarmineHF3C (C,1,N[l 125]5) Permanent Cargo ZHF4C (C,L+Vln, T:25]
6) pv-Red HIi” 2 B
(C, 1, NO, 125171) (2) Anthraquinone colorant Chromophthal Red A 3B (C, 1,
NO, 65300) Helio Fast Maru E3R Zanyo Carmine L2B (C, I.N
O, 58000> Monolight Red Y
(C, 1, No, 59300) Chromophthal A
GR Paliogen Red L3530 (C91,N
α597], OO Permanent Red TG
(C, 1, No, 71.1.OO> Palyogen Red L3870HD (C, 1, Nα7] 1
45) Paris Mangen Maroon 3820 (C,
IJo, 71130) Palyogen Red L3880
HD (C, 1, NO, 71155) Kayasent
Scarlet E-2R (C, 1, NO, 7]] = 10)
Irgasin Red B P T (C,1
, r: [1,7]127) Helio First Narrow RLW (3) Indigoid colorant Chromophthal Bordeaux 1% (C,1,N
05733 ] 2) Lionogen-Zzeng R (C,
1,N[1,73915)N[L616 Red R(C,
1, lio 73395) Oralis Brilliant Pink (C, 1, No, 73360) (4) Quinacridone Colorant Lionogen Magenta R (C11, NO, 73915)
Hostabar Moored E G (C, 1,
NO, 73qo5) Lionogen Red 2 B,
(C, 1, NIl, 46500) Syncasia Magenta RT-243-() Syncasia Red-Blue RT-790-D (5) Dioxazine Colorant Chromophthal Violet B Fastgen Super Violet BBL (C
, 1, No. 5] 319) Furthermore, various resists may be appropriately selected and used as the resist used in the present invention. Typical examples (product names) of photoresists include the UFPR series (2,77
, 78,800) 'Ba'0IVIR:/l
)-su(81,83,85,87) 'River TPR'
``SVR''``O8R''``TPS'' and above manufactured by Tokyo Ohka, ``KIVIPR-809'' and ``KMR-747''
”” KMR-752”” KTFI℃ 'Kawa
PR""KPR-3"" KI) Made of R-4" or more -7 tack, "JSR"-CBR"" JSR, -CBR
-901""JSR-CIR-701" or higher "Waycoat LSI Re5ist" manufactured by Japan Synthetic Rubber
HPRPo5itive Re5ist (104,
106) “” Waycoat (HNR
, HNR-999, Negative HR.

IC, Type3IC, SC) "Made by Hunt"
AZ1350 ``AZ] 350J'' ``0DUR series (1
000,1001,1010,1014,ll0WR,
120) “Manufactured by Tsukushi Ohka,” AZ 2400-DU
V “Cypreni Nori” HPR (204, 206)
``No.
1 0 ””FBI 20 ”” FPM2 i
o "Daikin-made electron beam thinst" 0EBR (] 000.1010°1030, 1
00) “Tokyo Ohka” SEL (N, Type F
) ``Nomaru made'', ``EBR (1,9)'' ``Wooden made, etc.

[Brief explanation of the drawing]

FIG. 1 is a diagram for explaining the characteristics of a color filter according to an embodiment of the present invention. The relationship diagram between the transmittance and the thickness of 1 film, 2nd j/1 is a similar relationship for elements in the wavelength range of 1st and 1st. Third and first I: 'h
er, when the rudder force 1 factor of the plate is lower than the refractive index of the f color layer, the difference between the 9 underestimation and the j1φ thickness of light in the 1'r', l, lj□l wavelength range? ξI section 1 ゜l:・1. /1 figure (
d2 81 substrates according to embodiments of the present invention
Group 1 of light (λ = 650 nm) in the transmission wavelength range of the color filter formed with the red BPT vaporized ρ film] ηj
Figure 5 shows the coefficient diagram of the same aircraft for light in the θ1 wavelength range (λ-550n → transmittance and film thickness). Figure 6 shows the conventional %i A relationship diagram between the transmittance of the Kayanor Milling Red R8 dyed filter formed on the Si substrate soil in the transmission wavelength range (λ-650 nm) and the membrane thickness,
FIG. 7 shows a similar relationship between the transmittance of light (λ-550 nm) in the good wavelength range at 0 V and the film thickness. 1-1...Film thickness-light transmission curve that enhances the interference effect. Eno・
1-2... 1-bit ii6↓)jij- that has no interference effect
Original + 2 (P4 type surface line 3-1...Film thickness when interference effect is not 44 - light transmission, undercurvature, gland 3-2...Film thickness with interference effect - light transmission small curve Patent applicant: Canon Co., Ltd. Agent: Wakabayashi, Fallen Meishi Tachi (T, gi(d)) Figure 1 Figure 4 Figure 5

Claims (1)

[Claims] (1) In a color filter in which a dye film is formed on a substrate, the dye film has a thickness within a film thickness range in which a light wave with a wavelength of 650 nm in an attenuation wavelength range has a transmittance of a predetermined value or less, and is in a transmission wavelength range. A light wave with a certain wavelength of 550 nm has a maximum transmission small dimension, or at least Tmax, ~Tmax. A red color filter characterized by having a film having a transmittance in the range of ×85%.