JPS59162975A - 電子部品の乾燥装置 - Google Patents

電子部品の乾燥装置

Info

Publication number
JPS59162975A
JPS59162975A JP3583083A JP3583083A JPS59162975A JP S59162975 A JPS59162975 A JP S59162975A JP 3583083 A JP3583083 A JP 3583083A JP 3583083 A JP3583083 A JP 3583083A JP S59162975 A JPS59162975 A JP S59162975A
Authority
JP
Japan
Prior art keywords
drying
diode
electronic component
mark
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3583083A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0313751B2 (enrdf_load_stackoverflow
Inventor
Tokuichiro Takeuchi
竹内　徳一郎
Masami Matsui
正己 松井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3583083A priority Critical patent/JPS59162975A/ja
Publication of JPS59162975A publication Critical patent/JPS59162975A/ja
Publication of JPH0313751B2 publication Critical patent/JPH0313751B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
JP3583083A 1983-03-07 1983-03-07 電子部品の乾燥装置 Granted JPS59162975A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3583083A JPS59162975A (ja) 1983-03-07 1983-03-07 電子部品の乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3583083A JPS59162975A (ja) 1983-03-07 1983-03-07 電子部品の乾燥装置

Publications (2)

Publication Number Publication Date
JPS59162975A true JPS59162975A (ja) 1984-09-13
JPH0313751B2 JPH0313751B2 (enrdf_load_stackoverflow) 1991-02-25

Family

ID=12452873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3583083A Granted JPS59162975A (ja) 1983-03-07 1983-03-07 電子部品の乾燥装置

Country Status (1)

Country Link
JP (1) JPS59162975A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0313751B2 (enrdf_load_stackoverflow) 1991-02-25

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